Abstract

In this paper, LED arrays with segmented mirrors and a mask are presented as a new dark-field illuminator for reflective Fourier ptychographic microscopy (FPM). The illuminator can overcome the limitations of the size and the position of samples that the dark-field illuminator using a parabolic mirror has had. The new concept was demonstrated by measuring a USAF 1951 target, and it resolved a pattern in group 10 element 6 (274 nm) in the USAF target. The new design of the dark-field illuminator can enhance competitiveness of the reflective FPM as a versatile measurement method in industry.

© 2021 Optical Society of Korea

Reflective Fourier ptychographic microscopy using a parabolic mirror

Hwihyeong Lee, Byong Hyuk Chon, and Hee Kyung Ahn
Opt. Express 27(23) 34382-34391 (2019)

Wide-field Fourier ptychographic microscopy using laser illumination source

Jaebum Chung, Hangwen Lu, Xiaoze Ou, Haojiang Zhou, and Changhuei Yang
Biomed. Opt. Express 7(11) 4787-4802 (2016)

Digital micromirror device-based laser-illumination Fourier ptychographic microscopy

Cuifang Kuang, Ye Ma, Renjie Zhou, Justin Lee, George Barbastathis, Ramachandra R. Dasari, Zahid Yaqoob, and Peter T. C. So
Opt. Express 23(21) 26999-27010 (2015)

Symmetrical illumination based extending depth of field in Fourier ptychographic microscopy

Muyang Zhang, LeiLei Zhang, Di Yang, Haitao Liu, and Yanmei Liang
Opt. Express 27(3) 3583-3597 (2019)

Apodized coherent transfer function constraint for partially coherent Fourier ptychographic microscopy

Xiong Chen, Youqiang Zhu, Minglu Sun, Dayu Li, Quanquan Mu, and Li Xuan
Opt. Express 27(10) 14099-14111 (2019)