We have constructed a very small and lightweight blood flowmeter using micromachining and surface mounting techniques for a wearable health monitoring system. The hybrid integrated structure of the optical system incorporates a InGaAsP-InP distributed feedback laser diode (DFB-LD) with a wavelength of 1310 nm, an edge-illuminated photodiode (PD) and a polyimide waveguide on silicon substrate (2 mm × 3 mm). This integrated flowmeter can be positioned directly on the tissue and permits real-time monitoring of capillary microcirculation. In-vivo measurements of blood perfusion in a finger confirm the feasibility of the blood flowmeter.


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