Abstract

Silicon photonics enabling ultra-small photonic integrated circuits induces a necessity to develop efficient optical couplers that connect silicon waveguides with optical fibers or offchip other optical components. Vertical couplers are promising for both wafer-level testing and the integration of optical components on the chip surface, but so far grating couplers have been the only solution virtually. Very recently, we have developed a few-micron-scale vertically-curved silicon waveguide coupler “elephant coupler” formed by ion implantation method. This paper demonstrates that the coupler has high coupling efficiency, weak wavelength dependence, and weak incident angle dependence of wavelength window, which are not obtained by the grating couplers. The paper also demonstrates that the thermal annealing treatment can reduce optical propagation loss induced by the ion implantation.

© 2015 IEEE

Vertical silicon waveguide coupler bent by ion implantation

Tomoya Yoshida, Syougo Tajima, Ryohei Takei, Masahiko Mori, Noboru Miura, and Youichi Sakakibara
Opt. Express 23(23) 29449-29456 (2015)

Broad-band surface optical coupler based on a SiO₂-capped vertically curved silicon waveguide

Yuki Atsumi, Tomoya Yoshida, Emiko Omoda, and Youichi Sakakibara
Opt. Express 26(8) 10400-10407 (2018)

Low-loss, broadband and high fabrication tolerant vertically tapered optical couplers for monolithic integration of Si₃N₄ and polymer waveguides

Jinfeng Mu, Meindert Dijkstra, Yean-Sheng Yong, Frans B. Segerink, Kerstin Wörhoff, Marcel Hoekman, Arne Leinse, and Sonia M. García-Blanco
Opt. Lett. 42(19) 3812-3815 (2017)

Optical attenuation in ion-implanted silicon waveguide racetrack resonators

J. K. Doylend, P. E. Jessop, and A. P. Knights
Opt. Express 19(16) 14913-14918 (2011)

Low loss Ge-on-Si waveguides operating in the 8–14 µm atmospheric transmission window

K. Gallacher, R.W. Millar, U. Griškevičiūte, L. Baldassarre, M. Sorel, M. Ortolani, and D. J. Paul
Opt. Express 26(20) 25667-25675 (2018)