Abstract

In this paper, we describe the design and fabrication of 360 PPI flip-chip mounted active matrix (AM) addressable light emitting diode on silicon (LEDoS) micro-displays. The LEDoS micro-displays are self-emitting devices which have higher light efficiency than liquid crystal based displays (LCDs) and longer lifetime than organic light emitting diodes (OLEDs) based displays . The LEDoS micro-displays were realized by integrating monolithic LED micro-arrays and silicon-based integrated circuit using a flip-chip bonding technique. The active matrix driving scheme was designed on the silicon to provide sufficient driving current and individual controllability of each LED pixel. Red, green, blue and Ultraviolet (UV) LEDoS micro-displays with a pixel size of 50 $\mu$m and pixel pitch of 70 $\mu$m were demonstrated. With a peripheral driving board, the LEDoS micro-display panels were programmed to show representative images and animations.

© 2013 IEEE

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  1. D. Cho, W. S. Oh, G. W. Moon, "A novel adaptive dimming LED backlight system with current compensated X-Y channel drivers for LCD TVs," J. Display Technol. 7, 29-35 (2011).
  2. J. C. Liou, K. Lee, J. F. Huang, "Low crosstalk multi-view tracking 3-D display of synchro-signal LED scanning backlight system," J. Display Technol. 7, 411-419 (2011).
  3. S. Muthu, F. J. P. Schuurmans, M. D. Pashley, "Red, green, and blue LEDs for white light illumination," IEEE J. Sel. Topics in Quantum Electron. 8, 333-338 (2002).
  4. C. Y. Wu, T. F. Wu, J. R. Tsai, Y. M. Chen, C. C. Chen, "Multistring LED backlight driving system for LCD panels with color sequential display and area control," IEEE Trans. Ind. Electron. 55, 3791-3800 (2008).
  5. C. C. Chen, C. Y. Wu, Y. M. Chen, T. F. Wu, "Sequential color LED backlight driving system for LCD panels," IEEE Trans. Power Electron. 22, 919-925 (2007).
  6. C. H. Chen, F. C. Lin, Y. T. Hsu, Y. P. Huang, H. P. D. Shieh, "A field sequential color LCD based on color fields arrangement for color breakup and flicker reduction," J. Display Technol. 5, 34-39 (2009).
  7. J. H. Lee, X. Y. Zhu, S. T. Wu, "Novel color-sequential transflective liquid crystal displays," J. Display Technol. 3, 2-8 (2007).
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  9. J. Chan-Wook, C. H. Wai, E. Gu, M. D. Dawson, "High-density matrix-addressable AlInGaN-based 368-nm microarray light-emitting diodes," IEEE Photon. Technol. Lett. 16, 2421-2423 (2004).
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  14. V. W. Lee, I. Kymissis, A Directly Addressed Monolithic LED Array as a Projection Source (Blackwell, 2010) pp. 808-812.
  15. J. Day, J. Li, D. Y. C. Lie, C. Bradford, J. Y. Lin, H. X. Jiang, "III-Nitride full-scale high-resolution microdisplays," Appl. Phys. Lett. 99, 031116-031116-3 (2011).
  16. Z. J. Liu, K. M. Wong, C. W. Keung, C. W. Tang, K. M. Lau, "Monolithic LED microdisplay on active matrix substrate using flip-chip technology," IEEE J. Sel. Topics in Quantum Electron. 15, 1298-1302 (2009).
  17. C.-W. Sun, "71-1: Development of micro-pixellated GaN LED array micro-display system," SID Symp. Dig. Tech. Papers (2012) pp. 1042-1045.
  18. J. J. D. McKendry, "Visible-light communications using a CMOS-controlled micro-light- emitting-diode array," J. Lightw. Technol. 30, 61-67 (2012).
  19. J. Sang-Hoon, N. Woo-Jin, H. Min-Koo, "A new voltage-modulated AMOLED pixel design compensating for threshold voltage variation in poly-Si TFTs," IEEE Electron Device Lett. 25, 690-692 (2004).
  20. Z. J. Liu, K. M. Wong, W. C. Chong, K. M. Lau, "P-34: Active matrix programmable monolithic light emitting diodes on silicon (LEDoS) displays," SID Symp. Dig. Tech. Papers (2011) pp. 1215-1218.

2012 (2)

J. J. D. McKendry, "Visible-light communications using a CMOS-controlled micro-light- emitting-diode array," J. Lightw. Technol. 30, 61-67 (2012).

R. S. Chang, J. Z. Tsai, T. Y. Li, H. L. Liao, "LED backlight module by lightguide-diffusive component," J. Display Technol. 8, 79-86 (2012).

2011 (3)

D. Cho, W. S. Oh, G. W. Moon, "A novel adaptive dimming LED backlight system with current compensated X-Y channel drivers for LCD TVs," J. Display Technol. 7, 29-35 (2011).

J. C. Liou, K. Lee, J. F. Huang, "Low crosstalk multi-view tracking 3-D display of synchro-signal LED scanning backlight system," J. Display Technol. 7, 411-419 (2011).

J. Day, J. Li, D. Y. C. Lie, C. Bradford, J. Y. Lin, H. X. Jiang, "III-Nitride full-scale high-resolution microdisplays," Appl. Phys. Lett. 99, 031116-031116-3 (2011).

2009 (2)

Z. J. Liu, K. M. Wong, C. W. Keung, C. W. Tang, K. M. Lau, "Monolithic LED microdisplay on active matrix substrate using flip-chip technology," IEEE J. Sel. Topics in Quantum Electron. 15, 1298-1302 (2009).

C. H. Chen, F. C. Lin, Y. T. Hsu, Y. P. Huang, H. P. D. Shieh, "A field sequential color LCD based on color fields arrangement for color breakup and flicker reduction," J. Display Technol. 5, 34-39 (2009).

2008 (1)

C. Y. Wu, T. F. Wu, J. R. Tsai, Y. M. Chen, C. C. Chen, "Multistring LED backlight driving system for LCD panels with color sequential display and area control," IEEE Trans. Ind. Electron. 55, 3791-3800 (2008).

2007 (3)

C. C. Chen, C. Y. Wu, Y. M. Chen, T. F. Wu, "Sequential color LED backlight driving system for LCD panels," IEEE Trans. Power Electron. 22, 919-925 (2007).

K. Chilukuri, M. J. Mori, C. L. Dohrman, E. A. Fitzgerald, "Monolithic CMOS-compatible AlGaInP visible LED arrays on silicon on lattice-engineered substrates (SOLES)," Semicond. Sci. Technol. 22, 29-34 (2007).

J. H. Lee, X. Y. Zhu, S. T. Wu, "Novel color-sequential transflective liquid crystal displays," J. Display Technol. 3, 2-8 (2007).

2004 (2)

J. Sang-Hoon, N. Woo-Jin, H. Min-Koo, "A new voltage-modulated AMOLED pixel design compensating for threshold voltage variation in poly-Si TFTs," IEEE Electron Device Lett. 25, 690-692 (2004).

J. Chan-Wook, C. H. Wai, E. Gu, M. D. Dawson, "High-density matrix-addressable AlInGaN-based 368-nm microarray light-emitting diodes," IEEE Photon. Technol. Lett. 16, 2421-2423 (2004).

2003 (1)

H. W. Choi, C. W. Jeon, M. D. Dawson, P. R. Edwards, R. W. Martin, "Fabrication and performance of parallel-addressed InGaN micro-LED arrays," IEEE Photon. Technol. Lett. 15, 510-512 (2003).

2002 (1)

S. Muthu, F. J. P. Schuurmans, M. D. Pashley, "Red, green, and blue LEDs for white light illumination," IEEE J. Sel. Topics in Quantum Electron. 8, 333-338 (2002).

Appl. Phys. Lett. (1)

J. Day, J. Li, D. Y. C. Lie, C. Bradford, J. Y. Lin, H. X. Jiang, "III-Nitride full-scale high-resolution microdisplays," Appl. Phys. Lett. 99, 031116-031116-3 (2011).

IEEE J. Sel. Topics in Quantum Electron. (1)

Z. J. Liu, K. M. Wong, C. W. Keung, C. W. Tang, K. M. Lau, "Monolithic LED microdisplay on active matrix substrate using flip-chip technology," IEEE J. Sel. Topics in Quantum Electron. 15, 1298-1302 (2009).

IEEE Photon. Technol. Lett. (2)

J. Chan-Wook, C. H. Wai, E. Gu, M. D. Dawson, "High-density matrix-addressable AlInGaN-based 368-nm microarray light-emitting diodes," IEEE Photon. Technol. Lett. 16, 2421-2423 (2004).

H. W. Choi, C. W. Jeon, M. D. Dawson, P. R. Edwards, R. W. Martin, "Fabrication and performance of parallel-addressed InGaN micro-LED arrays," IEEE Photon. Technol. Lett. 15, 510-512 (2003).

IEEE Electron Device Lett. (1)

J. Sang-Hoon, N. Woo-Jin, H. Min-Koo, "A new voltage-modulated AMOLED pixel design compensating for threshold voltage variation in poly-Si TFTs," IEEE Electron Device Lett. 25, 690-692 (2004).

IEEE J. Sel. Topics in Quantum Electron. (1)

S. Muthu, F. J. P. Schuurmans, M. D. Pashley, "Red, green, and blue LEDs for white light illumination," IEEE J. Sel. Topics in Quantum Electron. 8, 333-338 (2002).

IEEE Trans. Ind. Electron. (1)

C. Y. Wu, T. F. Wu, J. R. Tsai, Y. M. Chen, C. C. Chen, "Multistring LED backlight driving system for LCD panels with color sequential display and area control," IEEE Trans. Ind. Electron. 55, 3791-3800 (2008).

IEEE Trans. Power Electron. (1)

C. C. Chen, C. Y. Wu, Y. M. Chen, T. F. Wu, "Sequential color LED backlight driving system for LCD panels," IEEE Trans. Power Electron. 22, 919-925 (2007).

J. Display Technol. (2)

D. Cho, W. S. Oh, G. W. Moon, "A novel adaptive dimming LED backlight system with current compensated X-Y channel drivers for LCD TVs," J. Display Technol. 7, 29-35 (2011).

J. C. Liou, K. Lee, J. F. Huang, "Low crosstalk multi-view tracking 3-D display of synchro-signal LED scanning backlight system," J. Display Technol. 7, 411-419 (2011).

J. Display Technol. (3)

J. Lightw. Technol. (1)

J. J. D. McKendry, "Visible-light communications using a CMOS-controlled micro-light- emitting-diode array," J. Lightw. Technol. 30, 61-67 (2012).

Semicond. Sci. Technol. (1)

K. Chilukuri, M. J. Mori, C. L. Dohrman, E. A. Fitzgerald, "Monolithic CMOS-compatible AlGaInP visible LED arrays on silicon on lattice-engineered substrates (SOLES)," Semicond. Sci. Technol. 22, 29-34 (2007).

Other (5)

V. W. Lee, I. Kymissis, A Directly Addressed Monolithic LED Array as a Projection Source (Blackwell, 2010) pp. 808-812.

C.-W. Sun, "71-1: Development of micro-pixellated GaN LED array micro-display system," SID Symp. Dig. Tech. Papers (2012) pp. 1042-1045.

C. Griffin, H. X. Zhang, B. Guilhabert, D. Massoubre, E. Gu, M. D. Dawson, "Micro-pixellated flip-chip InGaN and AlInGaN light-emitting diodes," 2007 Conf. LEOS and Laser Science Conf. (CLEO/QELS 2007) pp. 61-62.

C. W. Keung, Matrix-addressable III-nitride light emitting diode arrays on silicon substrates by flip-chip technology M.S. degree Electron. Comput. Eng. Hong Kong Univ. Science and Technol.Hong Kong (2007) p. 81.

Z. J. Liu, K. M. Wong, W. C. Chong, K. M. Lau, "P-34: Active matrix programmable monolithic light emitting diodes on silicon (LEDoS) displays," SID Symp. Dig. Tech. Papers (2011) pp. 1215-1218.

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