Abstract

We report the effects of monochromatic illumination on the electrical performance of a-SiGe:H thin-film transistor (TFT) and the use of this device as infrared (IR) image-sensing touch displays. In order to reduce the inevitable incidence of visible light into device, the visible cutting layer was designed, which played a critical role in reducing the optical noise from visible light. When the photo response was observed in real liquid crystal display (LCD) operation environment, it showed the display contents dependence, meaning that the supply of external IR light source for the touch sensing would be effective independent of any ambient light condition. Additionally, the optical noise from the display operation was eliminated using the block operation as well as the backlight IR light-emitting diode (LED) light modulation. From these, the clear touch images were successfully obtained in the a-SiGe:H photosensor embedded LCD panel.

© 2012 IEEE

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  1. C. Brown, "In-cell touch panel: A review of technologies and applications," Proc. IDW Tech. Dig. (2010) pp. 489-492.
  2. G. Walker, M. Fihn, "LCD in-cell touch," Inf. Display 26, 8-14 (2010).
  3. S. Y. Han, K. Oh, D. K. Seong, Y.-S. Ham, J. Lyu, M. Lee, K. Lee, "Top-COM-based PLS mode for embedded touch screen applications," SID Tech. Dig. (2009) pp. 570-573.
  4. G. Barret, R. Omote, "Projected-capacitive touch technology," Inf. Display 26, 16-21 (2010).
  5. S.-S. Hwang, S. H. Bae, S.-H. Cho, H.-K. Kang, D. S. Lee, J. K. Shin, I. J. Chung, "On-cell projected capacitive type touch sensor for NBPC," SID Tech. Dig. (2010) pp. 677-679.
  6. W.-J. Chiang, C. J. Lin, Y.-C. King, A.-T. Cho, C. T. Peng, C. W. Chao, K.-C. Lin, F.-Y. Gan, "Silicon-nanocrystal-based photosensor integrated on low-temperature polysilicon panels," J. Soc. Inf. Display 16, 777-786 (2008).
  7. H.-S. Park, T.-J. Ha, Y. Hong, J.-H. Lee, B.-J. Lee, B.-H. You, N.-D. Kim, M.-K. Han, "A touch-sensitive display with embedded hydrogenated amorphous-silicon photodetector arrays," J. Soc. Inf. Display 16, 1165-1170 (2008).
  8. K.-C. Lee, S.-H. Moon, B. Berkeley, S.-S. Kim, "LED-backlight feedback control system with integrated amorphous-silicon color sensor on an LCD panel," J. Soc. Inf. Display 14, 161-168 (2006).
  9. W. D. Boer, A. Abileah, P. Green, T. Larsson, "Active matrix LCD with integrated optical touch screen," SID Tech. Dig. (2003).
  10. K. Tanaka, H. Kato, Y. Sugita, N. Usukura, H. Kawamori, K. Maeda, Y. Kubota, "A system LCD with optical function using infra-red backlight subtraction scheme," SID Tech. Dig. (2010) pp. 680-683.
  11. K. Yi, C. Choi, S. Suh, B. Yoo, J.-J. Han, D. Park, C. Kim, "Novel LCD display with a sensible backlight," SID Tech. Dig. (2010) pp. 673-676.
  12. O.-K. Kwon, H.-S. Lim, "Photo sensing circuits using low temperature plycrystalline silicon TFTs and photo diode for smart function," SID Tech. Dig. (2010) pp. 684-687.
  13. S. Y. Han, D. C. Kim, B. Cho, K. S. Jeon, S. M. Seo, M. S. Seo, S.-W. Jung, K. Jeong, W. K. Kim, S.-H. Yang, N.-H. Kim, J. Song, H.-S. Kong, H. G. Kim, "A highly sensitive and low-noise IR photosensor based on a-SiGe as a sensing and noise filter: Toward large-sized touch-screen LCD panels," J. Soc. Inf. Display 19, 855-860 (2011).
  14. S. Y. Han, K. S. Jeon, B. Cho, M. S. Seo, J. Song, H.-S. Kong, "Characteristics of a-SiGe:H thin film transistor infrared photosensor for touch sensing display," IEEE J. Quantum Electron. 48, 952-959 (2012).
  15. J. Michel, J. Liu, L. C. Kimerling, "High-performance Ge-on-Si photodetectors," Nature Photon. 4, 527-534 (2010).
  16. L. Tang, S. E. Kocabas, S. Latif, A. K. Okyay, D.-S. Ly-Gagnon, K. C. Saraswat, D. A. B. Miller, "Nanometre-scale germanium photodetector enhanced by a near-infrared dipole antenna," Nature Photon. 2, 226-229 (2008).
  17. J. Liu, D. D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. T. Danielson, J. Michel, L. C. Kimerling, "Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications," Appl. Phys. Lett. 87, 011110 (2005).
  18. O. I. Dosunmu, D. D. Cannon, M. K. Emsley, L. C. Kimerling, M. S. UnlU, "High-speed resonant cavity enhanced Ge photodetectors on reflecting Si substrates for 1550-nm operation," IEEE Photon. Tech. Lett. 17, 175-177 (2005).
  19. J. Liu, J. Michel, W. Giziewicz, D. Pan, K. Wada, D. D. Cannon, S. Jongthammanurak, D. T. Danielson, L. C. Kimerling, J. Chen, F. Ö. Ilday, F. X. Kärtner, J. Yasaitis, "High-performance, tensile-strained Ge p-i-n photodetectors on a Si platform," Appl. Phys. Lett. 87, 103501 (2005).
  20. J. Humlí?ek, M. Garriga, M. I. Alonso, M. Cardona, "Optical spectra of Si$_{x}$Ge$_{1 - x}$ alloys," J. Appl. Phys. 65, 2827-2832 (1989).
  21. S. O. Kasap, Optoelectronics and Photonics: Principles and Practices (Prentice-Hall, 2001).
  22. J. Tauc, A. Grigorovici, A. Vancu, "Optical properties and electronic structure of amorphous germanium," Phys. Status Solidi (b) 15, 627-637 (1966).
  23. Thin-Film Silicon Solar Cells (Engineering Science: Micro- and Nanotechnology) (Efpl Press, 2010).
  24. B. E. A. Saleh, M. C. Teich, Fundamentals of Photonics (Wiley, 2007).
  25. J. D. Cohen, Amorphous Silicon and Its Alloys (INSPEC, 1998).
  26. P. Yeh, C. Gu, Optics of Liquid Crystal Displays (Wiley, 1999).

2012

S. Y. Han, K. S. Jeon, B. Cho, M. S. Seo, J. Song, H.-S. Kong, "Characteristics of a-SiGe:H thin film transistor infrared photosensor for touch sensing display," IEEE J. Quantum Electron. 48, 952-959 (2012).

2011

S. Y. Han, D. C. Kim, B. Cho, K. S. Jeon, S. M. Seo, M. S. Seo, S.-W. Jung, K. Jeong, W. K. Kim, S.-H. Yang, N.-H. Kim, J. Song, H.-S. Kong, H. G. Kim, "A highly sensitive and low-noise IR photosensor based on a-SiGe as a sensing and noise filter: Toward large-sized touch-screen LCD panels," J. Soc. Inf. Display 19, 855-860 (2011).

2010

G. Walker, M. Fihn, "LCD in-cell touch," Inf. Display 26, 8-14 (2010).

G. Barret, R. Omote, "Projected-capacitive touch technology," Inf. Display 26, 16-21 (2010).

J. Michel, J. Liu, L. C. Kimerling, "High-performance Ge-on-Si photodetectors," Nature Photon. 4, 527-534 (2010).

2008

L. Tang, S. E. Kocabas, S. Latif, A. K. Okyay, D.-S. Ly-Gagnon, K. C. Saraswat, D. A. B. Miller, "Nanometre-scale germanium photodetector enhanced by a near-infrared dipole antenna," Nature Photon. 2, 226-229 (2008).

W.-J. Chiang, C. J. Lin, Y.-C. King, A.-T. Cho, C. T. Peng, C. W. Chao, K.-C. Lin, F.-Y. Gan, "Silicon-nanocrystal-based photosensor integrated on low-temperature polysilicon panels," J. Soc. Inf. Display 16, 777-786 (2008).

H.-S. Park, T.-J. Ha, Y. Hong, J.-H. Lee, B.-J. Lee, B.-H. You, N.-D. Kim, M.-K. Han, "A touch-sensitive display with embedded hydrogenated amorphous-silicon photodetector arrays," J. Soc. Inf. Display 16, 1165-1170 (2008).

2006

K.-C. Lee, S.-H. Moon, B. Berkeley, S.-S. Kim, "LED-backlight feedback control system with integrated amorphous-silicon color sensor on an LCD panel," J. Soc. Inf. Display 14, 161-168 (2006).

2005

J. Liu, D. D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. T. Danielson, J. Michel, L. C. Kimerling, "Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications," Appl. Phys. Lett. 87, 011110 (2005).

O. I. Dosunmu, D. D. Cannon, M. K. Emsley, L. C. Kimerling, M. S. UnlU, "High-speed resonant cavity enhanced Ge photodetectors on reflecting Si substrates for 1550-nm operation," IEEE Photon. Tech. Lett. 17, 175-177 (2005).

J. Liu, J. Michel, W. Giziewicz, D. Pan, K. Wada, D. D. Cannon, S. Jongthammanurak, D. T. Danielson, L. C. Kimerling, J. Chen, F. Ö. Ilday, F. X. Kärtner, J. Yasaitis, "High-performance, tensile-strained Ge p-i-n photodetectors on a Si platform," Appl. Phys. Lett. 87, 103501 (2005).

1989

J. Humlí?ek, M. Garriga, M. I. Alonso, M. Cardona, "Optical spectra of Si$_{x}$Ge$_{1 - x}$ alloys," J. Appl. Phys. 65, 2827-2832 (1989).

1966

J. Tauc, A. Grigorovici, A. Vancu, "Optical properties and electronic structure of amorphous germanium," Phys. Status Solidi (b) 15, 627-637 (1966).

Appl. Phys. Lett.

J. Liu, D. D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. T. Danielson, J. Michel, L. C. Kimerling, "Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications," Appl. Phys. Lett. 87, 011110 (2005).

Appl. Phys. Lett.

J. Liu, J. Michel, W. Giziewicz, D. Pan, K. Wada, D. D. Cannon, S. Jongthammanurak, D. T. Danielson, L. C. Kimerling, J. Chen, F. Ö. Ilday, F. X. Kärtner, J. Yasaitis, "High-performance, tensile-strained Ge p-i-n photodetectors on a Si platform," Appl. Phys. Lett. 87, 103501 (2005).

IEEE J. Quantum Electron.

S. Y. Han, K. S. Jeon, B. Cho, M. S. Seo, J. Song, H.-S. Kong, "Characteristics of a-SiGe:H thin film transistor infrared photosensor for touch sensing display," IEEE J. Quantum Electron. 48, 952-959 (2012).

IEEE Photon. Tech. Lett.

O. I. Dosunmu, D. D. Cannon, M. K. Emsley, L. C. Kimerling, M. S. UnlU, "High-speed resonant cavity enhanced Ge photodetectors on reflecting Si substrates for 1550-nm operation," IEEE Photon. Tech. Lett. 17, 175-177 (2005).

Inf. Display

G. Walker, M. Fihn, "LCD in-cell touch," Inf. Display 26, 8-14 (2010).

Inf. Display

G. Barret, R. Omote, "Projected-capacitive touch technology," Inf. Display 26, 16-21 (2010).

J. Soc. Inf. Display

W.-J. Chiang, C. J. Lin, Y.-C. King, A.-T. Cho, C. T. Peng, C. W. Chao, K.-C. Lin, F.-Y. Gan, "Silicon-nanocrystal-based photosensor integrated on low-temperature polysilicon panels," J. Soc. Inf. Display 16, 777-786 (2008).

J. Appl. Phys.

J. Humlí?ek, M. Garriga, M. I. Alonso, M. Cardona, "Optical spectra of Si$_{x}$Ge$_{1 - x}$ alloys," J. Appl. Phys. 65, 2827-2832 (1989).

J. Soc. Inf. Display

S. Y. Han, D. C. Kim, B. Cho, K. S. Jeon, S. M. Seo, M. S. Seo, S.-W. Jung, K. Jeong, W. K. Kim, S.-H. Yang, N.-H. Kim, J. Song, H.-S. Kong, H. G. Kim, "A highly sensitive and low-noise IR photosensor based on a-SiGe as a sensing and noise filter: Toward large-sized touch-screen LCD panels," J. Soc. Inf. Display 19, 855-860 (2011).

H.-S. Park, T.-J. Ha, Y. Hong, J.-H. Lee, B.-J. Lee, B.-H. You, N.-D. Kim, M.-K. Han, "A touch-sensitive display with embedded hydrogenated amorphous-silicon photodetector arrays," J. Soc. Inf. Display 16, 1165-1170 (2008).

K.-C. Lee, S.-H. Moon, B. Berkeley, S.-S. Kim, "LED-backlight feedback control system with integrated amorphous-silicon color sensor on an LCD panel," J. Soc. Inf. Display 14, 161-168 (2006).

Nature Photon.

L. Tang, S. E. Kocabas, S. Latif, A. K. Okyay, D.-S. Ly-Gagnon, K. C. Saraswat, D. A. B. Miller, "Nanometre-scale germanium photodetector enhanced by a near-infrared dipole antenna," Nature Photon. 2, 226-229 (2008).

Nature Photon.

J. Michel, J. Liu, L. C. Kimerling, "High-performance Ge-on-Si photodetectors," Nature Photon. 4, 527-534 (2010).

Phys. Status Solidi (b)

J. Tauc, A. Grigorovici, A. Vancu, "Optical properties and electronic structure of amorphous germanium," Phys. Status Solidi (b) 15, 627-637 (1966).

Other

Thin-Film Silicon Solar Cells (Engineering Science: Micro- and Nanotechnology) (Efpl Press, 2010).

B. E. A. Saleh, M. C. Teich, Fundamentals of Photonics (Wiley, 2007).

J. D. Cohen, Amorphous Silicon and Its Alloys (INSPEC, 1998).

P. Yeh, C. Gu, Optics of Liquid Crystal Displays (Wiley, 1999).

C. Brown, "In-cell touch panel: A review of technologies and applications," Proc. IDW Tech. Dig. (2010) pp. 489-492.

S. O. Kasap, Optoelectronics and Photonics: Principles and Practices (Prentice-Hall, 2001).

W. D. Boer, A. Abileah, P. Green, T. Larsson, "Active matrix LCD with integrated optical touch screen," SID Tech. Dig. (2003).

K. Tanaka, H. Kato, Y. Sugita, N. Usukura, H. Kawamori, K. Maeda, Y. Kubota, "A system LCD with optical function using infra-red backlight subtraction scheme," SID Tech. Dig. (2010) pp. 680-683.

K. Yi, C. Choi, S. Suh, B. Yoo, J.-J. Han, D. Park, C. Kim, "Novel LCD display with a sensible backlight," SID Tech. Dig. (2010) pp. 673-676.

O.-K. Kwon, H.-S. Lim, "Photo sensing circuits using low temperature plycrystalline silicon TFTs and photo diode for smart function," SID Tech. Dig. (2010) pp. 684-687.

S.-S. Hwang, S. H. Bae, S.-H. Cho, H.-K. Kang, D. S. Lee, J. K. Shin, I. J. Chung, "On-cell projected capacitive type touch sensor for NBPC," SID Tech. Dig. (2010) pp. 677-679.

S. Y. Han, K. Oh, D. K. Seong, Y.-S. Ham, J. Lyu, M. Lee, K. Lee, "Top-COM-based PLS mode for embedded touch screen applications," SID Tech. Dig. (2009) pp. 570-573.

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