A non-scanning, non-interferometric, three-dimensional (3D) optical profilometer based on geometric optics, critical angle principle, and the use of a charge-coupled device (CCD) camera is presented. The surface profile of the test specimen can be transferred into the reflectance profile. The reflectance profile, obtained from a CCD, is the ratio of the intensity at the critical angle to the intensity obtained at the total internal reflection angle. The optical profilometer provides a sub-micron measuring range with nanometer resolution and can be used to measure roughness or surface defects in real time.

© 2011 Chinese Optics Letters

PDF Article


  • View by:
  • |
  • |
  • |

  1. K. Carlsson, P. E. Danielsson, R. Lenz, A. Liljeborg, L. Majlof, and N. Aslund, Opt. Lett. 10, 53 (1985).
  2. D. Lin, Z. Liu, R. Zhang, J. Yan, C. Yin, and Y. Xu, Appl. Opt. 43, 1472 (2004).
  3. E. J. Botcherby, M. J. Booth, R. Ju?skaitis, and T. Wilson, Opt. Lett. 34, 1504 (2009).
  4. E. Vasilyeva and A. Taflove, Opt. Lett. 23, 1155 (1998).
  5. Y. Fainman, E. Lenz, and J. Shamir, Appl. Opt. 21, 3200 (1982).
  6. C. H. Lee, H. Y. Mong, and W. C. Lin, Opt. Lett. 27, 1773 (2002).
  7. G. Li, P. Sun, P. Lin, and Y. Fainman, Opt. Lett. 25, 1505 (2000).
  8. P. de Groot, Appl. Opt. 45, 5840 (2006).
  9. G. Wiegand, K. R. Neumaier, and E. Sackmann, Appl. Opt. 37, 6892 (1998).
  10. S. S. C. Chim and G. S. Kino, Appl. Opt. 31, 2550 (1992).
  11. R. Gauderon and P. B. Lukins, Opt. Lett. 23, 1209 (1998).
  12. T. Kohno, N. Ozawa, K. Miyamoto, and T. Musha, Appl. Opt. 27, 103 (1988).
  13. P. S. Huang and J. Ni, Appl. Opt. 34, 4976 (1995).
  14. C.-T. Tan, Y.-S. Chan, Z.-C. Lin, and M.-H. Chiu, Chin. Opt. Lett. 9, 011201 (2011).

2011 (1)

2009 (1)

2006 (1)

2004 (1)

2002 (1)

2000 (1)

1998 (3)

1995 (1)

1992 (1)

1988 (1)

1985 (1)

1982 (1)

Aslund, N.

Booth, M. J.

Botcherby, E. J.

Carlsson, K.

Chan, Y.-S.

Chim, S. S. C.

Chiu, M.-H.

Danielsson, P. E.

Fainman, Y.

Gauderon, R.

Groot, P. de

Huang, P. S.

Ju?skaitis, R.

Kino, G. S.

Kohno, T.

Lee, C. H.

Lenz, E.

Lenz, R.

Li, G.

Liljeborg, A.

Lin, D.

Lin, P.

Lin, W. C.

Lin, Z.-C.

Liu, Z.

Lukins, P. B.

Majlof, L.

Miyamoto, K.

Mong, H. Y.

Musha, T.

Neumaier, K. R.

Ni, J.

Ozawa, N.

Sackmann, E.

Shamir, J.

Sun, P.

Taflove, A.

Tan, C.-T.

Vasilyeva, E.

Wiegand, G.

Wilson, T.

Xu, Y.

Yan, J.

Yin, C.

Zhang, R.

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.