Abstract

During the manufacturing processes of the thin-film transistor liquid-crystal display (TFT-LCD) panel, red, green, and blue (RGB) color filter coatings undergo the layer-adding process which causes the rough surfaces between the layers. The rough surfaces make acquiring an accurate measurement of the optical properties and thickness $(n, k, d)$ much more difficult because the scattering effects occur. The effective layer-included model is considered in determining the $(n, k, d)$ by including effective layers to reside between and above the multilayer (ML). To show the feasibility of the effective layer-included model, we examined the model by fitting the $(n, k, d)$ for different virtual systems which contain different kinds of scatters reside between and above it. Our findings show that the fitted $(n, k, d)$ can be closer to the assumed $(n, k, d)$ by using the effective layer-included model rather than the standard model. Also, the tolerance of initial assigned $(n, k, d)$ regions to obtain the accurate results are investigated. Further, both models are used to determine the $(n, k, d)$ of the fabricated RGB color filter samples. In the experimental measurements, all reflection and transmission signals are measured by utilizing the in-house variable angle spectroscopic ellipsometry (VASE) system. Consequently, the thicknesses determined from effective layer-included model are closer to the thicknesses measured from profilometry (Alpha-step 100). Also, the transmissions under 0$^{\circ}$, 15 $^{\circ}$, and 30$^{\circ}$ illuminations calculated from the fitted $(n, k, d)$ through the effective layer-included model are closer to the VASE measurements rather than the standard model for each sample. We conclude that the effective layer-included model can be used to determine the accurate $(n, k, d)$ of RGB color filter coatings with rough surface.

© 2013 IEEE

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  1. K. Zhang, A. R. Forouhi, I. Bloomera, "Accurate and rapid determination of thickness, ${\rm n}$ and ${\rm k}$ spectra,and resistivity of indium–tin–oxide films," J. Vac. Sci. Technol. A 17, 1843-1847 (1999).
  2. M. Losurdo, M. Giangregorio, P. Capezzuto, G. Bruno, R. De Rosa, F. Roca, C. Summonte, J. Plá, R. Rizzoli, "Parametrization of optical properties of indium–tin–oxide thin films by spectroscopic ellipsometry: Substrate interfacial reactivity," J. Vac. Sci. Technol. A 20, 37-42 (2002).
  3. F. Lai, L. Lin, R. Gai, Y. Lin, Z. Huang, "Determination of optical constants and thicknesses of ${In}_{2}{O}_{3}$ : Sn films from transmittance data," Thin Solid Films 515, 7387-7392 (2007).
  4. D. K. Lee, S. M. Seo, S. G. Lee, S. H. Sohn, S. H. Park, H. M. Kim, "Optical properties of inorganic $({SiO}2)_{1-{\rm x}}({Nd}2{O}3)_{\rm x}$ alloy films for the color filter of plasma display panel," Appl. Physics Lett. 80, 983-985 (2002).
  5. Y. Cho, Y. K. Choi, S. H. Sohn, "Optical properties of neodymium-containing polymethylmethacrylate films for the organic light emitting diode color filter," Appl. Physics Lett. 89, 051102-1-051102-3 (2006).
  6. D. V. Tsua, "Obtaining optical constants of thin ${Ge}_{\rm x}{Sb}_{\rm y}{Te}_{\rm z}$ films from measurements of reflection and transmission," J. Vac. Sci. Technol. A 17, 1854-1860 (1999).
  7. K. K. S. Lau, J. A. Caulfield, K. K. Gleason, "Variable angle spectroscopic ellipsometry of fluorocarbon films from hot filament chemical vapor deposition," J. Vac. Sci. Technol. A 18, 2404-2411 (2000).
  8. D. V. Tsua, "Infrared optical constants of silicon dioxide thin films by measurements of ${\rm R}$ and ${\rm T}$ ," J. Vac. Sci. Technol. B 18, 1796-1804 (2000).
  9. A. Gray 1, M. Balooch 1, S. Allegret, S. De Gendt, W.-E. Wang, "Optical detection and characterization of graphene by broadband spectrophotometry," J. Appl. Phys. 104, 053109-1-053109-8 (2008).
  10. S. G. Cortés, L. R. Marcos, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, L. Poletto, F. Frassetto, A. M. Malvezzi, A. Giglia, N. Mahne, S. Nannarone, "Transmittance and optical constants of Lu films in the 3–1800 eV spectral range," J. Appl. Phys. 108, 063514-1-063514-7 (2010).
  11. W. H. Choa, D. Chianga, W. H. Wua, Y. H. Chena, P. K. Chiua, S. Y. Hsub, "The optical measurement on the CVD silica film deposited on a fused quartz substrate," Phys. Procedia 19, 385-390 (2011).
  12. F. K. Urban, D. Barton, T. Tiwald, "Numerical ellipsometry: Analysis of thin metal layers using ${\rm n}$ - ${\rm k}$ - ${\rm d}$ twisted curve methods with multiple incidence angles," J. Vac. Sci. Technol. A 28, 947-952 (2010).
  13. D. Y. Smith, W. Karstens, "Refractive index of glass and its dispersion for visible light," J. Phys.: Conf. Ser. (2010) pp. 1-6.

2011 (1)

W. H. Choa, D. Chianga, W. H. Wua, Y. H. Chena, P. K. Chiua, S. Y. Hsub, "The optical measurement on the CVD silica film deposited on a fused quartz substrate," Phys. Procedia 19, 385-390 (2011).

2010 (2)

F. K. Urban, D. Barton, T. Tiwald, "Numerical ellipsometry: Analysis of thin metal layers using ${\rm n}$ - ${\rm k}$ - ${\rm d}$ twisted curve methods with multiple incidence angles," J. Vac. Sci. Technol. A 28, 947-952 (2010).

S. G. Cortés, L. R. Marcos, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, L. Poletto, F. Frassetto, A. M. Malvezzi, A. Giglia, N. Mahne, S. Nannarone, "Transmittance and optical constants of Lu films in the 3–1800 eV spectral range," J. Appl. Phys. 108, 063514-1-063514-7 (2010).

2008 (1)

A. Gray 1, M. Balooch 1, S. Allegret, S. De Gendt, W.-E. Wang, "Optical detection and characterization of graphene by broadband spectrophotometry," J. Appl. Phys. 104, 053109-1-053109-8 (2008).

2007 (1)

F. Lai, L. Lin, R. Gai, Y. Lin, Z. Huang, "Determination of optical constants and thicknesses of ${In}_{2}{O}_{3}$ : Sn films from transmittance data," Thin Solid Films 515, 7387-7392 (2007).

2006 (1)

Y. Cho, Y. K. Choi, S. H. Sohn, "Optical properties of neodymium-containing polymethylmethacrylate films for the organic light emitting diode color filter," Appl. Physics Lett. 89, 051102-1-051102-3 (2006).

2002 (2)

D. K. Lee, S. M. Seo, S. G. Lee, S. H. Sohn, S. H. Park, H. M. Kim, "Optical properties of inorganic $({SiO}2)_{1-{\rm x}}({Nd}2{O}3)_{\rm x}$ alloy films for the color filter of plasma display panel," Appl. Physics Lett. 80, 983-985 (2002).

M. Losurdo, M. Giangregorio, P. Capezzuto, G. Bruno, R. De Rosa, F. Roca, C. Summonte, J. Plá, R. Rizzoli, "Parametrization of optical properties of indium–tin–oxide thin films by spectroscopic ellipsometry: Substrate interfacial reactivity," J. Vac. Sci. Technol. A 20, 37-42 (2002).

2000 (2)

K. K. S. Lau, J. A. Caulfield, K. K. Gleason, "Variable angle spectroscopic ellipsometry of fluorocarbon films from hot filament chemical vapor deposition," J. Vac. Sci. Technol. A 18, 2404-2411 (2000).

D. V. Tsua, "Infrared optical constants of silicon dioxide thin films by measurements of ${\rm R}$ and ${\rm T}$ ," J. Vac. Sci. Technol. B 18, 1796-1804 (2000).

1999 (2)

D. V. Tsua, "Obtaining optical constants of thin ${Ge}_{\rm x}{Sb}_{\rm y}{Te}_{\rm z}$ films from measurements of reflection and transmission," J. Vac. Sci. Technol. A 17, 1854-1860 (1999).

K. Zhang, A. R. Forouhi, I. Bloomera, "Accurate and rapid determination of thickness, ${\rm n}$ and ${\rm k}$ spectra,and resistivity of indium–tin–oxide films," J. Vac. Sci. Technol. A 17, 1843-1847 (1999).

Appl. Physics Lett. (2)

D. K. Lee, S. M. Seo, S. G. Lee, S. H. Sohn, S. H. Park, H. M. Kim, "Optical properties of inorganic $({SiO}2)_{1-{\rm x}}({Nd}2{O}3)_{\rm x}$ alloy films for the color filter of plasma display panel," Appl. Physics Lett. 80, 983-985 (2002).

Y. Cho, Y. K. Choi, S. H. Sohn, "Optical properties of neodymium-containing polymethylmethacrylate films for the organic light emitting diode color filter," Appl. Physics Lett. 89, 051102-1-051102-3 (2006).

J. Appl. Phys. (2)

A. Gray 1, M. Balooch 1, S. Allegret, S. De Gendt, W.-E. Wang, "Optical detection and characterization of graphene by broadband spectrophotometry," J. Appl. Phys. 104, 053109-1-053109-8 (2008).

S. G. Cortés, L. R. Marcos, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, L. Poletto, F. Frassetto, A. M. Malvezzi, A. Giglia, N. Mahne, S. Nannarone, "Transmittance and optical constants of Lu films in the 3–1800 eV spectral range," J. Appl. Phys. 108, 063514-1-063514-7 (2010).

J. Vac. Sci. Technol. B (1)

D. V. Tsua, "Infrared optical constants of silicon dioxide thin films by measurements of ${\rm R}$ and ${\rm T}$ ," J. Vac. Sci. Technol. B 18, 1796-1804 (2000).

J. Vac. Sci. Technol. A (1)

D. V. Tsua, "Obtaining optical constants of thin ${Ge}_{\rm x}{Sb}_{\rm y}{Te}_{\rm z}$ films from measurements of reflection and transmission," J. Vac. Sci. Technol. A 17, 1854-1860 (1999).

J. Vac. Sci. Technol. A (4)

K. K. S. Lau, J. A. Caulfield, K. K. Gleason, "Variable angle spectroscopic ellipsometry of fluorocarbon films from hot filament chemical vapor deposition," J. Vac. Sci. Technol. A 18, 2404-2411 (2000).

K. Zhang, A. R. Forouhi, I. Bloomera, "Accurate and rapid determination of thickness, ${\rm n}$ and ${\rm k}$ spectra,and resistivity of indium–tin–oxide films," J. Vac. Sci. Technol. A 17, 1843-1847 (1999).

M. Losurdo, M. Giangregorio, P. Capezzuto, G. Bruno, R. De Rosa, F. Roca, C. Summonte, J. Plá, R. Rizzoli, "Parametrization of optical properties of indium–tin–oxide thin films by spectroscopic ellipsometry: Substrate interfacial reactivity," J. Vac. Sci. Technol. A 20, 37-42 (2002).

F. K. Urban, D. Barton, T. Tiwald, "Numerical ellipsometry: Analysis of thin metal layers using ${\rm n}$ - ${\rm k}$ - ${\rm d}$ twisted curve methods with multiple incidence angles," J. Vac. Sci. Technol. A 28, 947-952 (2010).

Phys. Procedia (1)

W. H. Choa, D. Chianga, W. H. Wua, Y. H. Chena, P. K. Chiua, S. Y. Hsub, "The optical measurement on the CVD silica film deposited on a fused quartz substrate," Phys. Procedia 19, 385-390 (2011).

Thin Solid Films (1)

F. Lai, L. Lin, R. Gai, Y. Lin, Z. Huang, "Determination of optical constants and thicknesses of ${In}_{2}{O}_{3}$ : Sn films from transmittance data," Thin Solid Films 515, 7387-7392 (2007).

Other (1)

D. Y. Smith, W. Karstens, "Refractive index of glass and its dispersion for visible light," J. Phys.: Conf. Ser. (2010) pp. 1-6.

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