Abstract

A passive polarization converter has been realized in silicon oxynitride (SiON) technology. The device is a grating assisted codirectional coupler consisting of segments of asymmetrically etched ridge waveguides. By using a double-masking technique, the fabrication of the device is tolerant with respect to the alignment of the required masks. Conversion efficiencies up to 0.98 ((TE -> TM) and (TM -> TE)) and insertion losses of 3 dB/cm have been measured. Using 2-D beam propagation method simulations,an observed beat pattern in the converter could be explained as due to a leaky mode, which is captured in the grating structure.

[IEEE ]

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