A non-scanning, non-interferometric, three-dimensional (3D) optical profilometer based on geometric optics, critical angle principle, and the use of a charge-coupled device (CCD) camera is presented. The surface profile of the test specimen can be transferred into the reflectance profile. The reflectance profile, obtained from a CCD, is the ratio of the intensity at the critical angle to the intensity obtained at the total internal reflection angle. The optical profilometer provides a sub-micron measuring range with nanometer resolution and can be used to measure roughness or surface defects in real time.

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1985 (1)

1982 (1)

Aslund, N.

Booth, M. J.

Botcherby, E. J.

Carlsson, K.

Chan, Y.-S.

Chim, S. S. C.

Chiu, M.-H.

Danielsson, P. E.

Fainman, Y.

Gauderon, R.

Groot, P. de

Huang, P. S.

Ju?skaitis, R.

Kino, G. S.

Kohno, T.

Lee, C. H.

Lenz, E.

Lenz, R.

Li, G.

Liljeborg, A.

Lin, D.

Lin, P.

Lin, W. C.

Lin, Z.-C.

Liu, Z.

Lukins, P. B.

Majlof, L.

Miyamoto, K.

Mong, H. Y.

Musha, T.

Neumaier, K. R.

Ni, J.

Ozawa, N.

Sackmann, E.

Shamir, J.

Sun, P.

Taflove, A.

Tan, C.-T.

Vasilyeva, E.

Wiegand, G.

Wilson, T.

Xu, Y.

Yan, J.

Yin, C.

Zhang, R.

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