Abstract

Dichroic beam-splitter (DBS) with polarization-maintaining took an important role in the free space quantum telecommunication tests on the Micius satellite of China. In this presentation, we designed and prepared a 50 layer polarization-maintaining DBS coating by a dual ion beam sputtering deposition (Dual-IBS) method. In order to solve a stress problem, an 18 layer special anti-reflection (AR) coating with similar physical thickness ratio was deposited on the backside. By stress compensation, the surface flatness RMS value of the DBS sample decreased from 0.341 λ (@632.8 nm) to 0.103 λ while beam splitting and polarization maintaining properties were almost kept unchanged. Further, we discussed the mechanism of film stress and stress compensation by equation deduction and found that total stress had a strong relationship with the total physical thickness and the ratio of layer materials.

© 2021 Optical Society of Korea

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2020 (3)

Y. F. Chen, J. B. Xiao, "Compact silicon-based polarization beam splitter using directional couplers assisted with subwavelength gratings," Opt. Eng. 59, (2020)
[Crossref]

J. B. Oliver, J. Spaulding, B. Charles, "Stress compensation by deposition of a nonuniform corrective coating," Appl. Opt. 59, A54‒A57 (2020)
[Crossref] [PubMed]

S. Melnikas, U. Gimzevskis, S. Kicas, "Stress compensated back side chirped mirror with high negative dispersion," Opt. Laser Technol. 121, (2020)
[Crossref]

2019 (2)

2018 (2)

2017 (1)

J. Yin, Y. Cao, Y.-H. Li, S.-K. Liao, L. Zhang, J.-G. Ren, W.-Q. Cai, W.-Y. Liu, B. Li, H. Dai, G.-B. Li, Q.-M. Lu, Y.-H. Gong, Y. Xu, S.-L. Li, F.-Z. Li, Y.-Y. Yin, Z.-Q. Jiang, M. Li, J.-J. Jia, G. Ren, D. He, Y.-L. Zhou, X.-X. Zhang, N. Wang, X. Chang, Z.-C. Zhu, N.-L. Liu, Y.-A. Chen, C.-Y. Lu, R. Shu, C.-Z. Peng, J.-Y. Wang, J.-W. Pan, "Satellite-based entanglement distribution over 1200 kilometers," Science 356, 1140‒1144 (2017)
[Crossref] [PubMed]

2016 (3)

A. Orieux, E. Diamanti, "Recent advances on integrated quantum communications," J. Optics 18, (2016)
[Crossref]

Y. T. Pu, Z. Qiao, G. Wang, F. Qiu, P. Ma, S. Wang, "Stress reduction and structural properties of Ta2O5/SiO2 mixture films produced by ion-beam sputtering," Proc. SPIE 9683, (2016)

S. Kicas, U. Gimževskis, S. Melnikas, "Post deposition annealing of IBS mixture coatings for compensation of film induced stress," Opt. Mater. Express 6, 2236‒2243 (2016)
[Crossref]

2015 (2)

A. Ullah, H. Wilke, I. Memon, Y. Shen, D. T. Nguyen, C. Woidt, H. Hillmer, "Stress relaxation in dual ion beam sputtered Nb2O5 and SiO2 thin films: application in a Fabry-Pérot filter array with 3D nanoimprinted cavities," J. Micromech. Microeng. 25, (2015)
[Crossref]

G. Vallone, D. Bacco, D. Dequal, S. Gaiarin, V. Luceri, G. Bianco, P. Villoresi, "Experimental satellite quantum communications," Phys. Rev. Lett. 115, (2015)
[Crossref] [PubMed]

2014 (1)

2012 (4)

E. Chason, J. W. Shin, S. J. Hearne, L. B. Freund, "Kinetic model for dependence of thin film stress on growth rate temperature and microstructure," J. Appl. Phys. 111, (2012)
[Crossref]

S. Barz, E. Kashefi, A. Broadbent, J. F. Fitzsimons, A. Zeilinger, P. Walther, "Demonstration of blind quantum computing," Science 335, 303‒308 (2012)
[Crossref] [PubMed]

J. Yin, J.-G. Ren, H. Lu, Y. Cao, H.-L. Yong, Y.-P. Wu, C. Liu, S.-K. Liao, F. Zhou, Y. Jiang, X.-D. Cai, P. Xu, G.-S. Pan, J.-J. Jia, Y.-M. Huang, H. Yin, J.-Y. Wang, Y.-A. Chen, C.-Z. Peng, J.-W. Pan, "Quantum teleportation and entanglement distribution over 100-kilometre free-space channels," Nature 488, 185‒188 (2012)
[Crossref] [PubMed]

J. B. Oliver, P. Kupinski, A. L. Rigatti, A. W. Schmid, J. C. Lambropoulos, S. Papernov, A. Kozlov, C. Smith, R. D. Hand, "Stress compensation in hafnia/silica optical coatings by inclusion of alumina layers," Opt. Express 20, 16596‒16610 (2012)
[Crossref]

2009 (2)

V. Scarani, H. Bechmann-Pasquinucci, N. J. Cerf, M. Dušek, N. Lütkenhaus, M. Peev, "The security of practical quantum key distribution," Rev. Mod. Phys. 81, 1301 (2009)
[Crossref]

R. P. Abel, U. Krohn, P. Siddons, I. G. Hughes, C. S. Adams, "Faraday dichroic beam splitter for Raman light using an isotopically pure alkali-metal-vapor cell," Opt. Lett. 34, 3071‒3073 (2009)
[Crossref] [PubMed]

1993 (1)

C. A. Davis, "A simple model for the formation of compressive stress in thin films by ion bombardment," Thin Solid Films 226, 30‒34 (1993)
[Crossref]

1983 (1)

1909 (1)

G. G. Stoney, "The tension of metallic films deposited by electrolysis," Proc. R. Soc. Lond. A 82, 172‒175 (1909)
[Crossref]

Abel, R. P.

Adams, C. S.

Amotchkina, T.

Bacco, D.

G. Vallone, D. Bacco, D. Dequal, S. Gaiarin, V. Luceri, G. Bianco, P. Villoresi, "Experimental satellite quantum communications," Phys. Rev. Lett. 115, (2015)
[Crossref] [PubMed]

Barz, S.

S. Barz, E. Kashefi, A. Broadbent, J. F. Fitzsimons, A. Zeilinger, P. Walther, "Demonstration of blind quantum computing," Science 335, 303‒308 (2012)
[Crossref] [PubMed]

Bechmann-Pasquinucci, H.

V. Scarani, H. Bechmann-Pasquinucci, N. J. Cerf, M. Dušek, N. Lütkenhaus, M. Peev, "The security of practical quantum key distribution," Rev. Mod. Phys. 81, 1301 (2009)
[Crossref]

Bhatran, A.

Bianco, G.

G. Vallone, D. Bacco, D. Dequal, S. Gaiarin, V. Luceri, G. Bianco, P. Villoresi, "Experimental satellite quantum communications," Phys. Rev. Lett. 115, (2015)
[Crossref] [PubMed]

Bokor, J.

Broadbent, A.

S. Barz, E. Kashefi, A. Broadbent, J. F. Fitzsimons, A. Zeilinger, P. Walther, "Demonstration of blind quantum computing," Science 335, 303‒308 (2012)
[Crossref] [PubMed]

Cai, W.-Q.

J. Yin, Y. Cao, Y.-H. Li, S.-K. Liao, L. Zhang, J.-G. Ren, W.-Q. Cai, W.-Y. Liu, B. Li, H. Dai, G.-B. Li, Q.-M. Lu, Y.-H. Gong, Y. Xu, S.-L. Li, F.-Z. Li, Y.-Y. Yin, Z.-Q. Jiang, M. Li, J.-J. Jia, G. Ren, D. He, Y.-L. Zhou, X.-X. Zhang, N. Wang, X. Chang, Z.-C. Zhu, N.-L. Liu, Y.-A. Chen, C.-Y. Lu, R. Shu, C.-Z. Peng, J.-Y. Wang, J.-W. Pan, "Satellite-based entanglement distribution over 1200 kilometers," Science 356, 1140‒1144 (2017)
[Crossref] [PubMed]

Cai, X.-D.

J. Yin, J.-G. Ren, H. Lu, Y. Cao, H.-L. Yong, Y.-P. Wu, C. Liu, S.-K. Liao, F. Zhou, Y. Jiang, X.-D. Cai, P. Xu, G.-S. Pan, J.-J. Jia, Y.-M. Huang, H. Yin, J.-Y. Wang, Y.-A. Chen, C.-Z. Peng, J.-W. Pan, "Quantum teleportation and entanglement distribution over 100-kilometre free-space channels," Nature 488, 185‒188 (2012)
[Crossref] [PubMed]

Cao, Y.

J. Yin, Y. Cao, Y.-H. Li, S.-K. Liao, L. Zhang, J.-G. Ren, W.-Q. Cai, W.-Y. Liu, B. Li, H. Dai, G.-B. Li, Q.-M. Lu, Y.-H. Gong, Y. Xu, S.-L. Li, F.-Z. Li, Y.-Y. Yin, Z.-Q. Jiang, M. Li, J.-J. Jia, G. Ren, D. He, Y.-L. Zhou, X.-X. Zhang, N. Wang, X. Chang, Z.-C. Zhu, N.-L. Liu, Y.-A. Chen, C.-Y. Lu, R. Shu, C.-Z. Peng, J.-Y. Wang, J.-W. Pan, "Satellite-based entanglement distribution over 1200 kilometers," Science 356, 1140‒1144 (2017)
[Crossref] [PubMed]

J. Yin, J.-G. Ren, H. Lu, Y. Cao, H.-L. Yong, Y.-P. Wu, C. Liu, S.-K. Liao, F. Zhou, Y. Jiang, X.-D. Cai, P. Xu, G.-S. Pan, J.-J. Jia, Y.-M. Huang, H. Yin, J.-Y. Wang, Y.-A. Chen, C.-Z. Peng, J.-W. Pan, "Quantum teleportation and entanglement distribution over 100-kilometre free-space channels," Nature 488, 185‒188 (2012)
[Crossref] [PubMed]

Cerf, N. J.

V. Scarani, H. Bechmann-Pasquinucci, N. J. Cerf, M. Dušek, N. Lütkenhaus, M. Peev, "The security of practical quantum key distribution," Rev. Mod. Phys. 81, 1301 (2009)
[Crossref]

Chalifoux, B. D.

Chang, X.

J. Yin, Y. Cao, Y.-H. Li, S.-K. Liao, L. Zhang, J.-G. Ren, W.-Q. Cai, W.-Y. Liu, B. Li, H. Dai, G.-B. Li, Q.-M. Lu, Y.-H. Gong, Y. Xu, S.-L. Li, F.-Z. Li, Y.-Y. Yin, Z.-Q. Jiang, M. Li, J.-J. Jia, G. Ren, D. He, Y.-L. Zhou, X.-X. Zhang, N. Wang, X. Chang, Z.-C. Zhu, N.-L. Liu, Y.-A. Chen, C.-Y. Lu, R. Shu, C.-Z. Peng, J.-Y. Wang, J.-W. Pan, "Satellite-based entanglement distribution over 1200 kilometers," Science 356, 1140‒1144 (2017)
[Crossref] [PubMed]

Charles, B.

Chason, E.

E. Chason, J. W. Shin, S. J. Hearne, L. B. Freund, "Kinetic model for dependence of thin film stress on growth rate temperature and microstructure," J. Appl. Phys. 111, (2012)
[Crossref]

Chen, Y. F.

Y. F. Chen, J. B. Xiao, "Compact silicon-based polarization beam splitter using directional couplers assisted with subwavelength gratings," Opt. Eng. 59, (2020)
[Crossref]

Chen, Y.-A.

J. Yin, Y. Cao, Y.-H. Li, S.-K. Liao, L. Zhang, J.-G. Ren, W.-Q. Cai, W.-Y. Liu, B. Li, H. Dai, G.-B. Li, Q.-M. Lu, Y.-H. Gong, Y. Xu, S.-L. Li, F.-Z. Li, Y.-Y. Yin, Z.-Q. Jiang, M. Li, J.-J. Jia, G. Ren, D. He, Y.-L. Zhou, X.-X. Zhang, N. Wang, X. Chang, Z.-C. Zhu, N.-L. Liu, Y.-A. Chen, C.-Y. Lu, R. Shu, C.-Z. Peng, J.-Y. Wang, J.-W. Pan, "Satellite-based entanglement distribution over 1200 kilometers," Science 356, 1140‒1144 (2017)
[Crossref] [PubMed]

J. Yin, J.-G. Ren, H. Lu, Y. Cao, H.-L. Yong, Y.-P. Wu, C. Liu, S.-K. Liao, F. Zhou, Y. Jiang, X.-D. Cai, P. Xu, G.-S. Pan, J.-J. Jia, Y.-M. Huang, H. Yin, J.-Y. Wang, Y.-A. Chen, C.-Z. Peng, J.-W. Pan, "Quantum teleportation and entanglement distribution over 100-kilometre free-space channels," Nature 488, 185‒188 (2012)
[Crossref] [PubMed]

Chitaree, R.

Dai, H.

J. Yin, Y. Cao, Y.-H. Li, S.-K. Liao, L. Zhang, J.-G. Ren, W.-Q. Cai, W.-Y. Liu, B. Li, H. Dai, G.-B. Li, Q.-M. Lu, Y.-H. Gong, Y. Xu, S.-L. Li, F.-Z. Li, Y.-Y. Yin, Z.-Q. Jiang, M. Li, J.-J. Jia, G. Ren, D. He, Y.-L. Zhou, X.-X. Zhang, N. Wang, X. Chang, Z.-C. Zhu, N.-L. Liu, Y.-A. Chen, C.-Y. Lu, R. Shu, C.-Z. Peng, J.-Y. Wang, J.-W. Pan, "Satellite-based entanglement distribution over 1200 kilometers," Science 356, 1140‒1144 (2017)
[Crossref] [PubMed]

Davis, C. A.

C. A. Davis, "A simple model for the formation of compressive stress in thin films by ion bombardment," Thin Solid Films 226, 30‒34 (1993)
[Crossref]

Dequal, D.

G. Vallone, D. Bacco, D. Dequal, S. Gaiarin, V. Luceri, G. Bianco, P. Villoresi, "Experimental satellite quantum communications," Phys. Rev. Lett. 115, (2015)
[Crossref] [PubMed]

Diamanti, E.

A. Orieux, E. Diamanti, "Recent advances on integrated quantum communications," J. Optics 18, (2016)
[Crossref]

Dušek, M.

V. Scarani, H. Bechmann-Pasquinucci, N. J. Cerf, M. Dušek, N. Lütkenhaus, M. Peev, "The security of practical quantum key distribution," Rev. Mod. Phys. 81, 1301 (2009)
[Crossref]

Falcone, R.W.

Ferrelli, G. L.

R. J. Zaldivar, H. I. Kim, G. L. Ferrelli, "Effect of gamma radiation on the stability of UV replicated composite mirrors," Opt. Engineering 57, (2018)
[Crossref]

Fitzsimons, J. F.

S. Barz, E. Kashefi, A. Broadbent, J. F. Fitzsimons, A. Zeilinger, P. Walther, "Demonstration of blind quantum computing," Science 335, 303‒308 (2012)
[Crossref] [PubMed]

Freund, L. B.

E. Chason, J. W. Shin, S. J. Hearne, L. B. Freund, "Kinetic model for dependence of thin film stress on growth rate temperature and microstructure," J. Appl. Phys. 111, (2012)
[Crossref]

Gaiarin, S.

G. Vallone, D. Bacco, D. Dequal, S. Gaiarin, V. Luceri, G. Bianco, P. Villoresi, "Experimental satellite quantum communications," Phys. Rev. Lett. 115, (2015)
[Crossref] [PubMed]

Gimzevskis, U.

S. Melnikas, U. Gimzevskis, S. Kicas, "Stress compensated back side chirped mirror with high negative dispersion," Opt. Laser Technol. 121, (2020)
[Crossref]

Gimževskis, U.

Gong, Y.-H.

J. Yin, Y. Cao, Y.-H. Li, S.-K. Liao, L. Zhang, J.-G. Ren, W.-Q. Cai, W.-Y. Liu, B. Li, H. Dai, G.-B. Li, Q.-M. Lu, Y.-H. Gong, Y. Xu, S.-L. Li, F.-Z. Li, Y.-Y. Yin, Z.-Q. Jiang, M. Li, J.-J. Jia, G. Ren, D. He, Y.-L. Zhou, X.-X. Zhang, N. Wang, X. Chang, Z.-C. Zhu, N.-L. Liu, Y.-A. Chen, C.-Y. Lu, R. Shu, C.-Z. Peng, J.-Y. Wang, J.-W. Pan, "Satellite-based entanglement distribution over 1200 kilometers," Science 356, 1140‒1144 (2017)
[Crossref] [PubMed]

Hand, R. D.

He, D.

J. Yin, Y. Cao, Y.-H. Li, S.-K. Liao, L. Zhang, J.-G. Ren, W.-Q. Cai, W.-Y. Liu, B. Li, H. Dai, G.-B. Li, Q.-M. Lu, Y.-H. Gong, Y. Xu, S.-L. Li, F.-Z. Li, Y.-Y. Yin, Z.-Q. Jiang, M. Li, J.-J. Jia, G. Ren, D. He, Y.-L. Zhou, X.-X. Zhang, N. Wang, X. Chang, Z.-C. Zhu, N.-L. Liu, Y.-A. Chen, C.-Y. Lu, R. Shu, C.-Z. Peng, J.-Y. Wang, J.-W. Pan, "Satellite-based entanglement distribution over 1200 kilometers," Science 356, 1140‒1144 (2017)
[Crossref] [PubMed]

Hearne, S. J.

E. Chason, J. W. Shin, S. J. Hearne, L. B. Freund, "Kinetic model for dependence of thin film stress on growth rate temperature and microstructure," J. Appl. Phys. 111, (2012)
[Crossref]

Heilmann, R. K.

Hillmer, H.

A. Ullah, H. Wilke, I. Memon, Y. Shen, D. T. Nguyen, C. Woidt, H. Hillmer, "Stress relaxation in dual ion beam sputtered Nb2O5 and SiO2 thin films: application in a Fabry-Pérot filter array with 3D nanoimprinted cavities," J. Micromech. Microeng. 25, (2015)
[Crossref]

Huang, Y.-M.

J. Yin, J.-G. Ren, H. Lu, Y. Cao, H.-L. Yong, Y.-P. Wu, C. Liu, S.-K. Liao, F. Zhou, Y. Jiang, X.-D. Cai, P. Xu, G.-S. Pan, J.-J. Jia, Y.-M. Huang, H. Yin, J.-Y. Wang, Y.-A. Chen, C.-Z. Peng, J.-W. Pan, "Quantum teleportation and entanglement distribution over 100-kilometre free-space channels," Nature 488, 185‒188 (2012)
[Crossref] [PubMed]

Hughes, I. G.

Jia, J.-J.

J. Yin, Y. Cao, Y.-H. Li, S.-K. Liao, L. Zhang, J.-G. Ren, W.-Q. Cai, W.-Y. Liu, B. Li, H. Dai, G.-B. Li, Q.-M. Lu, Y.-H. Gong, Y. Xu, S.-L. Li, F.-Z. Li, Y.-Y. Yin, Z.-Q. Jiang, M. Li, J.-J. Jia, G. Ren, D. He, Y.-L. Zhou, X.-X. Zhang, N. Wang, X. Chang, Z.-C. Zhu, N.-L. Liu, Y.-A. Chen, C.-Y. Lu, R. Shu, C.-Z. Peng, J.-Y. Wang, J.-W. Pan, "Satellite-based entanglement distribution over 1200 kilometers," Science 356, 1140‒1144 (2017)
[Crossref] [PubMed]

J. Yin, J.-G. Ren, H. Lu, Y. Cao, H.-L. Yong, Y.-P. Wu, C. Liu, S.-K. Liao, F. Zhou, Y. Jiang, X.-D. Cai, P. Xu, G.-S. Pan, J.-J. Jia, Y.-M. Huang, H. Yin, J.-Y. Wang, Y.-A. Chen, C.-Z. Peng, J.-W. Pan, "Quantum teleportation and entanglement distribution over 100-kilometre free-space channels," Nature 488, 185‒188 (2012)
[Crossref] [PubMed]

Jiang, Y.

J. Yin, J.-G. Ren, H. Lu, Y. Cao, H.-L. Yong, Y.-P. Wu, C. Liu, S.-K. Liao, F. Zhou, Y. Jiang, X.-D. Cai, P. Xu, G.-S. Pan, J.-J. Jia, Y.-M. Huang, H. Yin, J.-Y. Wang, Y.-A. Chen, C.-Z. Peng, J.-W. Pan, "Quantum teleportation and entanglement distribution over 100-kilometre free-space channels," Nature 488, 185‒188 (2012)
[Crossref] [PubMed]

Jiang, Z.-Q.

J. Yin, Y. Cao, Y.-H. Li, S.-K. Liao, L. Zhang, J.-G. Ren, W.-Q. Cai, W.-Y. Liu, B. Li, H. Dai, G.-B. Li, Q.-M. Lu, Y.-H. Gong, Y. Xu, S.-L. Li, F.-Z. Li, Y.-Y. Yin, Z.-Q. Jiang, M. Li, J.-J. Jia, G. Ren, D. He, Y.-L. Zhou, X.-X. Zhang, N. Wang, X. Chang, Z.-C. Zhu, N.-L. Liu, Y.-A. Chen, C.-Y. Lu, R. Shu, C.-Z. Peng, J.-Y. Wang, J.-W. Pan, "Satellite-based entanglement distribution over 1200 kilometers," Science 356, 1140‒1144 (2017)
[Crossref] [PubMed]

Kaewon, R.

Kashefi, E.

S. Barz, E. Kashefi, A. Broadbent, J. F. Fitzsimons, A. Zeilinger, P. Walther, "Demonstration of blind quantum computing," Science 335, 303‒308 (2012)
[Crossref] [PubMed]

Kicas, S.

S. Melnikas, U. Gimzevskis, S. Kicas, "Stress compensated back side chirped mirror with high negative dispersion," Opt. Laser Technol. 121, (2020)
[Crossref]

S. Kicas, U. Gimževskis, S. Melnikas, "Post deposition annealing of IBS mixture coatings for compensation of film induced stress," Opt. Mater. Express 6, 2236‒2243 (2016)
[Crossref]

Kim, H. I.

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