Abstract—In this paper, we study the Ion-beam (IB) irradiated amorphous (a)-aluminum oxide (Al<sub>2</sub>O<sub>3</sub>) inorganic layer deposited by RF magnetron sputtering as an liquid crystal (LC) alignment layer. Uniformly vertical-aligned (VA)-LC on a-Al<sub>2</sub>O<sub>3</sub> surface resulted from IB irradiation energy above 1800 eV. We assumed that LC molecular orientation depends on the intensity of Al 2p, O 1s peaks, which were confirmed through X-ray photoelectron spectroscopy (XPS) measurements. XPS showed that IB irradiation changed the chemical structure, breaking Al-O bonds by altering Al–O and O–Al bonding intensity. Also, electro-optical characteristics of vertical-aligned-LC displays (VA-LCDs) on the Al<sub>2</sub>O<sub>3</sub> alignment layers were measured, which showed reduced threshold voltage and power consumption, as compared with IB irradiated and rubbed polyimide (PI) layers.
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