This paper presents the design and the realization of a novel integrated Mach-Zehnder interferometer (MZI) with heterodyne schema. Well-controlled machining as well as ZnO thin-film transducer integration on the same Si substrate permits to transform an optically passive device to an active device with sinusoidal phase modulation. Theoretical and experimental results are presented, demonstrating that an efficient sensor can be designed and fabricated.


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