Abstract

The long trace profiler (LTP) is proposed to measure radius of curvature (R) and surface figure of a longradius spherical surface in an optical shop. Equipped with a motorized rotary stage and a two-dimensional tilt stage, the LTP scans the full aperture and calculates the absolute radius of curvature of each scanning line based on the least square method. Nonlinear error and manufacture error difference between center and the edge are obtained by comparing R results. The R-limit is validated and expressed as D/R, where D is the aperture of the mirror under test. A full-aperture three-dimensional figure is also reconstructed based on triangle interpolation.

© 2011 Chinese Optics Letters

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References

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  1. D. Malacara, Optical Shop Testing (John Wiley and Sons, Inc., New York, 1979).
  2. P. Z. Takacs, E. L. Church, C. J. Bresloff, and L. Assoufid, Appl. Opt. 38, 5468 (1999).
  3. S. Qian, Q. Wang, Y. Hong, and Peter Takacs, Proc. SPIE 5921, 592104 (2005).
  4. K. von Bieren, Appl. Opt. 22, 2109 (1983).
  5. K. von Bieren, Proc. SPIE 343, 101 (1982).
  6. S. Qian and P. Takacs, Opt. Eng. 46, 043602 (2007).
  7. C. Zhou, H. Li, C. Chen, and C. Zhou, Proc. SPIE 6024, 60241M (2005).

2007 (1)

S. Qian and P. Takacs, Opt. Eng. 46, 043602 (2007).

2005 (2)

C. Zhou, H. Li, C. Chen, and C. Zhou, Proc. SPIE 6024, 60241M (2005).

S. Qian, Q. Wang, Y. Hong, and Peter Takacs, Proc. SPIE 5921, 592104 (2005).

1999 (1)

1983 (1)

1982 (1)

K. von Bieren, Proc. SPIE 343, 101 (1982).

Assoufid, L.

Bieren, K. von

K. von Bieren, Appl. Opt. 22, 2109 (1983).

K. von Bieren, Proc. SPIE 343, 101 (1982).

Bresloff, C. J.

Chen, C.

C. Zhou, H. Li, C. Chen, and C. Zhou, Proc. SPIE 6024, 60241M (2005).

Church, E. L.

Hong, Y.

S. Qian, Q. Wang, Y. Hong, and Peter Takacs, Proc. SPIE 5921, 592104 (2005).

Li, H.

C. Zhou, H. Li, C. Chen, and C. Zhou, Proc. SPIE 6024, 60241M (2005).

Qian, S.

S. Qian and P. Takacs, Opt. Eng. 46, 043602 (2007).

S. Qian, Q. Wang, Y. Hong, and Peter Takacs, Proc. SPIE 5921, 592104 (2005).

Takacs, P.

S. Qian and P. Takacs, Opt. Eng. 46, 043602 (2007).

Takacs, P. Z.

Takacs, Peter

S. Qian, Q. Wang, Y. Hong, and Peter Takacs, Proc. SPIE 5921, 592104 (2005).

Wang, Q.

S. Qian, Q. Wang, Y. Hong, and Peter Takacs, Proc. SPIE 5921, 592104 (2005).

Zhou, C.

C. Zhou, H. Li, C. Chen, and C. Zhou, Proc. SPIE 6024, 60241M (2005).

C. Zhou, H. Li, C. Chen, and C. Zhou, Proc. SPIE 6024, 60241M (2005).

Appl. Opt. (2)

Opt. Eng. (1)

S. Qian and P. Takacs, Opt. Eng. 46, 043602 (2007).

Proc. SPIE (3)

C. Zhou, H. Li, C. Chen, and C. Zhou, Proc. SPIE 6024, 60241M (2005).

K. von Bieren, Proc. SPIE 343, 101 (1982).

S. Qian, Q. Wang, Y. Hong, and Peter Takacs, Proc. SPIE 5921, 592104 (2005).

Other (1)

D. Malacara, Optical Shop Testing (John Wiley and Sons, Inc., New York, 1979).

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