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Optica Publishing Group
  • Journal of the Optical Society of Korea
  • Vol. 11,
  • Issue 3,
  • pp. 108-112
  • (2007)

3D Nano Object Recognition based on Phase Measurement Technique

Open Access Open Access

Abstract

Spectroscopic ellipsometry (SE) has become an important tool in scatterometry based nano-structure 3D profiling. In this paper, we propose a novel 3D nano object recognition method by use of phase sensitive scatterometry. We claims that only phase sensitive scatterometry can provide a reasonable 3D nano-object recognition capability since phase data gives much higher sensitive 3D information than amplitude data. To show the validity of this approach, first we generate various <TEX>$0^{th}$</TEX> order SE spectrum data (<TEX>$\psi$</TEX> and <TEX>${\Delta}$</TEX>) which can be calculated through rigorous coupled-wave analysis (RCWA) algorithm and then we calculate correlation values between a reference spectrum and an object spectrum which is varied for several different object 3D shape.

© 2007 Optical Society of Korea

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