Abstract

In this paper we propose a method to generate a true color image in scanning white-light interferometry (SWLI). Previously, a true color image was obtained by using a color camera, or an RGB multichannel light source. Here we focused on acquiring a true color image without any hardware changes in basic SWLI, in which a monochrome camera is utilized. A Fourier transform method was used to obtain the spectral intensity distributions of the light reflected from the sample. RGB filtering was applied to the intensity distributions, to determine RGB values from the spectral intensity. Through color corrections, a true color image was generated from the RGB values. The image generated by the proposed method was verified on the basis of the RGB distance and peak signal-to-noise ratio analysis for its effectiveness.

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  1. Z. Malacara and M. ServĂ­nInterferogram Analysis For Optical TestingCRC PressBoca Raton, USA2005Chapter 3
  2. L. Deck and P. de GrootHigh-speed noncontact profiler based on scanning white-light interferometryAppl. Opt.19943373347338
  3. P. de GrootPrinciples of interference microscopy for the measurement of surface topographyAdv. Opt. Photonics20157165
  4. P. de GrootR. LeachOptical Measurement of Surface TopographySpringer VerlagBerlin, Germany2011187208Coherence Scanning Interferometry, Chapter 9
  5. S. W. Kim and G. H. KimThickness-profile measurement of transparent thin-film layers by white-light scanning interferometryAppl. Opt.19993859685973
  6. N. Kim, S. W. Lee, Y. I, and H. J. PahkAccurate roughness measurement using a method for evaluation and interpolation of the validity of height data from a scanning white-light interferometerCurr. Opt. Photon.20171604612
  7. J. Schmit and F. MunteanuFull-color images produced by white-light interferometryU.S. Patent20169282304B1
  8. J. L. Beverage, X. C. de Lega, and M. F. FayInterferometric microscope with true color imagingProc. SPIE2014920392030S
  9. J. Schmit, S. H. Bui, D. Chen, and M. J. NovakSide illumination in interferometryU.S. Patent20179746315B1
  10. P. de Groot and X. C. de LegaSignal modeling for lowcoherence height-scanning interference microscopyAppl. Opt.20044348214830
  11. J.-T. Dong and R.-S. LuSensitivity analysis of thin-film thickness measurement by vertical scanning white-light interferometryAppl. Opt.20125156685675
  12. G. Choi, Y. Lee, S. W. Lee, Y. Cho, and H. J. PahkSimple method for volumetric thickness measurement using a color cameraAppl. Opt.20185775507558
  13. D. R. HearnFourier transform interferometryMassachusetts Institute of TechnologyLincoln Laboratory1999No. TR-1053
  14. S. Bianco, A. Bruna, F. Naccari, and R. SchettinidColor correction pipeline optimization for digital camerasJ. Electron. Imaging201322023014
  15. S. T. WelsteadFractal and wavelet image compression techniquesSPIE Optical Engineering PressBellingham, WA, USA1999155156
  16. M. BarniDocument and Image compressionCRC PressBoca Raton, USA2006168169

Other (16)

Z. Malacara and M. ServĂ­nInterferogram Analysis For Optical TestingCRC PressBoca Raton, USA2005Chapter 3

L. Deck and P. de GrootHigh-speed noncontact profiler based on scanning white-light interferometryAppl. Opt.19943373347338

P. de GrootPrinciples of interference microscopy for the measurement of surface topographyAdv. Opt. Photonics20157165

P. de GrootR. LeachOptical Measurement of Surface TopographySpringer VerlagBerlin, Germany2011187208Coherence Scanning Interferometry, Chapter 9

S. W. Kim and G. H. KimThickness-profile measurement of transparent thin-film layers by white-light scanning interferometryAppl. Opt.19993859685973

N. Kim, S. W. Lee, Y. I, and H. J. PahkAccurate roughness measurement using a method for evaluation and interpolation of the validity of height data from a scanning white-light interferometerCurr. Opt. Photon.20171604612

J. Schmit and F. MunteanuFull-color images produced by white-light interferometryU.S. Patent20169282304B1

J. L. Beverage, X. C. de Lega, and M. F. FayInterferometric microscope with true color imagingProc. SPIE2014920392030S

J. Schmit, S. H. Bui, D. Chen, and M. J. NovakSide illumination in interferometryU.S. Patent20179746315B1

P. de Groot and X. C. de LegaSignal modeling for lowcoherence height-scanning interference microscopyAppl. Opt.20044348214830

J.-T. Dong and R.-S. LuSensitivity analysis of thin-film thickness measurement by vertical scanning white-light interferometryAppl. Opt.20125156685675

G. Choi, Y. Lee, S. W. Lee, Y. Cho, and H. J. PahkSimple method for volumetric thickness measurement using a color cameraAppl. Opt.20185775507558

D. R. HearnFourier transform interferometryMassachusetts Institute of TechnologyLincoln Laboratory1999No. TR-1053

S. Bianco, A. Bruna, F. Naccari, and R. SchettinidColor correction pipeline optimization for digital camerasJ. Electron. Imaging201322023014

S. T. WelsteadFractal and wavelet image compression techniquesSPIE Optical Engineering PressBellingham, WA, USA1999155156

M. BarniDocument and Image compressionCRC PressBoca Raton, USA2006168169

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