Abstract

Abstract—In this paper, we study the Ion-beam (IB) irradiated amorphous (a)-aluminum oxide (Al<sub>2</sub>O<sub>3</sub>) inorganic layer deposited by RF magnetron sputtering as an liquid crystal (LC) alignment layer. Uniformly vertical-aligned (VA)-LC on a-Al<sub>2</sub>O<sub>3</sub> surface resulted from IB irradiation energy above 1800 eV. We assumed that LC molecular orientation depends on the intensity of Al 2p, O 1s peaks, which were confirmed through X-ray photoelectron spectroscopy (XPS) measurements. XPS showed that IB irradiation changed the chemical structure, breaking Al-O bonds by altering Al–O and O–Al bonding intensity. Also, electro-optical characteristics of vertical-aligned-LC displays (VA-LCDs) on the Al<sub>2</sub>O<sub>3</sub> alignment layers were measured, which showed reduced threshold voltage and power consumption, as compared with IB irradiated and rubbed polyimide (PI) layers.

© 2011 IEEE

PDF Article

References

  • View by:
  • |
  • |

  1. Y. J. Kim, Z. Zhuang, J. S. Patel, "Effect of multidirection rubbing on the alignment of nematic liquid crystal," Appl. Phys. Lett. 77, 513-515 (2000).
  2. M. F. Toney, T. P. Russell, J. A. Logan, H. Kikuchi, J. M. Sands, S. K. Kumar, "Near-surface alignment of polymers in rubbed films," Nature 374, 709-711 (1995).
  3. C. Y. huang, C. H. Lin, J. R. Wang, C. W. Huang, M. S. Tsai, A. Y. G. Fuh, "Multidirectional rubbed liquid-crystal cells," J. Appl. Phys. 92, 7231-7235 (2002).
  4. J. Hoogboom, T. Rasing, A. E. Rowan, R. J. M. Nolte, "LCD alignment layers. Controlling nematic domain properties," J. Mater. Chem. 16, 1305-1314 (2006).
  5. M. Lu, "Liquid crystal orientation induced by Van Der Waals interaction," Jpn. J. Appl. Phys. 43, 8156-8160 (2004).
  6. B. Park, K. J. Han, Y. Jung, H. H. Choi, H. K. Hwang, S. Lee, S. H. Jang, H. Takezoe, "Director tilting of liquid crystals on photoisomerizable polyimide alignment layers doped with homeotropic surfactant," J. Appl. Phys. 86, 1854-1859 (1999).
  7. J. Stöhr, M. G. Samant, J. Luning, A. C. Callegari, P. Chaudhri, J. P. Doyle, J. A. Lacey, S. A. Lien, S. Purushothaman, J. L. Speidell, "Liquid crystal alignment on carbonaceous surfaces with orientational order," Science 292, 2299-2302 (2001).
  8. Y. L. Ho, V. G. Chigrinov, H. S. Kwok, "Variable liquid crystal pretilt angles generated by photoalignment of a mixed polyimide alihnment layer," Appl. Phys. Lett. 90, 243506 (2007).
  9. F. S. Yeoung, J. Y. Ho, Y. W. Li, F. C. Xie, O. K. Tsui, P. Sheng, H. S. Kwok, "Variable liquid crystal pretilt angles by nanostructured surfaces," Appl. Phys. Lett. 88, 051910 (2006).
  10. D. S. Seo, K. Araya, N. Yoshida, M. Nishikawa, Y. Yabe, S. Kobayashi, "Effect of the polymer tilt angle for generation of pretilt angle in nematic liquid crystal on rubbed polyimide surfaces," Jpn. J. Appl. Phys. 34, L503-L506 (1995).
  11. J. P. doyle, P. Chaudhari, J. L. Lacey, E. A. Galligan, S. C. Lien, A. C. Callegari, N. D. Lang, M. Lu, Y. Nakagawa, H. Nakano, N. Okazaki, S. Odahara, Y. Katoh, Y. Saitoh, K. Sakai, H. Satoh, Y. Shiota, "Ion beam alignment for liquid crystal display fabrication," Nucl. Instrum. Methods Phys. Res. B. 206, 467-471 (2003).
  12. J. B. Kim, K. C. Kim, H. J. Ahn, B. H. Hwang, D. C. Hyun, H. K. Baik, "Variable liquid crystal pretilt angles in various compositions of alignment layers," Appl. Phys. Lett. 90, 043515 (2007).
  13. S. K. Lee, J. H. Kim, B. Y. Oh, D. H. Kang, B. Y. Kim, J. W. Han, Y. H. Kim, J. M. Han, J. Y. hwang, C. H. Ok, D. S. Seo, "Liquid crystal alignment effects on SiNx thin film layers treated by Ion-Beam irradiation," Jpn. J. Appl. Phys. 46, 7711-7713 (2007).
  14. H. Y. Wu, R. P. Pan, "Liquid crystal surface alignments by using ion beam sputtered magnetic thin films," Appl. Phys. Lett. 91, 074102 (2007).
  15. J. H. Lim, B. Y. Oh, W. K. Lee, K. M. Lee, H. J. Na, B. Y. Kim, J. M. Han, J. Y. Hwang, D. S. Seo, "Selective liquid crystal molecule orientation on ion beam irradiated tantalum oxide ultrathin films," Appl. Phys. Lett. 95, 123503 (2009).
  16. M. Lu, "Liquid crystal orientation induced by Van der Waals Interaction," Jpn. J. Appl. Phys. 43, 8156-8160 (2004).
  17. J. B. Kim, C. J. Choi, J. S. Park, S. J. Jo, B. H. Hwang, M. K. Jo, D. Kang, S. J. Lee, Y. S. Kim, H. K. Baik, "Orientational transition of liquid crystal molecules by a photoinduced transformation process into a recovery-free silicon oxide layer," Adv. Mater 20, 3073-3078 (2008).

2009 (1)

J. H. Lim, B. Y. Oh, W. K. Lee, K. M. Lee, H. J. Na, B. Y. Kim, J. M. Han, J. Y. Hwang, D. S. Seo, "Selective liquid crystal molecule orientation on ion beam irradiated tantalum oxide ultrathin films," Appl. Phys. Lett. 95, 123503 (2009).

2008 (1)

J. B. Kim, C. J. Choi, J. S. Park, S. J. Jo, B. H. Hwang, M. K. Jo, D. Kang, S. J. Lee, Y. S. Kim, H. K. Baik, "Orientational transition of liquid crystal molecules by a photoinduced transformation process into a recovery-free silicon oxide layer," Adv. Mater 20, 3073-3078 (2008).

2007 (4)

J. B. Kim, K. C. Kim, H. J. Ahn, B. H. Hwang, D. C. Hyun, H. K. Baik, "Variable liquid crystal pretilt angles in various compositions of alignment layers," Appl. Phys. Lett. 90, 043515 (2007).

S. K. Lee, J. H. Kim, B. Y. Oh, D. H. Kang, B. Y. Kim, J. W. Han, Y. H. Kim, J. M. Han, J. Y. hwang, C. H. Ok, D. S. Seo, "Liquid crystal alignment effects on SiNx thin film layers treated by Ion-Beam irradiation," Jpn. J. Appl. Phys. 46, 7711-7713 (2007).

H. Y. Wu, R. P. Pan, "Liquid crystal surface alignments by using ion beam sputtered magnetic thin films," Appl. Phys. Lett. 91, 074102 (2007).

Y. L. Ho, V. G. Chigrinov, H. S. Kwok, "Variable liquid crystal pretilt angles generated by photoalignment of a mixed polyimide alihnment layer," Appl. Phys. Lett. 90, 243506 (2007).

2006 (2)

F. S. Yeoung, J. Y. Ho, Y. W. Li, F. C. Xie, O. K. Tsui, P. Sheng, H. S. Kwok, "Variable liquid crystal pretilt angles by nanostructured surfaces," Appl. Phys. Lett. 88, 051910 (2006).

J. Hoogboom, T. Rasing, A. E. Rowan, R. J. M. Nolte, "LCD alignment layers. Controlling nematic domain properties," J. Mater. Chem. 16, 1305-1314 (2006).

2004 (2)

M. Lu, "Liquid crystal orientation induced by Van Der Waals interaction," Jpn. J. Appl. Phys. 43, 8156-8160 (2004).

M. Lu, "Liquid crystal orientation induced by Van der Waals Interaction," Jpn. J. Appl. Phys. 43, 8156-8160 (2004).

2003 (1)

J. P. doyle, P. Chaudhari, J. L. Lacey, E. A. Galligan, S. C. Lien, A. C. Callegari, N. D. Lang, M. Lu, Y. Nakagawa, H. Nakano, N. Okazaki, S. Odahara, Y. Katoh, Y. Saitoh, K. Sakai, H. Satoh, Y. Shiota, "Ion beam alignment for liquid crystal display fabrication," Nucl. Instrum. Methods Phys. Res. B. 206, 467-471 (2003).

2002 (1)

C. Y. huang, C. H. Lin, J. R. Wang, C. W. Huang, M. S. Tsai, A. Y. G. Fuh, "Multidirectional rubbed liquid-crystal cells," J. Appl. Phys. 92, 7231-7235 (2002).

2001 (1)

J. Stöhr, M. G. Samant, J. Luning, A. C. Callegari, P. Chaudhri, J. P. Doyle, J. A. Lacey, S. A. Lien, S. Purushothaman, J. L. Speidell, "Liquid crystal alignment on carbonaceous surfaces with orientational order," Science 292, 2299-2302 (2001).

2000 (1)

Y. J. Kim, Z. Zhuang, J. S. Patel, "Effect of multidirection rubbing on the alignment of nematic liquid crystal," Appl. Phys. Lett. 77, 513-515 (2000).

1999 (1)

B. Park, K. J. Han, Y. Jung, H. H. Choi, H. K. Hwang, S. Lee, S. H. Jang, H. Takezoe, "Director tilting of liquid crystals on photoisomerizable polyimide alignment layers doped with homeotropic surfactant," J. Appl. Phys. 86, 1854-1859 (1999).

1995 (2)

M. F. Toney, T. P. Russell, J. A. Logan, H. Kikuchi, J. M. Sands, S. K. Kumar, "Near-surface alignment of polymers in rubbed films," Nature 374, 709-711 (1995).

D. S. Seo, K. Araya, N. Yoshida, M. Nishikawa, Y. Yabe, S. Kobayashi, "Effect of the polymer tilt angle for generation of pretilt angle in nematic liquid crystal on rubbed polyimide surfaces," Jpn. J. Appl. Phys. 34, L503-L506 (1995).

Adv. Mater (1)

J. B. Kim, C. J. Choi, J. S. Park, S. J. Jo, B. H. Hwang, M. K. Jo, D. Kang, S. J. Lee, Y. S. Kim, H. K. Baik, "Orientational transition of liquid crystal molecules by a photoinduced transformation process into a recovery-free silicon oxide layer," Adv. Mater 20, 3073-3078 (2008).

Appl. Phys. Lett. (6)

H. Y. Wu, R. P. Pan, "Liquid crystal surface alignments by using ion beam sputtered magnetic thin films," Appl. Phys. Lett. 91, 074102 (2007).

J. H. Lim, B. Y. Oh, W. K. Lee, K. M. Lee, H. J. Na, B. Y. Kim, J. M. Han, J. Y. Hwang, D. S. Seo, "Selective liquid crystal molecule orientation on ion beam irradiated tantalum oxide ultrathin films," Appl. Phys. Lett. 95, 123503 (2009).

J. B. Kim, K. C. Kim, H. J. Ahn, B. H. Hwang, D. C. Hyun, H. K. Baik, "Variable liquid crystal pretilt angles in various compositions of alignment layers," Appl. Phys. Lett. 90, 043515 (2007).

Y. J. Kim, Z. Zhuang, J. S. Patel, "Effect of multidirection rubbing on the alignment of nematic liquid crystal," Appl. Phys. Lett. 77, 513-515 (2000).

Y. L. Ho, V. G. Chigrinov, H. S. Kwok, "Variable liquid crystal pretilt angles generated by photoalignment of a mixed polyimide alihnment layer," Appl. Phys. Lett. 90, 243506 (2007).

F. S. Yeoung, J. Y. Ho, Y. W. Li, F. C. Xie, O. K. Tsui, P. Sheng, H. S. Kwok, "Variable liquid crystal pretilt angles by nanostructured surfaces," Appl. Phys. Lett. 88, 051910 (2006).

J. Appl. Phys. (2)

C. Y. huang, C. H. Lin, J. R. Wang, C. W. Huang, M. S. Tsai, A. Y. G. Fuh, "Multidirectional rubbed liquid-crystal cells," J. Appl. Phys. 92, 7231-7235 (2002).

B. Park, K. J. Han, Y. Jung, H. H. Choi, H. K. Hwang, S. Lee, S. H. Jang, H. Takezoe, "Director tilting of liquid crystals on photoisomerizable polyimide alignment layers doped with homeotropic surfactant," J. Appl. Phys. 86, 1854-1859 (1999).

J. Mater. Chem. (1)

J. Hoogboom, T. Rasing, A. E. Rowan, R. J. M. Nolte, "LCD alignment layers. Controlling nematic domain properties," J. Mater. Chem. 16, 1305-1314 (2006).

Jpn. J. Appl. Phys. (4)

M. Lu, "Liquid crystal orientation induced by Van Der Waals interaction," Jpn. J. Appl. Phys. 43, 8156-8160 (2004).

D. S. Seo, K. Araya, N. Yoshida, M. Nishikawa, Y. Yabe, S. Kobayashi, "Effect of the polymer tilt angle for generation of pretilt angle in nematic liquid crystal on rubbed polyimide surfaces," Jpn. J. Appl. Phys. 34, L503-L506 (1995).

S. K. Lee, J. H. Kim, B. Y. Oh, D. H. Kang, B. Y. Kim, J. W. Han, Y. H. Kim, J. M. Han, J. Y. hwang, C. H. Ok, D. S. Seo, "Liquid crystal alignment effects on SiNx thin film layers treated by Ion-Beam irradiation," Jpn. J. Appl. Phys. 46, 7711-7713 (2007).

M. Lu, "Liquid crystal orientation induced by Van der Waals Interaction," Jpn. J. Appl. Phys. 43, 8156-8160 (2004).

Nature (1)

M. F. Toney, T. P. Russell, J. A. Logan, H. Kikuchi, J. M. Sands, S. K. Kumar, "Near-surface alignment of polymers in rubbed films," Nature 374, 709-711 (1995).

Nucl. Instrum. Methods Phys. Res. B. (1)

J. P. doyle, P. Chaudhari, J. L. Lacey, E. A. Galligan, S. C. Lien, A. C. Callegari, N. D. Lang, M. Lu, Y. Nakagawa, H. Nakano, N. Okazaki, S. Odahara, Y. Katoh, Y. Saitoh, K. Sakai, H. Satoh, Y. Shiota, "Ion beam alignment for liquid crystal display fabrication," Nucl. Instrum. Methods Phys. Res. B. 206, 467-471 (2003).

Science (1)

J. Stöhr, M. G. Samant, J. Luning, A. C. Callegari, P. Chaudhri, J. P. Doyle, J. A. Lacey, S. A. Lien, S. Purushothaman, J. L. Speidell, "Liquid crystal alignment on carbonaceous surfaces with orientational order," Science 292, 2299-2302 (2001).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.