Abstract

Planar optical waveguiding structures for application in communication networks are highly demanding with respect to low insertion loss, efficient fiber-to-chip coupling, polarization independent operation, high integration density, reliable fabrication, and last but not least cost efficiency. When applying silicon oxynitride, which is a very versatile material, planar waveguiding structures can be designed having the potential of meeting all those requirements. In this paper, we will describe the design of such a waveguiding structure, demonstrate the practical feasibility of realizing this structure and discuss the preliminary measurement results.

[IEEE ]

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References

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  1. R. Zengerle, B. Jacobs, W. Wiershausen, K. Faltin, and A. Kunz, "Efficient spot-size transformation using spatially separated InP/InGaAsP twin waveguides," J. Lightwave Technol., vol. 14, pp. 448-453, 1996.
  2. M. K. Smit, E. C. M. Pennings, and H. Blok, "A normalized approach to the design of low-loss optical waveguide bends," J. Lightwave Technol., vol. 11, pp. 1737-1742, 1993.

J. Lightwave Technol. (2)

R. Zengerle, B. Jacobs, W. Wiershausen, K. Faltin, and A. Kunz, "Efficient spot-size transformation using spatially separated InP/InGaAsP twin waveguides," J. Lightwave Technol., vol. 14, pp. 448-453, 1996.

M. K. Smit, E. C. M. Pennings, and H. Blok, "A normalized approach to the design of low-loss optical waveguide bends," J. Lightwave Technol., vol. 11, pp. 1737-1742, 1993.

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