Abstract

In this paper, we describe the design, optimization and fabrication of side-illuminated p-i-n photodetectors, grown on InP substrate, suitable for surface hybrid integration in low-cost modules. The targeted functionalities of these photodetectors were a very high responsivity at 1.3-and 1.55-µm wavelengths and quasi-independent on the optical polarization, and had a high alignment tolerance. Moreover, in order to avoid any reliability problem, the principle of evanescent coupling was adopted. Two photodetectors were optimized, fabricated, and tested; the first was for classical cleaved fiber, and the second was for lensed fiber. Because the considered epitaxial structures were complicated to optimize, the method of the genetic algorithm was used, associated with a beam propagation method (BPM). The photodetectors are based on multimode diluted waveguides, which are promising structures in the field of optoelectronics and integrated optics. Starting from the presented comparisons between experimental and theoretical results, the interest of the design method is discussed and the complete performances of newly fabricated devices are presented. The aspect of the cutoff frequency is also considered.

[IEEE ]

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J. Lightwave Technol. (5)

H. Mawatari, M. Fukuda, K. Kato, T. Takeshita, M. Yuda, A. Kozen and H. Toba, "Reliability of planar waveguide photodiodes for optical subscriber systems", J. Lightwave Technol., vol. 16, pp. 2428-2434, Dec. 1998.

D. J. Vezzetti and M. Munowitz, "Design of strip-loaded optical waveguides for low-loss coupling to optical fibers", J. Lightwave Technol., vol. 10, pp. 581-586, 1992.

O. Mitomi, K. Kasaya, Y. Tohmori, Y. Suzaki, H. Fukano, Y. Sakai, M. Okamoto and S. Matsumoto, "Optical spot-size converters for low-loss coupling between fibers and optoelectronic semiconductor devices", J. Lightwave Technol., vol. 14, pp. 1714-1719, July 1996.

O. Mitomi, N. Yoshimoto, K. Magari, T. Ito, Y. Kawaguchi, Y. Suzaki, Y. Tohmori and K. Kasaya, "Analysing the polarization dependance in optical spot-size converter by using a semivectorial finite element beam propagation method", J. Lightwave Technol., vol. 17, pp. 1255-1261, July 1999 .

W. P. Huang, C. L. Xu, S. T. Chu and S. K. Chaudhuri, "The finite-difference beam propagation method: Analysis and assessment", J. Lightwave Technol., vol. 10, pp. 295-305, 1992.

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