A new removal optimization method called submerged jet polishing (SJP) is reported. Experiments are conducted to obtain the removal shape. Results of SJP indicate that a Gaussian shape removal function can be obtained and that the removal rate is sensitive to variations in the standoff distance. SJP is applied to the corrective figuring of a BK7 optical glass. The flatness is improved from photovolatic (PV) 0.066 \lambda to 0.024 \lambda (\lambda=632.8 nm) after three iterations, and the root mean square (RMS) value is improved from 0.013 \lambda to 0.00395 \lambda. The experimental result indicates that SJP has a capability for ultra-precision figuring and can be applied in polishing complex-shaped surfaces.
© 2011 Chinese Optics LettersPDF Article
Y. Chen and H. A. Haus
Opt. Lett. 16(23) 1841-1843 (1991)
D. T. Gavel, R. G. Vernon, and J. R. Morris
J. Opt. Soc. Am. A 30(12) 2482-2501 (2013)
Vincent Ricardo Daria and Caesar Saloma
Appl. Opt. 40(11) 1767-1775 (2001)