This paper presents the design and the realization of a novel integrated Mach-Zehnder interferometer (MZI) with heterodyne schema. Well-controlled machining as well as ZnO thin-film transducer integration on the same Si substrate permits to transform an optically passive device to an active device with sinusoidal phase modulation. Theoretical and experimental results are presented, demonstrating that an efficient sensor can be designed and fabricated.
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
Login to access OSA Member Subscription