Abstract

Laser processing using holograms can greatly improve processing speed, by spatially distributing the laser energy on the target material. However, it is difficult to reconstruct an image with arrays of closely spaced spots for laser processing, because the specklelike interference pattern prevents the spots from getting close to each other. To resolve this problem, a line target was divided in two, reconstructed with orthogonally polarized beams, and then superposed. Their optical reconstruction was performed by computer-generated holograms and a pulsed laser. With this method, we performed two-dimensional (2D) laser drilling of polyimide film, with a kerf width of 20 µm and a total processing length of 20 mm.

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  1. D. BelforteIndustrial lasers continue solid revenue growth in 2016 (Industrial Laser Solutions for Manufacturing, 18 Jan 2017)https://www.industrial-lasers.com/micromachining/article/16485081/industrial-lasers-continue-solid-revenue-growth-in20165 Oct 2017
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  26. M. T. Gale, M. Rossi, J. Pedersen, and H. SchuetzFabrication of continuous-relief micro-optical elements by direct laser writing in photoresistsOpt. Eng.19943335563567
  27. I. Alexeev, J. Strauss, A. Gröschl, K. Cvecek, and M. SchmidtLaser focus positioning method with submicrometer accuracyAppl. Opt.201352415421
  28. J. MeijerLaser beam machining (LBM), state of the art and new opportunitiesJ. Mater. Process. Technol.2004149217
  29. K. C. Phillips, H. H. Gandhi, E. Mazur, and S. K. SundaramUltrafast laser processing of materials: a reviewAdv. Opt. Photonics20157684712
  30. R. SchaefferFundamentals of laser MicromachiningCRC pressBoca Raton, USA2012Chapter 2
  31. S. JiangASJ singulating micro SD cardsProc. 2009 American WJTA Conference and ExpoWaterjet Technology AssociationTexas2009Aug2Paper A

Other (31)

D. BelforteIndustrial lasers continue solid revenue growth in 2016 (Industrial Laser Solutions for Manufacturing, 18 Jan 2017)https://www.industrial-lasers.com/micromachining/article/16485081/industrial-lasers-continue-solid-revenue-growth-in20165 Oct 2017

A. Salama, L. Li, P. Mativenga, and A. SabliHigh-power picosecond laser drilling/machining of carbon fibre-reinforced polymer (CFRP) compositesAppl. Phys. A201612273

M. Vala and J. HomolaMultiple beam interference lithography: A tool for rapid fabrication of plasmonic arrays of arbitrary shaped nanomotifsOpt. Express2016241565615665

K. Miyazaki, G. Miyaji, and T. InoueNanograting formation on metals in air with interfering femtosecond laser pulsesAppl. Phys. Lett.2015107071103

P. S. Salter and M. J. BoothAddressable microlens array for parallel laser microfabricationOpt. Lett.20113623022304

J. Kato, N. Takeyasu, Y. Adachi, H.-B. Sun, and S. KawataMultiple-spot parallel processing for laser micronano-fabricationAppl. Phys. Lett.200586044102

Z. Kuang, W. Perrie, D. Liu, P. Fitzsimons, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. WatkinsUltrashort pulse laser patterning of indium tin oxide thin films on glass by uniform diffractive beam patternsAppl. Surf. Sci.201225876017606

Y. Jin, W. Perrie, P. Harris, O. J. Allegre, K. J. Abrams, and G. DeardenPatterning of Aluminium thin film on polyethylene terephthalate by multi-beam picosecond laserOpt. Lasers Eng.2015746774

S. Hasegawa, H. Ito, H. Toyoda, and Y. HayasakiMassively parallel femtosecond laser processingOpt. Express2016241851318524

K. L. Wlodarczyk, M. Ardron, N. J. Weston, and D. P. HandHolographic watermarks and steganographic markings for combating the counterfeiting practices of high-value metal productsJ. Mater. Process. Technol.2019264328335

P. Kunwar, L. Turquet, J. Hassinen, R. H. A. Ras, J. Toivonen, and G. BautistaHolographic patterning of fluorescent microstructures comprising silver nanoclustersOpt. Mater. Express20166946951

K. L. Wlodarczyk and D. P. HandShaping the surface of Borofloat 33 glass with ultrashort laser pulses and a spatial light modulatorAppl. Opt.20145317591765

T. Häfner, J. Heberle, D. Holder, and M. SchmidtSpeckle reduction techniques in holographic beam shaping for accurate and efficient picosecond laser structuringJ. Laser Appl.201729022205

L. Büsing, S. Eifel, and P. LoosenDesign, alignment and applications of optical systems for parallel processing with ultra-short laser pulsesProc. SPIE2014913191310C

J. J. J. Kaakkunen, P. Laakso, and V. KujanpääAdaptive multibeam laser cutting of thin steel sheets with fiber laser using spatial light modulatorJ. Laser Appl.201426032008

C. Mauclair, D. Pietroy, Y. Di Maio, E. Baubeau, J.-P. Colombier, R. Stoian, and F. PigeonUltrafast laser micro-cutting of stainless steel and PZT using a modulated line of multiple foci formed by spatial beam shapingOpt. Lasers Eng.201567212217

K. S. Hansen, F. O. Olsen, M. Kristiansen, and O. MadsenJoining of multiple sheets in a butt-joint configuration using single pass laser welding with multiple spotsJ. Laser Appl.201527032011

J. W. GoodmanSome fundamental properties of speckleJ. Opt. Soc. Am.19766611451150

B. C. Kress and P. MeyrueisApplied Digital Optics: From Micro-Optics to NanophotonicsJohn Wiley & SonsLondon, UK2009

L. Golan and S. ShohamSpeckle elimination using shift-averaging in high-rate holographic projectionOpt. Express20091713301339

J. Amako, H. Miura, and T. SoneharaSpeckle-noise reduction on kinoform reconstruction using a phase-only spatial light modulatorAppl. Opt.19953431653171

Y. Takaki and M. YokouchiSpeckle-free and grayscale hologram reconstruction using time-multiplexing techniqueOpt. Express20111975677579

M. MakowskiMinimized speckle noise in lens-less holographic projection by pixel separationOpt. Express2013212920529216

H. Lee, S. Park, B. G. Jeon, and H. J. KongReconstruction of static line images with reduced speckle using interlaced holograms for holographic laser cuttingAppl. Phys. B2016122192

J. BengtssonKinoform design with an optimal-rotation-angle methodAppl. Opt.19943368796884

M. T. Gale, M. Rossi, J. Pedersen, and H. SchuetzFabrication of continuous-relief micro-optical elements by direct laser writing in photoresistsOpt. Eng.19943335563567

I. Alexeev, J. Strauss, A. Gröschl, K. Cvecek, and M. SchmidtLaser focus positioning method with submicrometer accuracyAppl. Opt.201352415421

J. MeijerLaser beam machining (LBM), state of the art and new opportunitiesJ. Mater. Process. Technol.2004149217

K. C. Phillips, H. H. Gandhi, E. Mazur, and S. K. SundaramUltrafast laser processing of materials: a reviewAdv. Opt. Photonics20157684712

R. SchaefferFundamentals of laser MicromachiningCRC pressBoca Raton, USA2012Chapter 2

S. JiangASJ singulating micro SD cardsProc. 2009 American WJTA Conference and ExpoWaterjet Technology AssociationTexas2009Aug2Paper A

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