Abstract

Ultra-slim flexible glass substrates enable high performance displays and electronic devices through their inherent benefits of a high-quality surface, process compatibility, thermal and dimensional stability, optical transmission, and barrier properties. This study demonstrates use of flexible glass as a backplane substrate for both active matrix displays with organic thin-film transistors (TFTs) as well as segmented displays. The demonstrated 4.7-inch active matrix VGA displays have a resolution of 170 dpi (640 x 480 pixels), pixel size of 150 μm x 150 μm, and aperture ratio of 40%. The dimensional stability benefit of flexible glass was clearly observed when compared to the registration of polymer substrate devices. This study demonstrates the capability and benefits of flexible glass substrates in devices fabricated with solution-based processing as a step toward roll-to-roll flexible electronic fabrication.

© 2012 IEEE

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  1. D. H. Lee, K. Nomura, T. Kamiya, H. Hosono, "Diffusion-limited a-IGZO/Pt Schottky junction fabricated at 200 $^{\circ}{\hbox{C}}$ on a flexible substrate," IEEE Electron Device Lett. 32, 1695-1697 (2011).
  2. C.-H. An, J. Yang, Y. E. Lee, C.-H. Kim, E. Nam, D. Jung, M.-H. Cho, H. Kim, "A triple-layered microcavity structure for electrophoretic image display," IEEE Trans. Electron Devices 58, 1116-1120 (2011).
  3. K. H. Cherenack, B. Hekmatshoar, J. C. Sturm, S. Wagner, "Self-aligned amorphous silicon thin-film transistors fabricated on clear plastic at 300 $^{\circ}{\hbox{C}}$," IEEE Trans. Electron Devices 57, 2381-2389 (2010).
  4. C. C. Liu, M. L. Wu, K. C. Liu, S.-H. Hsiao, Y. S. Chen, G.-R. Lin, J. J. Huang, "Transparent ZnO thin-film transistors on glass and plastic substrates using post-sputtering oxygen passivation," J. Display Technol. 5, 192-197 (2009).
  5. K. Long, A. Z. Kattamis, I.-C. Cheng, H. Gleskova, S. Wagner, J. C. Sturm, M. Stevenson, G. Yu, M. O'Regan, "Active-matrix amorphous-silicon TFT arrays at 180 $^{\circ}{\hbox{C}}$ on clear plastic and glass substrates for organic light-emitting displays," IEEE Trans. Electron Devices 53, 1789-1796 (2006).
  6. H. J. Park, J.-W. Park, S.-Y. Jeong, C.-S. Ha, "Transparent flexible substrates based on polyimides with aluminum doped zinc oxide (AZO) thin films," Proc. IEEE 93, 1447-1450 (2005).
  7. K. Takechi, T. Eguchi, H. Kanoh, S. Otsuki, "High-rate glass etching process for transferring polycrystalline silicon thin-film transistors to flexible substrates," IEEE Trans. Semicond. Manuf. 18, 384-389 (2005).
  8. S. Hoehla, S. Garner, M. Hohmann, O. Kuhls, X. Li, A. Schindler, N. Fruehauf, "Active matrix color-LCD on 75 $\mu{\hbox{m}}$ thick flexible glass substrates," IEEE J. Display Technol. 8, 309-316 (2012).
  9. S. Garner, G. Merz, J. Tosch, C. Chang, D. Marshall, X. Li, J. Matusick, J. Lin, C. Kuo, S. Lewis, C. Kang, P. Shih, J. Shih, M. Lu, "Flexible glass substrates for roll-to-roll manufacturing," AIMCAL Web Coating 2011 (2011).
  10. E. Hrehorova, M. Rebros, A. Pekarovicova, B. Bazuin, A. Ranganathan, S. Garner, G. Merz, J. Tosch, R. Boudreau, "Gravure printing of conductive inks on glass substrates for applications in printed electronics," IEEE J. Display Technol. 7, 318-324 (2011).
  11. P.-Y. Lo, C.-W. Liu, Y.-M. Hsieh, R. Hsu, J.-M. Ding, J.-P. Hu, Y.-J. Chan, S. Garner, M. He, J. Lin, X. Li, M. Sorensen, J. Li, P. Cimo, C. Kuo, "Flexible glass substrates for organic TFT active matrix electrophoretic displays," SID Display Week (2011).
  12. X. Li, S. Garner, "CO2 laser cutting of flexible glass substrates," ICALEO Annu. Meeting 2011 (2011).
  13. M. He, J. Li, M. L. Sorensen, F. Zhang, R. R. Hancock, H. H. Fong, V. A. Pozdin, D.-M. Smilgies, G. G. Malliaras, "Alkylsubstituted thienothiophene semiconducting materials: Structure-property relationships," J. Amer. Chem. Soc. 131, 11930-11938 (2009).
  14. H. H. Fong, V. A. Pozdin, A. Amassian, G. G. Malliaras, D.-M. Smilgies, M. He, S. Gasper, F. Zhang, M. Sorensen, "Tetrathienoacene copolymers as high mobility, soluble organic semiconductors," J. Amer. Chem. Soc. 130, 13202-13203 (2008).

2012 (1)

S. Hoehla, S. Garner, M. Hohmann, O. Kuhls, X. Li, A. Schindler, N. Fruehauf, "Active matrix color-LCD on 75 $\mu{\hbox{m}}$ thick flexible glass substrates," IEEE J. Display Technol. 8, 309-316 (2012).

2011 (3)

E. Hrehorova, M. Rebros, A. Pekarovicova, B. Bazuin, A. Ranganathan, S. Garner, G. Merz, J. Tosch, R. Boudreau, "Gravure printing of conductive inks on glass substrates for applications in printed electronics," IEEE J. Display Technol. 7, 318-324 (2011).

D. H. Lee, K. Nomura, T. Kamiya, H. Hosono, "Diffusion-limited a-IGZO/Pt Schottky junction fabricated at 200 $^{\circ}{\hbox{C}}$ on a flexible substrate," IEEE Electron Device Lett. 32, 1695-1697 (2011).

C.-H. An, J. Yang, Y. E. Lee, C.-H. Kim, E. Nam, D. Jung, M.-H. Cho, H. Kim, "A triple-layered microcavity structure for electrophoretic image display," IEEE Trans. Electron Devices 58, 1116-1120 (2011).

2010 (1)

K. H. Cherenack, B. Hekmatshoar, J. C. Sturm, S. Wagner, "Self-aligned amorphous silicon thin-film transistors fabricated on clear plastic at 300 $^{\circ}{\hbox{C}}$," IEEE Trans. Electron Devices 57, 2381-2389 (2010).

2009 (2)

C. C. Liu, M. L. Wu, K. C. Liu, S.-H. Hsiao, Y. S. Chen, G.-R. Lin, J. J. Huang, "Transparent ZnO thin-film transistors on glass and plastic substrates using post-sputtering oxygen passivation," J. Display Technol. 5, 192-197 (2009).

M. He, J. Li, M. L. Sorensen, F. Zhang, R. R. Hancock, H. H. Fong, V. A. Pozdin, D.-M. Smilgies, G. G. Malliaras, "Alkylsubstituted thienothiophene semiconducting materials: Structure-property relationships," J. Amer. Chem. Soc. 131, 11930-11938 (2009).

2008 (1)

H. H. Fong, V. A. Pozdin, A. Amassian, G. G. Malliaras, D.-M. Smilgies, M. He, S. Gasper, F. Zhang, M. Sorensen, "Tetrathienoacene copolymers as high mobility, soluble organic semiconductors," J. Amer. Chem. Soc. 130, 13202-13203 (2008).

2006 (1)

K. Long, A. Z. Kattamis, I.-C. Cheng, H. Gleskova, S. Wagner, J. C. Sturm, M. Stevenson, G. Yu, M. O'Regan, "Active-matrix amorphous-silicon TFT arrays at 180 $^{\circ}{\hbox{C}}$ on clear plastic and glass substrates for organic light-emitting displays," IEEE Trans. Electron Devices 53, 1789-1796 (2006).

2005 (2)

H. J. Park, J.-W. Park, S.-Y. Jeong, C.-S. Ha, "Transparent flexible substrates based on polyimides with aluminum doped zinc oxide (AZO) thin films," Proc. IEEE 93, 1447-1450 (2005).

K. Takechi, T. Eguchi, H. Kanoh, S. Otsuki, "High-rate glass etching process for transferring polycrystalline silicon thin-film transistors to flexible substrates," IEEE Trans. Semicond. Manuf. 18, 384-389 (2005).

IEEE Electron Device Lett. (1)

D. H. Lee, K. Nomura, T. Kamiya, H. Hosono, "Diffusion-limited a-IGZO/Pt Schottky junction fabricated at 200 $^{\circ}{\hbox{C}}$ on a flexible substrate," IEEE Electron Device Lett. 32, 1695-1697 (2011).

IEEE J. Display Technol. (2)

S. Hoehla, S. Garner, M. Hohmann, O. Kuhls, X. Li, A. Schindler, N. Fruehauf, "Active matrix color-LCD on 75 $\mu{\hbox{m}}$ thick flexible glass substrates," IEEE J. Display Technol. 8, 309-316 (2012).

E. Hrehorova, M. Rebros, A. Pekarovicova, B. Bazuin, A. Ranganathan, S. Garner, G. Merz, J. Tosch, R. Boudreau, "Gravure printing of conductive inks on glass substrates for applications in printed electronics," IEEE J. Display Technol. 7, 318-324 (2011).

IEEE Trans. Electron Devices (3)

K. Long, A. Z. Kattamis, I.-C. Cheng, H. Gleskova, S. Wagner, J. C. Sturm, M. Stevenson, G. Yu, M. O'Regan, "Active-matrix amorphous-silicon TFT arrays at 180 $^{\circ}{\hbox{C}}$ on clear plastic and glass substrates for organic light-emitting displays," IEEE Trans. Electron Devices 53, 1789-1796 (2006).

C.-H. An, J. Yang, Y. E. Lee, C.-H. Kim, E. Nam, D. Jung, M.-H. Cho, H. Kim, "A triple-layered microcavity structure for electrophoretic image display," IEEE Trans. Electron Devices 58, 1116-1120 (2011).

K. H. Cherenack, B. Hekmatshoar, J. C. Sturm, S. Wagner, "Self-aligned amorphous silicon thin-film transistors fabricated on clear plastic at 300 $^{\circ}{\hbox{C}}$," IEEE Trans. Electron Devices 57, 2381-2389 (2010).

IEEE Trans. Semicond. Manuf. (1)

K. Takechi, T. Eguchi, H. Kanoh, S. Otsuki, "High-rate glass etching process for transferring polycrystalline silicon thin-film transistors to flexible substrates," IEEE Trans. Semicond. Manuf. 18, 384-389 (2005).

J. Amer. Chem. Soc. (2)

M. He, J. Li, M. L. Sorensen, F. Zhang, R. R. Hancock, H. H. Fong, V. A. Pozdin, D.-M. Smilgies, G. G. Malliaras, "Alkylsubstituted thienothiophene semiconducting materials: Structure-property relationships," J. Amer. Chem. Soc. 131, 11930-11938 (2009).

H. H. Fong, V. A. Pozdin, A. Amassian, G. G. Malliaras, D.-M. Smilgies, M. He, S. Gasper, F. Zhang, M. Sorensen, "Tetrathienoacene copolymers as high mobility, soluble organic semiconductors," J. Amer. Chem. Soc. 130, 13202-13203 (2008).

J. Display Technol. (1)

Proc. IEEE (1)

H. J. Park, J.-W. Park, S.-Y. Jeong, C.-S. Ha, "Transparent flexible substrates based on polyimides with aluminum doped zinc oxide (AZO) thin films," Proc. IEEE 93, 1447-1450 (2005).

Other (3)

S. Garner, G. Merz, J. Tosch, C. Chang, D. Marshall, X. Li, J. Matusick, J. Lin, C. Kuo, S. Lewis, C. Kang, P. Shih, J. Shih, M. Lu, "Flexible glass substrates for roll-to-roll manufacturing," AIMCAL Web Coating 2011 (2011).

P.-Y. Lo, C.-W. Liu, Y.-M. Hsieh, R. Hsu, J.-M. Ding, J.-P. Hu, Y.-J. Chan, S. Garner, M. He, J. Lin, X. Li, M. Sorensen, J. Li, P. Cimo, C. Kuo, "Flexible glass substrates for organic TFT active matrix electrophoretic displays," SID Display Week (2011).

X. Li, S. Garner, "CO2 laser cutting of flexible glass substrates," ICALEO Annu. Meeting 2011 (2011).

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