Abstract

The use of patterned light for three-dimensional (3D) imaging and movement tracking has been in the last decade object of experimental investigations for industrial, scientific, and consumer applications. In this paper, we demonstrate the functionality of a compact silicon microsystem for patterned light generation suitable for 3D imaging. It incorporates a single-axis torsional MEMS mirror for steering a near-infrared beam on a diffractive silicon microstructure that projects light patterns on the target. We, here, report images, acquired with a CMOS camera, of the detected light patterns realized with different diffractive elements. As an example of application, we have illuminated 3D objects with a generated line pattern and then detected the deformation of the projected lines with the same camera. By image processing, from the line deformation, we have estimated the object depth that was found in agreement with the geometrical size.

© 2016 IEEE

Micromachined, silicon filament light source for spectrophotometric microsystems

Juliana Tu, Dwight Howard, Scott D. Collins, and Rosemary L. Smith
Appl. Opt. 42(13) 2388-2397 (2003)

Simple modulation of Lissajous MEMS laser beam scanning with reconfigurable structured light patterns for 3D imaging

Bin Xu, Yao Ji, Chenhao Xu, Bo Zhang, Kai Liu, and Jinhua Li
Opt. Express 32(8) 13249-13265 (2024)

Second-harmonic-generation microsystem light source at 488 nm for Raman spectroscopy

Martin Maiwald, Daniel Jedrzejczyk, Alexander Sahm, Katrin Paschke, Reiner Güther, Bernd Sumpf, Götz Erbert, and Günther Tränkle
Opt. Lett. 34(2) 217-219 (2009)

Ultraviolet transparent silicon oxynitride waveguides for biochemical microsystems

Klaus B. Mogensen, Peter Friis, Jörg Hübner, Nickolaj Petersen, Anders M. Jørgensen, Pieter Telleman, and Jörg P. Kutter
Opt. Lett. 26(10) 716-718 (2001)

Stray-light effects of diffractive beam-shaping elements in optical microsystems

Markus Rossi and Thomas Hessler
Appl. Opt. 38(14) 3068-3076 (1999)