Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Journal of Display Technology
  • Vol. 6,
  • Issue 1,
  • pp. 22-26
  • (2010)

A Low Temperature Fully Lithographic Process For Metal–Oxide Field-Effect Transistors

Not Accessible

Your library or personal account may give you access

Abstract

We report a low temperature $({\sim}100^{\circ}{\hbox{C}})$ lithographic method for fabricating hybrid metal oxide/organic field-effect transistors (FETs) that combine a zinc–indium–oxide (ZIO) semiconductor channel and organic, parylene, dielectric layer. The transistors show a field-effect mobility of $({\hbox{12}}\pm {\hbox{0.8}})$ cm$^{2}$V$^{-1}$s$^{-1}$, on/off ratio of 10$^{8}$ and turn-off voltage of $V_{\rm off}= -1$ V. This work demonstrates that organic and inorganic layers can be deposited and patterned using a low temperature budget, integrated lithographic process to make FETs suitable for large area electronic applications.

© 2009 IEEE

PDF Article
More Like This
Low-power bacteriorhodopsin-silicon n-channel metal-oxide field-effect transistor photoreceiver

Jonghyun Shin, Pallab Bhattacharya, Hao-Chih Yuan, Zhenqiang Ma, and György Váró
Opt. Lett. 32(5) 500-502 (2007)

SiGe optoelectronic metal-oxide semiconductor field-effect transistor

Ali K. Okyay, Abhijit J. Pethe, Duygu Kuzum, Salman Latif, David A. Miller, and Krishna C. Saraswat
Opt. Lett. 32(14) 2022-2024 (2007)

Monolithic integration of GaN-based light-emitting diodes and metal-oxide-semiconductor field-effect transistors

Ya-Ju Lee, Zu-Po Yang, Pin-Guang Chen, Yung-An Hsieh, Yung-Chi Yao, Ming-Han Liao, Min-Hung Lee, Mei-Tan Wang, and Jung-Min Hwang
Opt. Express 22(S6) A1589-A1595 (2014)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved