Abstract

700-nm-thick silicon nitride-on-insulator (SNOI) is widely used for nonlinear applications due to its broadband nearly zero flattened dispersion. In this paper, we present a grating coupler for the TE mode of strip waveguides on 700-nm-thick SNOI. Focusing grating structure and inverse taper are combined to reduce the footprint to 70.2 μm × 19.7 μm. The peak coupling efficiency is −3.7 dB and the 1-dB bandwidth is 54 nm. The fabrication process is CMOS-compatible with only one additional etching step required.

© 2015 IEEE

PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription