Abstract

We report on the successful fabrication of a working three-dimensional (3-D) crystal operating at optical wavelength . The minimum feature size of the 3-D structure is 180 nm. The 3-D crystal is free from defects over the entire 6-inch silicon wafer and has an absolute photonic bandgap (PBG) centered at 1.6 m. Our data provides the first conclusive evidence for the existence of a complete 3-D PBG in optical . This development will pave the way to tinier, cheaper, more effective waveguides, optical switches and lasers.

[IEEE ]

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