Abstract

A flexible electronics sensor for large area sensing was developed using a screen printing technology with the thixotropy sol-gel materials to form the microstructure patterns on two polyimide (PI) sheets. A flexible sensor is 150$\times$150 mm$^{2}$, including posts, resistances, bumps, and electrode traces. The space between the top electrode and the resistance layer provided a buffer distance for large bending. Experimental results show that array microstructures have good morphological profiles at a screen speed of 10 mm/s, a squeegee pressure of 213 kPa, and a separation speed of 0.4 mm/s using the print–print mode. A membrane with a bump protrusion had a large displacement and a quick sensitive response because the bump provided a concentrated force of von Mises stress on the membrane center. For printing thick structures, diffusion effects and dimensional shrinkages can be reduced when a paste material with a higher viscosity is used. The results exhibit a potential for using in the flexible sensing and higher temperatures. In additional, the fabrication is the low cost and potential higher throughput in flexible electronics applications.

© 2009 IEEE

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  23. Y. Xu, F. Jiang, S. Newbern, A. Huang, C. M. Ho, Y. C. Tai, "Flexible shear-stress sensor skin and its application to unmanned aerial vehicles," Sensors and Actuators A: Phys. 105, 321-329 (2003).
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2008

S. Y. Xiao, L. F. Che, X. X. Li, Y. L. Wang, "A novel fabrication process of MEMS devices on polyimide flexible substrates," Microelectron. Eng. 85, 452-457 (2008).

2007

Z. Tan, M. Shikida, M. Hirota, Y. Xing, K. Sato, T. Iwasaki, Y. Iriye, "Characteristics of on-wall in-tube flexible thermal flow sensor under radially asymmetric flow condition," Sensors and Actuators A: Phys. 138, 87-96 (2007).

P. G. Su, C. S. Wang, "Novel flexible resistive-type humidity sensor," Sensors and Actuators B: Chemical 123, 1071-1076 (2007).

F. Recart, I. Freire, L. Perez, R. L. Aurrekoetxea, J. C. Jimeno, G. Bueno, "Screen printed boron emitters for solar cells," Solar Energy Materials and Solar Cells 91, 897-902 (2007).

A. D. Taylor, E. Y. Kim, V. P. Humes, J. Kizuka, L. T. Thompson, "Inkjet printing of carbon supported platinum 3-D catalyst layers for use in fuel cells," J. Power Sources 171, 101-106 (2007).

I. Manunza, A. Bonfiglio, "Pressure sensing using a completely flexible organic transistor," Biosensors Bioelectron. 22, 2775-2779 (2007).

W. Y. Chang, T. H. Fang, Y. C. Lin, "Characterization and fabrication of wireless flexible physiological monitor sensor," Sensors and Actuators A: Phys. 143, 196-203 (2007).

S. Tsuyoshi, T. Makoto, N. Yoshiaki, N. Shintaro, K. Yusaku, S. Takayasu, S. Takao, "A large-area wireless power-transmission sheet using printed organic transistors and plastic MEMS switches," Nature Mater. 6, 413-417 (2007).

S. H. Ko, J. Chung, H. Pan, C. P. Grigoropoulos, D. Poulikakos, "Fabrication of multilayer passive and active electric components on polymer using inkjet printing and low temperature laser processing," Sensors Actuators A: Phys. 134, 161-168 (2007).

Z. Kattamis, I. C. Cheng, K. Long, B. Hekmatshoar, K. H. Cherenack, S. Wagner, J. C. Sturm, S. M. Venugopal, D. E. Loy, S. M. O'Rourke, D. R. Allee, "Amorphous silicon thin-film transistor backplanes deposited at 200$^{\circ}$C on clear plastic for lamination to electrophoretic displays," J. Display Technol. 3, 304-308 (2007).

2006

Y. S. Kim, "Microheater-integrated single gas sensor array chip fabricated on flexible polyimide substrate," Sensors and Actuators B: Chem. 114, 410-417 (2006).

D. K. Yang, "Flexible bistable cholesteric reflective displays," J. Display Technol. 2, 32-37 (2006).

W. S. Wong, R. Lujan, J. H. Daniel, S. Limb, "Digital lithography for large-area electronics on flexible substrates," J. Non-Cryst. Solids 352, 1981-1985 (2006).

R. A. Street, W. S. Wong, S. E. Ready, M. L. Chabinyc, A. C. Arias, S. Limb, A. Salleo, R. Lujan, "Jet printing flexible displays," Materials Today 9, 32-37 (2006).

P. Tehrani, J. Isaksson, W. Mammo, M. R. Andersson, N. D. Robinson, M. Berggren, "Evaluation of active materials designed for use in printable electrochromic polymer displays," Thin Solid Films 515, 2485-2492 (2006).

W. S. Wong, R. Lujan, J. H. Daniel, S. Limb, "Digital lithography for large-area electronics on flexible substrates," J. Non-Cryst. Solids 352, 1981-1985 (2006).

2005

H. Peter, M. G. James, "A screen-printed interdigitated back contact cell using a boron-source diffusion barrier," Solar Energy Mater. and Solar Cells 88, 119-127 (2005).

2004

K. Tsutao, H. Masahiro, S. Masahiro, N. Keizo, T. Hidekazu, "Effect of material internal pressure in curing process of SMC roll forming," J. Mater. Process. Technol. 155, 1577-1582 (2004).

2003

B. Riviere, J. P. Viricelle, C. Pijolat, "Development of tin oxide material by screen-printing technology for micro-machined gas sensors," Sensors Actuators B: Chem. 93, 531-537 (2003).

Y. Xu, F. Jiang, S. Newbern, A. Huang, C. M. Ho, Y. C. Tai, "Flexible shear-stress sensor skin and its application to unmanned aerial vehicles," Sensors and Actuators A: Phys. 105, 321-329 (2003).

2002

R. N. Aguilar, G. M. Meijer, "Fast interface electronics for a resistive touch-screen," IEEE Sensors J. 2, 1360-1363 (2002).

2000

W. Zhu, K. Yao, Z. Zhang, "Design and fabrication of a novel piezoelectric multilayer actuator by thick-film screen printing technology," Sensors and Actuators A: Phys. 86, 149-153 (2000).

1996

N. C. Stoffel, M. Hsieh, E. J. Kramer, W. Volksen, "Adhesion enhancement and lamination of polyimide films," IEEE Trans. Compon., Pkg. Manuf. Technol. 19, 416-422 (1996).

Biosensors Bioelectron.

I. Manunza, A. Bonfiglio, "Pressure sensing using a completely flexible organic transistor," Biosensors Bioelectron. 22, 2775-2779 (2007).

IEEE Sensors J.

R. N. Aguilar, G. M. Meijer, "Fast interface electronics for a resistive touch-screen," IEEE Sensors J. 2, 1360-1363 (2002).

IEEE Trans. Compon., Pkg. Manuf. Technol.

N. C. Stoffel, M. Hsieh, E. J. Kramer, W. Volksen, "Adhesion enhancement and lamination of polyimide films," IEEE Trans. Compon., Pkg. Manuf. Technol. 19, 416-422 (1996).

J. Power Sources

A. D. Taylor, E. Y. Kim, V. P. Humes, J. Kizuka, L. T. Thompson, "Inkjet printing of carbon supported platinum 3-D catalyst layers for use in fuel cells," J. Power Sources 171, 101-106 (2007).

J. Display Technol.

J. Mater. Process. Technol.

K. Tsutao, H. Masahiro, S. Masahiro, N. Keizo, T. Hidekazu, "Effect of material internal pressure in curing process of SMC roll forming," J. Mater. Process. Technol. 155, 1577-1582 (2004).

J. Non-Cryst. Solids

W. S. Wong, R. Lujan, J. H. Daniel, S. Limb, "Digital lithography for large-area electronics on flexible substrates," J. Non-Cryst. Solids 352, 1981-1985 (2006).

W. S. Wong, R. Lujan, J. H. Daniel, S. Limb, "Digital lithography for large-area electronics on flexible substrates," J. Non-Cryst. Solids 352, 1981-1985 (2006).

Materials Today

R. A. Street, W. S. Wong, S. E. Ready, M. L. Chabinyc, A. C. Arias, S. Limb, A. Salleo, R. Lujan, "Jet printing flexible displays," Materials Today 9, 32-37 (2006).

Microelectron. Eng.

S. Y. Xiao, L. F. Che, X. X. Li, Y. L. Wang, "A novel fabrication process of MEMS devices on polyimide flexible substrates," Microelectron. Eng. 85, 452-457 (2008).

Nature Mater.

S. Tsuyoshi, T. Makoto, N. Yoshiaki, N. Shintaro, K. Yusaku, S. Takayasu, S. Takao, "A large-area wireless power-transmission sheet using printed organic transistors and plastic MEMS switches," Nature Mater. 6, 413-417 (2007).

Sensors and Actuators A: Phys.

W. Zhu, K. Yao, Z. Zhang, "Design and fabrication of a novel piezoelectric multilayer actuator by thick-film screen printing technology," Sensors and Actuators A: Phys. 86, 149-153 (2000).

W. Y. Chang, T. H. Fang, Y. C. Lin, "Characterization and fabrication of wireless flexible physiological monitor sensor," Sensors and Actuators A: Phys. 143, 196-203 (2007).

Z. Tan, M. Shikida, M. Hirota, Y. Xing, K. Sato, T. Iwasaki, Y. Iriye, "Characteristics of on-wall in-tube flexible thermal flow sensor under radially asymmetric flow condition," Sensors and Actuators A: Phys. 138, 87-96 (2007).

Sensors Actuators A: Phys.

S. H. Ko, J. Chung, H. Pan, C. P. Grigoropoulos, D. Poulikakos, "Fabrication of multilayer passive and active electric components on polymer using inkjet printing and low temperature laser processing," Sensors Actuators A: Phys. 134, 161-168 (2007).

Sensors Actuators B: Chem.

B. Riviere, J. P. Viricelle, C. Pijolat, "Development of tin oxide material by screen-printing technology for micro-machined gas sensors," Sensors Actuators B: Chem. 93, 531-537 (2003).

Sensors and Actuators A: Phys.

Y. Xu, F. Jiang, S. Newbern, A. Huang, C. M. Ho, Y. C. Tai, "Flexible shear-stress sensor skin and its application to unmanned aerial vehicles," Sensors and Actuators A: Phys. 105, 321-329 (2003).

Sensors and Actuators B: Chem.

Y. S. Kim, "Microheater-integrated single gas sensor array chip fabricated on flexible polyimide substrate," Sensors and Actuators B: Chem. 114, 410-417 (2006).

Sensors and Actuators B: Chemical

P. G. Su, C. S. Wang, "Novel flexible resistive-type humidity sensor," Sensors and Actuators B: Chemical 123, 1071-1076 (2007).

Solar Energy Mater. and Solar Cells

H. Peter, M. G. James, "A screen-printed interdigitated back contact cell using a boron-source diffusion barrier," Solar Energy Mater. and Solar Cells 88, 119-127 (2005).

Solar Energy Materials and Solar Cells

F. Recart, I. Freire, L. Perez, R. L. Aurrekoetxea, J. C. Jimeno, G. Bueno, "Screen printed boron emitters for solar cells," Solar Energy Materials and Solar Cells 91, 897-902 (2007).

Thin Solid Films

P. Tehrani, J. Isaksson, W. Mammo, M. R. Andersson, N. D. Robinson, M. Berggren, "Evaluation of active materials designed for use in printable electrochromic polymer displays," Thin Solid Films 515, 2485-2492 (2006).

Other

http://www.jaycopanels.com.

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