Abstract

This paper reports on the design, fabrication, and performance of a novel MEMS (micro-electro-mechanical-system) fiber-optic switch based on surface-micromachined vertical torsion mirrors. The vertical torsion mirror itself can be used as a 1\;\times\;2 or an ON-OFF switch. A 2\;\times\;2 MEMS fiber-optic switch with four vertical torsion mirrors has also been fabricated. The switching voltage is measured to be 80 V for switching angles of 45^irc. We have achieved a switching time of less than 400 \mus (fall time) and an optical insertion loss of 1.25 dB for single-mode fibers. In addition, a bulk-micromachined silicon submount has been developed to package the switch with microball lenses and multimode fibers with passive alignment. With the micromachined switch chip and the hybrid-packaging scheme, the size, weight, and potentially the cost of the fiber-optic switches can be dramatically reduced.

[IEEE ]

PDF Article

References

  • View by:
  • |

  1. M. F. Dautartas, A. M. Benzoni, Y. C. Chen, and G. E. Blonder, "A silicon-based moving-mirror optical switch," J. Lightwave Technol., vol. 10, pp. 1078-1085, Aug. 1992.

J. Lightwave Technol. (1)

M. F. Dautartas, A. M. Benzoni, Y. C. Chen, and G. E. Blonder, "A silicon-based moving-mirror optical switch," J. Lightwave Technol., vol. 10, pp. 1078-1085, Aug. 1992.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.