Abstract
Highly photosensitive Si film of new structure
was successfully fabricated using semiconductor blue laser diode annealing
(BLDA). By adopting back-reflection layer, simulation results show
86% increase of light absorption in red or IR region. Peaks from XRD
results showed that Si film was crystallized clearly after BLDA in
spite of the new back-reflection layer of Ti. All the process for
photoconductive film was conducted using r.f. sputtering and vacuum
evaporation without adopting CVD. After
${{H}}_{2}$
annealing, photoconductivity
for the patterned Si films of 50 nm thickness increased remarkably
up from
${{1.2}}
\times {{10}}^{-4}$
to
${{3.2}} \times {{10}}^{-1}$
S/cm under white light of 100 mW/cm
$^{2}$
. Adopting
back-reflection layer under the crystallized Si film using BLDA is
promising to integrate functional photosensors with TFTs on panel.
© 2015 IEEE
PDF Article
More Like This
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription