Abstract

The electrical characteristics of bottom-gate amorphous indium gallium zinc oxide (a-IGZO) thin-film transistors (TFTs) are reported. The a-IGZO TFTs without (w/o) a passivation layer have shown unstable electrical properties in air, such as negative shift of threshold voltage. This degradation is probably due to the IGZO environmental instability, especially in rich-oxygen and/or hydrogen environments. In this paper, the electrical behavior of TFTs passivated by various materials are presented. It has been observed that the passivation condition strongly affects device performance. The effect of passivation process, such as plasma-enhanced chemical vapor deposition (PECVD) and atomic layer deposition (ALD) on TFTs characteristics is investigated. In both passivation cases, a negative shift of threshold voltage has been observed by increasing the silane $({SiH}_{4})$ flow rate in the first case, or by increasing the ${Al}_{2}{O}_{3}$ thickness in the later. By analyzing these TFTs with time of flight secondary ion mass spectroscopy (ToF-SIMS), hydrogen was detected. It appears that there is a significant correlation between hydrogen and TFT electrical degradation. The mechanisms leading to this degradation and the solutions to eliminate it are proposed.

© 2015 IEEE

Optical and electrical properties of In₂MgO₄ thin film for transistors

Jian Ke Yao, Fan Ye, and Ping Fan
Opt. Mater. Express 8(11) 3438-3446 (2018)

Ultra-high-image-density large-size organic light-emitting devices based on In-Ga-Zn-O thin-film transistors with a coplanar structure

Hong Jae Shin and Tae Whan Kim
Opt. Express 26(13) 16805-16812 (2018)

Effects of graphene layers in IGZO / graphite-like +Ni/SiO₂/Si wafer specimens on electrical and optical properties in tribotests

Tse-Chang Li, Ba-Son Nguyen, Yu-Ching Chiang, Ching-Lin Hsiao, and Jen-Fin Lin
Opt. Mater. Express 6(12) 3857-3880 (2016)

Near-infrared femtosecond laser crystallized poly-Si thin film transistors

Yi-Chao Wang, Jia-Min Shieh, Hsiao-Wen Zan, and Ci-Ling Pan
Opt. Express 15(11) 6982-6987 (2007)

Effects of sputtering-deposition inclination angle on the IGZO film microstructures, optical properties and photoluminescence

Tse-Chang Li, Chang-Fu Han, Ta-Hsuan Kuan, and Jen-Fin Lin
Opt. Mater. Express 6(2) 343-366 (2016)