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Optica Publishing Group
  • Journal of Lightwave Technology
  • Vol. 17,
  • Issue 8,
  • pp. 1401-
  • (1999)

Design, Tolerance Analysis, and Fabrication of Silicon Oxynitride Based Planar Optical Waveguides for Communication Devices

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Abstract

Planar optical waveguiding structures for application in communication networks are highly demanding with respect to low insertion loss, efficient fiber-to-chip coupling, polarization independent operation, high integration density, reliable fabrication, and last but not least cost efficiency. When applying silicon oxynitride, which is a very versatile material, planar waveguiding structures can be designed having the potential of meeting all those requirements. In this paper, we will describe the design of such a waveguiding structure, demonstrate the practical feasibility of realizing this structure and discuss the preliminary measurement results.

[IEEE ]

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