Abstract

An effective and precise method using a scanning white-light interferometer (SWLI) for three-dimensional surface measurements, in particular for roughness measurements, has been proposed. The measurement of a microscopically sloped area using an interferometer has limitations, due to the numerical aperture of the lens. In particular, for roughness measurements, it is challenging to obtain accurate height data for a sloped area using the interferometer, due to diffraction of the light. Owing to these optical limitations of the interferometer for roughness measurements, the Ra measurements performed using an interferometer contain errors. To overcome the limitations, we propose a method consisting of the following two steps. First, we evaluate the height data and set the invalid height area to be blank, using the characteristics of the modulus peak, which has a low peak value for signals that have low reliability in the interferogram. Next, we interpolate the blank area using the adjacent reliable area. Rubert roughness standards are used to verify the proposed method. The results obtained by the proposed method are compared to those obtained with a stylus profilometer. For the considered sinusoidal samples, Ra ranges from 0.053 μm to 6.303 μm, and we show that the interpolation method is effective. In addition, the method can be applied to a random surface where Ra ranges from 0.011 µm to 0.164 µm. We show that the roughness results obtained using the proposed method agree well with profilometer results. The R2 values for both sinusoidal and random samples are greater than 0.995.

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  10. V. G. Badami, J. Liesener, C. J. Evans, and P. De GrootEvaluation of the measurement performance of a coherence scanning microscope using roughness specimensProc. ASPE Annual MeetingDenver, CO, USA2011Nov.2326
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  12. K. G. LarkinEfficient nonlinear algorithm for envelope detection in white light interferometryJ. Opt. Soc. Am. A199613832
  13. Carl DE BOORA practical guide to splinesSpringer-VerlagNew York1978

Other (13)

T. C. Bristow, A. Bouzid, and J. BietrySurface measurements and applications for manufactured parts using noncontact profilometerProc. SPIE1989954217226

B. BoweWhite light interferometric surface profilerOpt. Eng.1998371796

P. de Groot and L. DeckSurface profiling by analysis of white-light interferograms in the spatial frequency domainJ. Mod. Opt.199542389401

K. Creath and J. C. WyantAbsolute measurement of surface roughnessAppl. Opt.19902938233827

P. J. CaberInterferometric profiler for rough surfacesAppl. Opt.1993323438

R. Windecker and H. J. TizianiOptical roughness measurements using extended white-light interferometryOpt. Eng.19993810811087

F. Gao and R. LeachSurface measurement errors using commercial scanning white light interferometersMeas. Sci. Technol.20081913

D. MalacaraOptical Shop TestingJohn Wiley & Sons200759

H.-G. Rhee, Y.-W. Lee, I.-W. Lee, and T. V. VorburgerRoughness measurement performance obtained with optical interferometry and stylus methoJ. Opt. Soc. Korea2006104854

V. G. Badami, J. Liesener, C. J. Evans, and P. De GrootEvaluation of the measurement performance of a coherence scanning microscope using roughness specimensProc. ASPE Annual MeetingDenver, CO, USA2011Nov.2326

A. Harasaki, J. Schmit, and J. C. WyantImproved vertical-scanning interferometryAppl. Opt.20003921072115

K. G. LarkinEfficient nonlinear algorithm for envelope detection in white light interferometryJ. Opt. Soc. Am. A199613832

Carl DE BOORA practical guide to splinesSpringer-VerlagNew York1978

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