Abstract

The enlargement of the emitting aperture is usually one of the important methods of increasing verticalcavity surface-emitting laser (VCSEL) optical output power. However, in a VCSEL with a larger aperture, the inhomogeneity in the injected current often causes inhomogeneous or even no emission. To solve this problem and to increase VCSEL output power, as well as to improve its thermal characteristics, we develop a new type of injected VCSEL with a larger aperture and a reticular electrode, where the conventional circular injection electrode of the P side is turned into a reticular one, and the heat sink is on the N side. The tests of the new VCSEL show an improvement in homogeneity in not only the injected current but also the emission intensity. The optical output power is also considerably increased, and the device optoelectronic performance is improved.

© 2010 Chinese Optics Letters

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  1. X. Li and J. Cheng, Transactions of Beijing Institute of Technology (in Chinese) 25, 71 (2005).
  2. T. Li, Y. Ning, Y. Sun, J. Cui, L. Qin, C. Yan, Y. Zhang, B. Peng, G. Liu, Y. Liu, and L. Wang, Chin. Opt. Lett. 5, S156 (2007).
  3. J. Cui, Y. Ning, T. Zhang, P. Kong, G. Liu, X. Zhang, Z. Wang, J. Shi, T. Li, L. Qin, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1941 (2009).
  4. T. Miyamoto, T. Nishina, Y. Kashihara, S. Ishida, and F. Koyama, Jpn. J. Appl. Phys. 47, 6772 (2008).
  5. J. Wu, H. D. Summers, and G. Iordache, in Proceedings of CLEO 2001 CTuM22 (2001).
  6. A. Mooradian, S. Antikichev, B. Cantos, G. Carey, M. Jansen, S. Hallstein, W. Hitchens, D. Lee, J.-M. Pelaprat, R. Nabiev, G. Niven, A. Shchegrov, A. Umbrasas, and J. Watson, in Proceedings of MOC'09 M1 (2005).
  7. T. Li, Y. Ning, Y. Sun, J. Cui, E. Hao, L. Qin, G. Tao, Y. Liu, L. Wang, D. Cui, and Z. Xu, Chinese J. Lasers (in Chinese) 34, 641 (2007).
  8. Z. Qiao, B. Bo, Y. Yao, X. Gao, J. Zhang, Y. Wang, C. Liu, P. Lu, H. Li, and Y. Qu, Chinese J. Lasers (in Chinese) 36, 2277 (2009).
  9. J.-F. Seurin, C. L. Ghosh, V. Khalfin, A. Miglo, G. Xu, J. D. Wynn, P. Pradhan, and L. A. D.Asaro, Proc. SPIE 6908, 690808 (2008).
  10. K. L. Lear, S. P. Kilcoyne, and S. A. Chalmers, IEEE Photon. Technol. Lett. 6, 778 (1994).

2009 (2)

J. Cui, Y. Ning, T. Zhang, P. Kong, G. Liu, X. Zhang, Z. Wang, J. Shi, T. Li, L. Qin, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1941 (2009).

Z. Qiao, B. Bo, Y. Yao, X. Gao, J. Zhang, Y. Wang, C. Liu, P. Lu, H. Li, and Y. Qu, Chinese J. Lasers (in Chinese) 36, 2277 (2009).

2008 (2)

J.-F. Seurin, C. L. Ghosh, V. Khalfin, A. Miglo, G. Xu, J. D. Wynn, P. Pradhan, and L. A. D.Asaro, Proc. SPIE 6908, 690808 (2008).

T. Miyamoto, T. Nishina, Y. Kashihara, S. Ishida, and F. Koyama, Jpn. J. Appl. Phys. 47, 6772 (2008).

2007 (2)

T. Li, Y. Ning, Y. Sun, J. Cui, E. Hao, L. Qin, G. Tao, Y. Liu, L. Wang, D. Cui, and Z. Xu, Chinese J. Lasers (in Chinese) 34, 641 (2007).

T. Li, Y. Ning, Y. Sun, J. Cui, L. Qin, C. Yan, Y. Zhang, B. Peng, G. Liu, Y. Liu, and L. Wang, Chin. Opt. Lett. 5, S156 (2007).

2005 (1)

X. Li and J. Cheng, Transactions of Beijing Institute of Technology (in Chinese) 25, 71 (2005).

1994 (1)

K. L. Lear, S. P. Kilcoyne, and S. A. Chalmers, IEEE Photon. Technol. Lett. 6, 778 (1994).

Bo, B.

Z. Qiao, B. Bo, Y. Yao, X. Gao, J. Zhang, Y. Wang, C. Liu, P. Lu, H. Li, and Y. Qu, Chinese J. Lasers (in Chinese) 36, 2277 (2009).

Chalmers, S. A.

K. L. Lear, S. P. Kilcoyne, and S. A. Chalmers, IEEE Photon. Technol. Lett. 6, 778 (1994).

Cheng, J.

X. Li and J. Cheng, Transactions of Beijing Institute of Technology (in Chinese) 25, 71 (2005).

Cui, D.

T. Li, Y. Ning, Y. Sun, J. Cui, E. Hao, L. Qin, G. Tao, Y. Liu, L. Wang, D. Cui, and Z. Xu, Chinese J. Lasers (in Chinese) 34, 641 (2007).

Cui, J.

J. Cui, Y. Ning, T. Zhang, P. Kong, G. Liu, X. Zhang, Z. Wang, J. Shi, T. Li, L. Qin, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1941 (2009).

T. Li, Y. Ning, Y. Sun, J. Cui, L. Qin, C. Yan, Y. Zhang, B. Peng, G. Liu, Y. Liu, and L. Wang, Chin. Opt. Lett. 5, S156 (2007).

T. Li, Y. Ning, Y. Sun, J. Cui, E. Hao, L. Qin, G. Tao, Y. Liu, L. Wang, D. Cui, and Z. Xu, Chinese J. Lasers (in Chinese) 34, 641 (2007).

D.Asaro, L. A.

J.-F. Seurin, C. L. Ghosh, V. Khalfin, A. Miglo, G. Xu, J. D. Wynn, P. Pradhan, and L. A. D.Asaro, Proc. SPIE 6908, 690808 (2008).

Gao, X.

Z. Qiao, B. Bo, Y. Yao, X. Gao, J. Zhang, Y. Wang, C. Liu, P. Lu, H. Li, and Y. Qu, Chinese J. Lasers (in Chinese) 36, 2277 (2009).

Ghosh, C. L.

J.-F. Seurin, C. L. Ghosh, V. Khalfin, A. Miglo, G. Xu, J. D. Wynn, P. Pradhan, and L. A. D.Asaro, Proc. SPIE 6908, 690808 (2008).

Hao, E.

T. Li, Y. Ning, Y. Sun, J. Cui, E. Hao, L. Qin, G. Tao, Y. Liu, L. Wang, D. Cui, and Z. Xu, Chinese J. Lasers (in Chinese) 34, 641 (2007).

Ishida, S.

T. Miyamoto, T. Nishina, Y. Kashihara, S. Ishida, and F. Koyama, Jpn. J. Appl. Phys. 47, 6772 (2008).

Kashihara, Y.

T. Miyamoto, T. Nishina, Y. Kashihara, S. Ishida, and F. Koyama, Jpn. J. Appl. Phys. 47, 6772 (2008).

Khalfin, V.

J.-F. Seurin, C. L. Ghosh, V. Khalfin, A. Miglo, G. Xu, J. D. Wynn, P. Pradhan, and L. A. D.Asaro, Proc. SPIE 6908, 690808 (2008).

Kilcoyne, S. P.

K. L. Lear, S. P. Kilcoyne, and S. A. Chalmers, IEEE Photon. Technol. Lett. 6, 778 (1994).

Kong, P.

J. Cui, Y. Ning, T. Zhang, P. Kong, G. Liu, X. Zhang, Z. Wang, J. Shi, T. Li, L. Qin, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1941 (2009).

Koyama, F.

T. Miyamoto, T. Nishina, Y. Kashihara, S. Ishida, and F. Koyama, Jpn. J. Appl. Phys. 47, 6772 (2008).

Lear, K. L.

K. L. Lear, S. P. Kilcoyne, and S. A. Chalmers, IEEE Photon. Technol. Lett. 6, 778 (1994).

Li, H.

Z. Qiao, B. Bo, Y. Yao, X. Gao, J. Zhang, Y. Wang, C. Liu, P. Lu, H. Li, and Y. Qu, Chinese J. Lasers (in Chinese) 36, 2277 (2009).

Li, T.

J. Cui, Y. Ning, T. Zhang, P. Kong, G. Liu, X. Zhang, Z. Wang, J. Shi, T. Li, L. Qin, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1941 (2009).

T. Li, Y. Ning, Y. Sun, J. Cui, E. Hao, L. Qin, G. Tao, Y. Liu, L. Wang, D. Cui, and Z. Xu, Chinese J. Lasers (in Chinese) 34, 641 (2007).

T. Li, Y. Ning, Y. Sun, J. Cui, L. Qin, C. Yan, Y. Zhang, B. Peng, G. Liu, Y. Liu, and L. Wang, Chin. Opt. Lett. 5, S156 (2007).

Li, X.

X. Li and J. Cheng, Transactions of Beijing Institute of Technology (in Chinese) 25, 71 (2005).

Liu, C.

Z. Qiao, B. Bo, Y. Yao, X. Gao, J. Zhang, Y. Wang, C. Liu, P. Lu, H. Li, and Y. Qu, Chinese J. Lasers (in Chinese) 36, 2277 (2009).

Liu, G.

J. Cui, Y. Ning, T. Zhang, P. Kong, G. Liu, X. Zhang, Z. Wang, J. Shi, T. Li, L. Qin, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1941 (2009).

T. Li, Y. Ning, Y. Sun, J. Cui, L. Qin, C. Yan, Y. Zhang, B. Peng, G. Liu, Y. Liu, and L. Wang, Chin. Opt. Lett. 5, S156 (2007).

Liu, Y.

J. Cui, Y. Ning, T. Zhang, P. Kong, G. Liu, X. Zhang, Z. Wang, J. Shi, T. Li, L. Qin, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1941 (2009).

T. Li, Y. Ning, Y. Sun, J. Cui, L. Qin, C. Yan, Y. Zhang, B. Peng, G. Liu, Y. Liu, and L. Wang, Chin. Opt. Lett. 5, S156 (2007).

T. Li, Y. Ning, Y. Sun, J. Cui, E. Hao, L. Qin, G. Tao, Y. Liu, L. Wang, D. Cui, and Z. Xu, Chinese J. Lasers (in Chinese) 34, 641 (2007).

Lu, P.

Z. Qiao, B. Bo, Y. Yao, X. Gao, J. Zhang, Y. Wang, C. Liu, P. Lu, H. Li, and Y. Qu, Chinese J. Lasers (in Chinese) 36, 2277 (2009).

Miglo, A.

J.-F. Seurin, C. L. Ghosh, V. Khalfin, A. Miglo, G. Xu, J. D. Wynn, P. Pradhan, and L. A. D.Asaro, Proc. SPIE 6908, 690808 (2008).

Miyamoto, T.

T. Miyamoto, T. Nishina, Y. Kashihara, S. Ishida, and F. Koyama, Jpn. J. Appl. Phys. 47, 6772 (2008).

Ning, Y.

J. Cui, Y. Ning, T. Zhang, P. Kong, G. Liu, X. Zhang, Z. Wang, J. Shi, T. Li, L. Qin, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1941 (2009).

T. Li, Y. Ning, Y. Sun, J. Cui, E. Hao, L. Qin, G. Tao, Y. Liu, L. Wang, D. Cui, and Z. Xu, Chinese J. Lasers (in Chinese) 34, 641 (2007).

T. Li, Y. Ning, Y. Sun, J. Cui, L. Qin, C. Yan, Y. Zhang, B. Peng, G. Liu, Y. Liu, and L. Wang, Chin. Opt. Lett. 5, S156 (2007).

Nishina, T.

T. Miyamoto, T. Nishina, Y. Kashihara, S. Ishida, and F. Koyama, Jpn. J. Appl. Phys. 47, 6772 (2008).

Peng, B.

Pradhan, P.

J.-F. Seurin, C. L. Ghosh, V. Khalfin, A. Miglo, G. Xu, J. D. Wynn, P. Pradhan, and L. A. D.Asaro, Proc. SPIE 6908, 690808 (2008).

Qiao, Z.

Z. Qiao, B. Bo, Y. Yao, X. Gao, J. Zhang, Y. Wang, C. Liu, P. Lu, H. Li, and Y. Qu, Chinese J. Lasers (in Chinese) 36, 2277 (2009).

Qin, L.

J. Cui, Y. Ning, T. Zhang, P. Kong, G. Liu, X. Zhang, Z. Wang, J. Shi, T. Li, L. Qin, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1941 (2009).

T. Li, Y. Ning, Y. Sun, J. Cui, L. Qin, C. Yan, Y. Zhang, B. Peng, G. Liu, Y. Liu, and L. Wang, Chin. Opt. Lett. 5, S156 (2007).

T. Li, Y. Ning, Y. Sun, J. Cui, E. Hao, L. Qin, G. Tao, Y. Liu, L. Wang, D. Cui, and Z. Xu, Chinese J. Lasers (in Chinese) 34, 641 (2007).

Qu, Y.

Z. Qiao, B. Bo, Y. Yao, X. Gao, J. Zhang, Y. Wang, C. Liu, P. Lu, H. Li, and Y. Qu, Chinese J. Lasers (in Chinese) 36, 2277 (2009).

Seurin, J.-F.

J.-F. Seurin, C. L. Ghosh, V. Khalfin, A. Miglo, G. Xu, J. D. Wynn, P. Pradhan, and L. A. D.Asaro, Proc. SPIE 6908, 690808 (2008).

Shi, J.

J. Cui, Y. Ning, T. Zhang, P. Kong, G. Liu, X. Zhang, Z. Wang, J. Shi, T. Li, L. Qin, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1941 (2009).

Sun, Y.

T. Li, Y. Ning, Y. Sun, J. Cui, E. Hao, L. Qin, G. Tao, Y. Liu, L. Wang, D. Cui, and Z. Xu, Chinese J. Lasers (in Chinese) 34, 641 (2007).

T. Li, Y. Ning, Y. Sun, J. Cui, L. Qin, C. Yan, Y. Zhang, B. Peng, G. Liu, Y. Liu, and L. Wang, Chin. Opt. Lett. 5, S156 (2007).

Tao, G.

T. Li, Y. Ning, Y. Sun, J. Cui, E. Hao, L. Qin, G. Tao, Y. Liu, L. Wang, D. Cui, and Z. Xu, Chinese J. Lasers (in Chinese) 34, 641 (2007).

Wang, L.

J. Cui, Y. Ning, T. Zhang, P. Kong, G. Liu, X. Zhang, Z. Wang, J. Shi, T. Li, L. Qin, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1941 (2009).

T. Li, Y. Ning, Y. Sun, J. Cui, E. Hao, L. Qin, G. Tao, Y. Liu, L. Wang, D. Cui, and Z. Xu, Chinese J. Lasers (in Chinese) 34, 641 (2007).

T. Li, Y. Ning, Y. Sun, J. Cui, L. Qin, C. Yan, Y. Zhang, B. Peng, G. Liu, Y. Liu, and L. Wang, Chin. Opt. Lett. 5, S156 (2007).

Wang, Y.

Z. Qiao, B. Bo, Y. Yao, X. Gao, J. Zhang, Y. Wang, C. Liu, P. Lu, H. Li, and Y. Qu, Chinese J. Lasers (in Chinese) 36, 2277 (2009).

Wang, Z.

J. Cui, Y. Ning, T. Zhang, P. Kong, G. Liu, X. Zhang, Z. Wang, J. Shi, T. Li, L. Qin, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1941 (2009).

Wynn, J. D.

J.-F. Seurin, C. L. Ghosh, V. Khalfin, A. Miglo, G. Xu, J. D. Wynn, P. Pradhan, and L. A. D.Asaro, Proc. SPIE 6908, 690808 (2008).

Xu, G.

J.-F. Seurin, C. L. Ghosh, V. Khalfin, A. Miglo, G. Xu, J. D. Wynn, P. Pradhan, and L. A. D.Asaro, Proc. SPIE 6908, 690808 (2008).

Xu, Z.

T. Li, Y. Ning, Y. Sun, J. Cui, E. Hao, L. Qin, G. Tao, Y. Liu, L. Wang, D. Cui, and Z. Xu, Chinese J. Lasers (in Chinese) 34, 641 (2007).

Yan, C.

Yao, Y.

Z. Qiao, B. Bo, Y. Yao, X. Gao, J. Zhang, Y. Wang, C. Liu, P. Lu, H. Li, and Y. Qu, Chinese J. Lasers (in Chinese) 36, 2277 (2009).

Zhang, J.

Z. Qiao, B. Bo, Y. Yao, X. Gao, J. Zhang, Y. Wang, C. Liu, P. Lu, H. Li, and Y. Qu, Chinese J. Lasers (in Chinese) 36, 2277 (2009).

Zhang, T.

J. Cui, Y. Ning, T. Zhang, P. Kong, G. Liu, X. Zhang, Z. Wang, J. Shi, T. Li, L. Qin, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1941 (2009).

Zhang, X.

J. Cui, Y. Ning, T. Zhang, P. Kong, G. Liu, X. Zhang, Z. Wang, J. Shi, T. Li, L. Qin, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1941 (2009).

Zhang, Y.

Chin. Opt. Lett. (1)

Chinese J. Lasers (in Chinese) (3)

J. Cui, Y. Ning, T. Zhang, P. Kong, G. Liu, X. Zhang, Z. Wang, J. Shi, T. Li, L. Qin, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1941 (2009).

T. Li, Y. Ning, Y. Sun, J. Cui, E. Hao, L. Qin, G. Tao, Y. Liu, L. Wang, D. Cui, and Z. Xu, Chinese J. Lasers (in Chinese) 34, 641 (2007).

Z. Qiao, B. Bo, Y. Yao, X. Gao, J. Zhang, Y. Wang, C. Liu, P. Lu, H. Li, and Y. Qu, Chinese J. Lasers (in Chinese) 36, 2277 (2009).

IEEE Photon. Technol. Lett. (1)

K. L. Lear, S. P. Kilcoyne, and S. A. Chalmers, IEEE Photon. Technol. Lett. 6, 778 (1994).

Jpn. J. Appl. Phys. (1)

T. Miyamoto, T. Nishina, Y. Kashihara, S. Ishida, and F. Koyama, Jpn. J. Appl. Phys. 47, 6772 (2008).

Proc. SPIE (1)

J.-F. Seurin, C. L. Ghosh, V. Khalfin, A. Miglo, G. Xu, J. D. Wynn, P. Pradhan, and L. A. D.Asaro, Proc. SPIE 6908, 690808 (2008).

Transactions of Beijing Institute of Technology (in Chinese) (1)

X. Li and J. Cheng, Transactions of Beijing Institute of Technology (in Chinese) 25, 71 (2005).

Other (2)

J. Wu, H. D. Summers, and G. Iordache, in Proceedings of CLEO 2001 CTuM22 (2001).

A. Mooradian, S. Antikichev, B. Cantos, G. Carey, M. Jansen, S. Hallstein, W. Hitchens, D. Lee, J.-M. Pelaprat, R. Nabiev, G. Niven, A. Shchegrov, A. Umbrasas, and J. Watson, in Proceedings of MOC'09 M1 (2005).

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