Abstract

We describe a calibration method to improve the accuracy of interferometric snapshot spectroscopic ellipsometry employing a dual-spectrometer sensor scheme. Conventional spectral wavelength calibration of a spectrometer has been performed by using a calibration lamp having multiple peaks at specific wavelength. This paper shows that such a conventional spectrometer calibration method is inappropriate for the proposed interferometric snapshot spectroscopic ellipsometry to obtain highly accurate ellipsometric phase information. And also, systematic error analysis of interferometric snapshot spectroscopic ellipsometry is conducted experimentally.

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  1. K. RiedlingEllipsometry for Industrial ApplicationsSpringer-VerlagWien1988
  2. H. G. Tompkins and W. A. McGahanSpectroscopic Ellipsometry and Reflectometry: A user’s GuideWileyNY1999
  3. D. AspnesExpanding horizons: new developments in ellipsometry and polarimetryThin Solid Films2004455-456313
  4. A. Dejneka, I. Aulika, V. Trepakov, J. Krepelka, L. Jastrabik, Z. Hubicka, and A. LynnykSpectroscopic ellipsometry applied to phase transitions in solids: possibilities and limitationOpt. Express2009171432214338
  5. J. W. Weber, V. E. Calado, and M. C. M. Van de SandenOptical constants of graphene measured by spectroscopic ellipsometryAppl. Phys. Lett.201097091904
  6. D. E. AspnesFourier transform detection system for rotating-analyzer ellipsometersOpt. Commun.19738222225
  7. H. FujiwaraSpectroscopic Ellipsometry: Principles and ApplicationsJohn Wiley & SonsEngland2007
  8. H. F. Hazebroek and A. A. HolscherInterferometric ellipsometryJ. Phys. E: Sci. Instrum.19736822
  9. C.-H. Lin, C. Chou, and K.-S. ChangReal time interferometric ellipsometry with optical heterodyne and phase lock-in techniquesAppl. Opt.19902951595162
  10. K. Oka and T. KatoStatic spectroscopic ellipsometer based on optical frequency-domain interferometryProc. SPIE20024481137140
  11. P. Hlubina, D. Ciprian, and J. LunacekSpectral interferometric techniques to measure the ellipsometric phase of a thin-film structureOpt. Lett.20093426612663
  12. L. R. WatkinsInterferometric ellipsometAppl. Opt.20084729983001
  13. D. Kim, M. Jin, W. Chegal, J. Lee, and R. MagnussonCalibration of a snapshot phase-resolved polarizationsensitive spectral reflectometerOpt. Lett.20133848294832
  14. D. Kim, Y. Seo, Y. Yoon, V. Dembele, J. W. Yoon, K. J. Lee, and R. MagnussonRobust snapshot interferometric spectropolarimetryOpt. Lett.20164123182321
  15. V. Dembele, M. Jin, B. J. Baek, and D. KimDynamic spectro-polarimetry based on a modified Michelson interferometric schemeOpt. Express2016241441914428
  16. V. Dembele, M. Jin, I. Choi, W. Chegal, and D. KimInterferometric snapshot spectro-ellipsometryOpt. Express20182613331341
  17. D. Kim and V. DembeleOne-piece polarizing interferometer for ultrafast spectroscopic polarimetrySci. Rep.201995978
  18. V. Dembele, S. Choi, W. Chegal, I. Choi, M. J. Paul, J. Kim, and D. KimDynamic spectroscopic ellipsometry based on a one-piece polarizing interferometric schemeOpt. Commun.2020454124426
  19. W. G. Henry and M. R. MeharryCalibration of a prism spectrometerJ. Opt. Soc. Am.196151356359
  20. C.-H. Tseng, J. F. Ford, C. K. Mann, and T. J. VickersWavelength Calibration of a Multichannel SpectrometerAppl. Spectrosc.19934718081813
  21. M. Takeda, H. Ina, and S. KobayashiFourier-transform method of fringe-pattern analysis for computer-based topography and interferometryJ. Opt. Soc. Am.198272156160
  22. D. Kim, S. Kim, H. J. Kong, and Y. LeeMeasurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filterOpt. Lett.20022718931895

Other (22)

K. RiedlingEllipsometry for Industrial ApplicationsSpringer-VerlagWien1988

H. G. Tompkins and W. A. McGahanSpectroscopic Ellipsometry and Reflectometry: A user’s GuideWileyNY1999

D. AspnesExpanding horizons: new developments in ellipsometry and polarimetryThin Solid Films2004455-456313

A. Dejneka, I. Aulika, V. Trepakov, J. Krepelka, L. Jastrabik, Z. Hubicka, and A. LynnykSpectroscopic ellipsometry applied to phase transitions in solids: possibilities and limitationOpt. Express2009171432214338

J. W. Weber, V. E. Calado, and M. C. M. Van de SandenOptical constants of graphene measured by spectroscopic ellipsometryAppl. Phys. Lett.201097091904

D. E. AspnesFourier transform detection system for rotating-analyzer ellipsometersOpt. Commun.19738222225

H. FujiwaraSpectroscopic Ellipsometry: Principles and ApplicationsJohn Wiley & SonsEngland2007

H. F. Hazebroek and A. A. HolscherInterferometric ellipsometryJ. Phys. E: Sci. Instrum.19736822

C.-H. Lin, C. Chou, and K.-S. ChangReal time interferometric ellipsometry with optical heterodyne and phase lock-in techniquesAppl. Opt.19902951595162

K. Oka and T. KatoStatic spectroscopic ellipsometer based on optical frequency-domain interferometryProc. SPIE20024481137140

P. Hlubina, D. Ciprian, and J. LunacekSpectral interferometric techniques to measure the ellipsometric phase of a thin-film structureOpt. Lett.20093426612663

L. R. WatkinsInterferometric ellipsometAppl. Opt.20084729983001

D. Kim, M. Jin, W. Chegal, J. Lee, and R. MagnussonCalibration of a snapshot phase-resolved polarizationsensitive spectral reflectometerOpt. Lett.20133848294832

D. Kim, Y. Seo, Y. Yoon, V. Dembele, J. W. Yoon, K. J. Lee, and R. MagnussonRobust snapshot interferometric spectropolarimetryOpt. Lett.20164123182321

V. Dembele, M. Jin, B. J. Baek, and D. KimDynamic spectro-polarimetry based on a modified Michelson interferometric schemeOpt. Express2016241441914428

V. Dembele, M. Jin, I. Choi, W. Chegal, and D. KimInterferometric snapshot spectro-ellipsometryOpt. Express20182613331341

D. Kim and V. DembeleOne-piece polarizing interferometer for ultrafast spectroscopic polarimetrySci. Rep.201995978

V. Dembele, S. Choi, W. Chegal, I. Choi, M. J. Paul, J. Kim, and D. KimDynamic spectroscopic ellipsometry based on a one-piece polarizing interferometric schemeOpt. Commun.2020454124426

W. G. Henry and M. R. MeharryCalibration of a prism spectrometerJ. Opt. Soc. Am.196151356359

C.-H. Tseng, J. F. Ford, C. K. Mann, and T. J. VickersWavelength Calibration of a Multichannel SpectrometerAppl. Spectrosc.19934718081813

M. Takeda, H. Ina, and S. KobayashiFourier-transform method of fringe-pattern analysis for computer-based topography and interferometryJ. Opt. Soc. Am.198272156160

D. Kim, S. Kim, H. J. Kong, and Y. LeeMeasurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filterOpt. Lett.20022718931895

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