In this paper, LED arrays with segmented mirrors and a mask are presented as a new dark-field illuminator for reflective Fourier ptychographic microscopy (FPM). The illuminator can overcome the limitations of the size and the position of samples that the dark-field illuminator using a parabolic mirror has had. The new concept was demonstrated by measuring a USAF 1951 target, and it resolved a pattern in group 10 element 6 (274 nm) in the USAF target. The new design of the dark-field illuminator can enhance competitiveness of the reflective FPM as a versatile measurement method in industry.

© 2021 Optical Society of Korea

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Ahn, H. K.

Bian, Z.

Chen, N.

Chen, Q.

Chen, X.

Cho, J.

Chon, B. H.

Dai, Q.

Dan, D.

Dong, S.

Fan, Y.

Guo, K.

Hong, J.-Y.

Horstmeyer, R.

Jeong, Y.

Jiang, W.

Lam, E. Y.

Lee, B.

Lee, H.

Lei, M.

Li, D.

Li, X.

Liang, R.

Milster, T.

Min, J.

Moon, S.

Mu, Q.

Nanda, P.

Ou, X.

Pacheco, S.

Pan, A.

Ramchandran, K.

Rodriguez, J. J.

Salahieh, B.

Situ, G.

Sun, J.

Sun, M.

Tian, L.

Waller, L.

Wang, W.

Wang, Z.

When, K.

Xuan, L.

Yang, C.

Yao, B.

Yoo, D.

Zhang, J.

Zhang, L.

Zhang, Y.

Zhao, T.

Zheng, G.

Zheng, R. Horstmeyer. G.

Zhou, A.

Zhou, M.

Zhu, Y.

Zuo, C.

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