Abstract

A back-illuminated mesa-structure InGaAs/InP charge-compensated uni-traveling-carrier (UTC) photodiode (PD) is fabricated, and its saturation characteristics are investigated. The responsivity of the 40-\mu m-diameter PD is as high as 0.83 A/W, and the direct current (DC) saturation current is up to 275 mA. The 1-dB compression point at the 3-dB cutoff frequency of 9 GHz is measured to be 100 mA, corresponding to an output radio frequency (RF) power of up to 20.1 dBm. According to the calculated electric field distributions in the depleted region under both DC and alternating current (AC) conditions, the saturation of the UTC-PD is caused by complete field screening at high optical injection levels.

© 2011 Chinese Optics Letters

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J. Shi, F. Kuo, C. Wu, C. Chang, C. Liu, C. Chen, and J. Chyi, IEEE J. Quantum Electron. 46, 80 (2010).

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J.-W. Shi, Y.-S. Wu, C.-Y. Wu, P.-H. Chiu, and C.-C. Hong, IEEE Photon. Technol. Lett. 17, 1929 (2005).

Y. Huang, C. Huang, Q. Wang, H. Huang, X. Wang, and X. Ren, Chin. Opt. Lett. 3, 53 (2005).

2004

N. Li, X. Li, S. Dimiguel, X. Zheng, J. Campbell, D. Tulchinsky, K. Williams, T. Isshiki, G. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

N. Li, X. Li, S. Demiguel, X. Zheng, J. C. Campbell, D. A. Tulchinsky, K. J.Williams, T. D. Isshiki, G. S. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

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X. Li, N. Li, X. Zheng, S. Demiguel, J. C. Campbell, D. Tulchinsky, and K. J. Williams, IEEE Photon. Technol. Lett. 15, 1276 (2003).

C. Sun, J. Zhou, B. Xiong, J. Wang, and Y. Luo, Chin. Phys. Lett. 20, 1312 (2003).

2002

S. Demiguel, L. Giraudet, L. Joulaud, J. Decobert, F. Blache, V. Coup'e, F. Jorge, P. Pagnod-Rossiaux, E. Boucherez, M. Achouche, and F. Devaux, IEEE J. Lightwave Technol. 20, 2004 (2002).

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S. Demiguel, L. Giraudet, L. Joulaud, J. Decobert, F. Blache, V. Coup'e, F. Jorge, P. Pagnod-Rossiaux, E. Boucherez, M. Achouche, and F. Devaux, IEEE J. Lightwave Technol. 20, 2004 (2002).

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S. Demiguel, L. Giraudet, L. Joulaud, J. Decobert, F. Blache, V. Coup'e, F. Jorge, P. Pagnod-Rossiaux, E. Boucherez, M. Achouche, and F. Devaux, IEEE J. Lightwave Technol. 20, 2004 (2002).

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S. Demiguel, L. Giraudet, L. Joulaud, J. Decobert, F. Blache, V. Coup'e, F. Jorge, P. Pagnod-Rossiaux, E. Boucherez, M. Achouche, and F. Devaux, IEEE J. Lightwave Technol. 20, 2004 (2002).

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X. Wang, N. Duan, H. Chen, and J. Campbell, IEEE Photon. Technol. Lett. 19, 1272 (2007).

N. Li, X. Li, S. Dimiguel, X. Zheng, J. Campbell, D. Tulchinsky, K. Williams, T. Isshiki, G. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

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N. Li, X. Li, S. Demiguel, X. Zheng, J. C. Campbell, D. A. Tulchinsky, K. J.Williams, T. D. Isshiki, G. S. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

X. Li, N. Li, X. Zheng, S. Demiguel, J. C. Campbell, D. Tulchinsky, and K. J. Williams, IEEE Photon. Technol. Lett. 15, 1276 (2003).

Chang, C.

J. Shi, F. Kuo, C. Wu, C. Chang, C. Liu, C. Chen, and J. Chyi, IEEE J. Quantum Electron. 46, 80 (2010).

Chang, Q.

Chen, C.

J. Shi, F. Kuo, C. Wu, C. Chang, C. Liu, C. Chen, and J. Chyi, IEEE J. Quantum Electron. 46, 80 (2010).

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T. Wang, H. Chen, S. Xie, B. Hraimel, L. Ma, and X. Zhang, Chin. Opt. Lett. 8, 1037 (2010).

X. Wang, N. Duan, H. Chen, and J. Campbell, IEEE Photon. Technol. Lett. 19, 1272 (2007).

Chiu, P.-H.

J.-W. Shi, Y.-S. Wu, C.-Y. Wu, P.-H. Chiu, and C.-C. Hong, IEEE Photon. Technol. Lett. 17, 1929 (2005).

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J. Shi, F. Kuo, C. Wu, C. Chang, C. Liu, C. Chen, and J. Chyi, IEEE J. Quantum Electron. 46, 80 (2010).

Coup'e, V.

S. Demiguel, L. Giraudet, L. Joulaud, J. Decobert, F. Blache, V. Coup'e, F. Jorge, P. Pagnod-Rossiaux, E. Boucherez, M. Achouche, and F. Devaux, IEEE J. Lightwave Technol. 20, 2004 (2002).

Decobert, J.

S. Demiguel, L. Giraudet, L. Joulaud, J. Decobert, F. Blache, V. Coup'e, F. Jorge, P. Pagnod-Rossiaux, E. Boucherez, M. Achouche, and F. Devaux, IEEE J. Lightwave Technol. 20, 2004 (2002).

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N. Li, X. Li, S. Demiguel, X. Zheng, J. C. Campbell, D. A. Tulchinsky, K. J.Williams, T. D. Isshiki, G. S. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

X. Li, N. Li, X. Zheng, S. Demiguel, J. C. Campbell, D. Tulchinsky, and K. J. Williams, IEEE Photon. Technol. Lett. 15, 1276 (2003).

S. Demiguel, L. Giraudet, L. Joulaud, J. Decobert, F. Blache, V. Coup'e, F. Jorge, P. Pagnod-Rossiaux, E. Boucherez, M. Achouche, and F. Devaux, IEEE J. Lightwave Technol. 20, 2004 (2002).

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S. Demiguel, L. Giraudet, L. Joulaud, J. Decobert, F. Blache, V. Coup'e, F. Jorge, P. Pagnod-Rossiaux, E. Boucherez, M. Achouche, and F. Devaux, IEEE J. Lightwave Technol. 20, 2004 (2002).

Dimiguel, S.

N. Li, X. Li, S. Dimiguel, X. Zheng, J. Campbell, D. Tulchinsky, K. Williams, T. Isshiki, G. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

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X. Wang, N. Duan, H. Chen, and J. Campbell, IEEE Photon. Technol. Lett. 19, 1272 (2007).

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F. J. Effenberger and A. M. Joshi, IEEE J. Lightwave Technol. 14, 1859 (1996).

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K. J. Williams and R. D. Esmans, IEEE J. Lightwave Technol. 7, 1443 (1999).

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S. Demiguel, L. Giraudet, L. Joulaud, J. Decobert, F. Blache, V. Coup'e, F. Jorge, P. Pagnod-Rossiaux, E. Boucherez, M. Achouche, and F. Devaux, IEEE J. Lightwave Technol. 20, 2004 (2002).

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III, C. H. Cox

C. H. Cox III, E. I. Ackerman, G. E. Betts, and J. L. Prince, IEEE Trans. Microwave Theory Tech. 54, 906 (2006).

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N. Li, X. Li, S. Dimiguel, X. Zheng, J. Campbell, D. Tulchinsky, K. Williams, T. Isshiki, G. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

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N. Li, X. Li, S. Demiguel, X. Zheng, J. C. Campbell, D. A. Tulchinsky, K. J.Williams, T. D. Isshiki, G. S. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

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N. Li, X. Li, S. Demiguel, X. Zheng, J. C. Campbell, D. A. Tulchinsky, K. J.Williams, T. D. Isshiki, G. S. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

Jorge, F.

S. Demiguel, L. Giraudet, L. Joulaud, J. Decobert, F. Blache, V. Coup'e, F. Jorge, P. Pagnod-Rossiaux, E. Boucherez, M. Achouche, and F. Devaux, IEEE J. Lightwave Technol. 20, 2004 (2002).

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F. J. Effenberger and A. M. Joshi, IEEE J. Lightwave Technol. 14, 1859 (1996).

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S. Demiguel, L. Giraudet, L. Joulaud, J. Decobert, F. Blache, V. Coup'e, F. Jorge, P. Pagnod-Rossiaux, E. Boucherez, M. Achouche, and F. Devaux, IEEE J. Lightwave Technol. 20, 2004 (2002).

Kinsey, G.

N. Li, X. Li, S. Dimiguel, X. Zheng, J. Campbell, D. Tulchinsky, K. Williams, T. Isshiki, G. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

Kinsey, G. S.

N. Li, X. Li, S. Demiguel, X. Zheng, J. C. Campbell, D. A. Tulchinsky, K. J.Williams, T. D. Isshiki, G. S. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

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J. Shi, F. Kuo, C. Wu, C. Chang, C. Liu, C. Chen, and J. Chyi, IEEE J. Quantum Electron. 46, 80 (2010).

Li, N.

N. Li, X. Li, S. Dimiguel, X. Zheng, J. Campbell, D. Tulchinsky, K. Williams, T. Isshiki, G. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

N. Li, X. Li, S. Demiguel, X. Zheng, J. C. Campbell, D. A. Tulchinsky, K. J.Williams, T. D. Isshiki, G. S. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

X. Li, N. Li, X. Zheng, S. Demiguel, J. C. Campbell, D. Tulchinsky, and K. J. Williams, IEEE Photon. Technol. Lett. 15, 1276 (2003).

Li, X.

N. Li, X. Li, S. Dimiguel, X. Zheng, J. Campbell, D. Tulchinsky, K. Williams, T. Isshiki, G. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

N. Li, X. Li, S. Demiguel, X. Zheng, J. C. Campbell, D. A. Tulchinsky, K. J.Williams, T. D. Isshiki, G. S. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

X. Li, N. Li, X. Zheng, S. Demiguel, J. C. Campbell, D. Tulchinsky, and K. J. Williams, IEEE Photon. Technol. Lett. 15, 1276 (2003).

Liu, C.

J. Shi, F. Kuo, C. Wu, C. Chang, C. Liu, C. Chen, and J. Chyi, IEEE J. Quantum Electron. 46, 80 (2010).

Luo, Y.

C. Sun, J. Zhou, B. Xiong, J. Wang, and Y. Luo, Chin. Phys. Lett. 20, 1312 (2003).

Ma, L.

Pagnod-Rossiaux, P.

S. Demiguel, L. Giraudet, L. Joulaud, J. Decobert, F. Blache, V. Coup'e, F. Jorge, P. Pagnod-Rossiaux, E. Boucherez, M. Achouche, and F. Devaux, IEEE J. Lightwave Technol. 20, 2004 (2002).

Prince, J. L.

C. H. Cox III, E. I. Ackerman, G. E. Betts, and J. L. Prince, IEEE Trans. Microwave Theory Tech. 54, 906 (2006).

Ren, X.

Seeds, A. J.

A. J. Seeds and K. J. Williams, IEEE J. Lightwave Technol. 24, 4628 (2006).

Shi, J.

J. Shi, F. Kuo, C. Wu, C. Chang, C. Liu, C. Chen, and J. Chyi, IEEE J. Quantum Electron. 46, 80 (2010).

Shi, J.-W.

J.-W. Shi, Y.-S. Wu, C.-Y. Wu, P.-H. Chiu, and C.-C. Hong, IEEE Photon. Technol. Lett. 17, 1929 (2005).

Su, Y.

Sudharsansan, R.

N. Li, X. Li, S. Dimiguel, X. Zheng, J. Campbell, D. Tulchinsky, K. Williams, T. Isshiki, G. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

N. Li, X. Li, S. Demiguel, X. Zheng, J. C. Campbell, D. A. Tulchinsky, K. J.Williams, T. D. Isshiki, G. S. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

Sun, C.

C. Sun, J. Zhou, B. Xiong, J. Wang, and Y. Luo, Chin. Phys. Lett. 20, 1312 (2003).

Tulchinsky, D.

N. Li, X. Li, S. Dimiguel, X. Zheng, J. Campbell, D. Tulchinsky, K. Williams, T. Isshiki, G. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

X. Li, N. Li, X. Zheng, S. Demiguel, J. C. Campbell, D. Tulchinsky, and K. J. Williams, IEEE Photon. Technol. Lett. 15, 1276 (2003).

Tulchinsky, D. A.

N. Li, X. Li, S. Demiguel, X. Zheng, J. C. Campbell, D. A. Tulchinsky, K. J.Williams, T. D. Isshiki, G. S. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

Wang, J.

C. Sun, J. Zhou, B. Xiong, J. Wang, and Y. Luo, Chin. Phys. Lett. 20, 1312 (2003).

Wang, Q.

Wang, T.

Wang, X.

X. Wang, N. Duan, H. Chen, and J. Campbell, IEEE Photon. Technol. Lett. 19, 1272 (2007).

Y. Huang, C. Huang, Q. Wang, H. Huang, X. Wang, and X. Ren, Chin. Opt. Lett. 3, 53 (2005).

Williams, K.

N. Li, X. Li, S. Dimiguel, X. Zheng, J. Campbell, D. Tulchinsky, K. Williams, T. Isshiki, G. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

Williams, K. J.

A. J. Seeds and K. J. Williams, IEEE J. Lightwave Technol. 24, 4628 (2006).

X. Li, N. Li, X. Zheng, S. Demiguel, J. C. Campbell, D. Tulchinsky, and K. J. Williams, IEEE Photon. Technol. Lett. 15, 1276 (2003).

K. J. Williams and R. D. Esmans, IEEE J. Lightwave Technol. 7, 1443 (1999).

Wu, C.

J. Shi, F. Kuo, C. Wu, C. Chang, C. Liu, C. Chen, and J. Chyi, IEEE J. Quantum Electron. 46, 80 (2010).

Wu, C.-Y.

J.-W. Shi, Y.-S. Wu, C.-Y. Wu, P.-H. Chiu, and C.-C. Hong, IEEE Photon. Technol. Lett. 17, 1929 (2005).

Wu, Y.-S.

J.-W. Shi, Y.-S. Wu, C.-Y. Wu, P.-H. Chiu, and C.-C. Hong, IEEE Photon. Technol. Lett. 17, 1929 (2005).

Xie, S.

Xiong, B.

C. Sun, J. Zhou, B. Xiong, J. Wang, and Y. Luo, Chin. Phys. Lett. 20, 1312 (2003).

Zhang, X.

Zheng, X.

N. Li, X. Li, S. Dimiguel, X. Zheng, J. Campbell, D. Tulchinsky, K. Williams, T. Isshiki, G. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

N. Li, X. Li, S. Demiguel, X. Zheng, J. C. Campbell, D. A. Tulchinsky, K. J.Williams, T. D. Isshiki, G. S. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

X. Li, N. Li, X. Zheng, S. Demiguel, J. C. Campbell, D. Tulchinsky, and K. J. Williams, IEEE Photon. Technol. Lett. 15, 1276 (2003).

Zhou, J.

C. Sun, J. Zhou, B. Xiong, J. Wang, and Y. Luo, Chin. Phys. Lett. 20, 1312 (2003).

Chin. Opt. Lett.

Chin. Phys. Lett.

C. Sun, J. Zhou, B. Xiong, J. Wang, and Y. Luo, Chin. Phys. Lett. 20, 1312 (2003).

IEEE J. Lightwave Technol.

S. Demiguel, L. Giraudet, L. Joulaud, J. Decobert, F. Blache, V. Coup'e, F. Jorge, P. Pagnod-Rossiaux, E. Boucherez, M. Achouche, and F. Devaux, IEEE J. Lightwave Technol. 20, 2004 (2002).

A. J. Seeds and K. J. Williams, IEEE J. Lightwave Technol. 24, 4628 (2006).

F. J. Effenberger and A. M. Joshi, IEEE J. Lightwave Technol. 14, 1859 (1996).

K. J. Williams and R. D. Esmans, IEEE J. Lightwave Technol. 7, 1443 (1999).

IEEE J. Quantum Electron.

J. Shi, F. Kuo, C. Wu, C. Chang, C. Liu, C. Chen, and J. Chyi, IEEE J. Quantum Electron. 46, 80 (2010).

IEEE Photon. Technol. Lett.

N. Li, X. Li, S. Demiguel, X. Zheng, J. C. Campbell, D. A. Tulchinsky, K. J.Williams, T. D. Isshiki, G. S. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

X. Li, N. Li, X. Zheng, S. Demiguel, J. C. Campbell, D. Tulchinsky, and K. J. Williams, IEEE Photon. Technol. Lett. 15, 1276 (2003).

X. Wang, N. Duan, H. Chen, and J. Campbell, IEEE Photon. Technol. Lett. 19, 1272 (2007).

N. Li, X. Li, S. Dimiguel, X. Zheng, J. Campbell, D. Tulchinsky, K. Williams, T. Isshiki, G. Kinsey, and R. Sudharsansan, IEEE Photon. Technol. Lett. 16, 864 (2004).

J.-W. Shi, Y.-S. Wu, C.-Y. Wu, P.-H. Chiu, and C.-C. Hong, IEEE Photon. Technol. Lett. 17, 1929 (2005).

IEEE Trans. Microwave Theory Tech.

C. H. Cox III, E. I. Ackerman, G. E. Betts, and J. L. Prince, IEEE Trans. Microwave Theory Tech. 54, 906 (2006).

Other

A. Beling, H. Pan, H. Chen, and J. Campbell, in Proceedings of IEEE MTT-S Int. 499 (2008).

T. Ishibashi, N. Shimizu, S. Kodama, H. Ito, T. Nagatsuma, and T. Furuta, in Proceedings of Ultrafast Electon. Optoelectron'97 Conference 83 (1997).

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