Abstract

The influence of laser conditioning on defects of HfO2 monolayer films prepared by electron beam evaporation (EBE) is investigated utilizing the spot-size effect of the laser-induced damage. It is found that the laser-induced damage threshold of HfO2 monolayer films can be increased by a factor of 1.3-1.6. It is also found that the defects with low threshold can be removed by laser conditioning and defects with higher threshold may be removed partially.

© 2010 Chinese Optics Letters

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  1. C. J. Stolz, L. M. Sheehan, S. M. Maricle, S. Schwartz, and J. Hue, Proc. SPIE 3578, 144 (1999).
  2. M. R. Kozlowski, C. R. Wolfe, M. C. Staggs, and J. H. Campbell, Proc. SPIE 1438, 376 (1989).
  3. Y. Cui, Y. Zhao, Y. Jin, Z. Fan, and J. Shao, Acta Opt. Sin. (in Chinese) 27, 1129 (2007).
  4. J. Huang, H. Lu, L. Ye, S. Zhao, H. Wang, X. Jiang, X. Yuan, and W. Zheng, Chinese J. Lasers (in Chinese) 34, 723 (2007).
  5. D. Li, Y. Zhao, J. Shao, Z. Fan, and H. He, Chin. Opt. Lett. 6, 386 (2008).
  6. L. Sheehan, M. Kozlowski, F. Rainer, and M. Staggs, Proc. SPIE 2114, 559 (1994).
  7. H. Bercegol, Proc. SPIE 3578, 421 (1999).
  8. X. Liu, D. Li, X. Li, Y. Zhao, and J. Shao, Chinese J. Lasers (in Chinese) 36, 1545 (2009).
  9. ISO 11254-1, Lasers and laser-related equipment Determination of laser-induced damage threshold of optical surfaces--Part 1: 1-on-1 test (2002).
  10. L. G. Deshazer, B. E. Newnam, and K. M. Leung, Appl. Phys. Lett. 23, 607 (1973).
  11. J. Capoulade, L. Gallais, J.-Y. Natoli, and M. Commandre, Appl. Opt. 47, 5272 (2008).
  12. H. Krol, L. Gallais, C. Grezes-Besset, J.-Y. Natoli, and M. Commandre, J. Opt. Commun. 256, 184 (2005).

2009 (1)

X. Liu, D. Li, X. Li, Y. Zhao, and J. Shao, Chinese J. Lasers (in Chinese) 36, 1545 (2009).

2008 (2)

2007 (2)

Y. Cui, Y. Zhao, Y. Jin, Z. Fan, and J. Shao, Acta Opt. Sin. (in Chinese) 27, 1129 (2007).

J. Huang, H. Lu, L. Ye, S. Zhao, H. Wang, X. Jiang, X. Yuan, and W. Zheng, Chinese J. Lasers (in Chinese) 34, 723 (2007).

2005 (1)

H. Krol, L. Gallais, C. Grezes-Besset, J.-Y. Natoli, and M. Commandre, J. Opt. Commun. 256, 184 (2005).

1999 (2)

H. Bercegol, Proc. SPIE 3578, 421 (1999).

C. J. Stolz, L. M. Sheehan, S. M. Maricle, S. Schwartz, and J. Hue, Proc. SPIE 3578, 144 (1999).

1994 (1)

L. Sheehan, M. Kozlowski, F. Rainer, and M. Staggs, Proc. SPIE 2114, 559 (1994).

1989 (1)

M. R. Kozlowski, C. R. Wolfe, M. C. Staggs, and J. H. Campbell, Proc. SPIE 1438, 376 (1989).

1973 (1)

L. G. Deshazer, B. E. Newnam, and K. M. Leung, Appl. Phys. Lett. 23, 607 (1973).

Bercegol, H.

H. Bercegol, Proc. SPIE 3578, 421 (1999).

Campbell, J. H.

M. R. Kozlowski, C. R. Wolfe, M. C. Staggs, and J. H. Campbell, Proc. SPIE 1438, 376 (1989).

Capoulade, J.

Commandre, M.

J. Capoulade, L. Gallais, J.-Y. Natoli, and M. Commandre, Appl. Opt. 47, 5272 (2008).

H. Krol, L. Gallais, C. Grezes-Besset, J.-Y. Natoli, and M. Commandre, J. Opt. Commun. 256, 184 (2005).

Cui, Y.

Y. Cui, Y. Zhao, Y. Jin, Z. Fan, and J. Shao, Acta Opt. Sin. (in Chinese) 27, 1129 (2007).

Deshazer, L. G.

L. G. Deshazer, B. E. Newnam, and K. M. Leung, Appl. Phys. Lett. 23, 607 (1973).

Fan, Z.

D. Li, Y. Zhao, J. Shao, Z. Fan, and H. He, Chin. Opt. Lett. 6, 386 (2008).

Y. Cui, Y. Zhao, Y. Jin, Z. Fan, and J. Shao, Acta Opt. Sin. (in Chinese) 27, 1129 (2007).

Gallais, L.

J. Capoulade, L. Gallais, J.-Y. Natoli, and M. Commandre, Appl. Opt. 47, 5272 (2008).

H. Krol, L. Gallais, C. Grezes-Besset, J.-Y. Natoli, and M. Commandre, J. Opt. Commun. 256, 184 (2005).

Grezes-Besset, C.

H. Krol, L. Gallais, C. Grezes-Besset, J.-Y. Natoli, and M. Commandre, J. Opt. Commun. 256, 184 (2005).

He, H.

Huang, J.

J. Huang, H. Lu, L. Ye, S. Zhao, H. Wang, X. Jiang, X. Yuan, and W. Zheng, Chinese J. Lasers (in Chinese) 34, 723 (2007).

Hue, J.

C. J. Stolz, L. M. Sheehan, S. M. Maricle, S. Schwartz, and J. Hue, Proc. SPIE 3578, 144 (1999).

Jiang, X.

J. Huang, H. Lu, L. Ye, S. Zhao, H. Wang, X. Jiang, X. Yuan, and W. Zheng, Chinese J. Lasers (in Chinese) 34, 723 (2007).

Jin, Y.

Y. Cui, Y. Zhao, Y. Jin, Z. Fan, and J. Shao, Acta Opt. Sin. (in Chinese) 27, 1129 (2007).

Kozlowski, M.

L. Sheehan, M. Kozlowski, F. Rainer, and M. Staggs, Proc. SPIE 2114, 559 (1994).

Kozlowski, M. R.

M. R. Kozlowski, C. R. Wolfe, M. C. Staggs, and J. H. Campbell, Proc. SPIE 1438, 376 (1989).

Krol, H.

H. Krol, L. Gallais, C. Grezes-Besset, J.-Y. Natoli, and M. Commandre, J. Opt. Commun. 256, 184 (2005).

Leung, K. M.

L. G. Deshazer, B. E. Newnam, and K. M. Leung, Appl. Phys. Lett. 23, 607 (1973).

Li, D.

X. Liu, D. Li, X. Li, Y. Zhao, and J. Shao, Chinese J. Lasers (in Chinese) 36, 1545 (2009).

D. Li, Y. Zhao, J. Shao, Z. Fan, and H. He, Chin. Opt. Lett. 6, 386 (2008).

Li, X.

X. Liu, D. Li, X. Li, Y. Zhao, and J. Shao, Chinese J. Lasers (in Chinese) 36, 1545 (2009).

Liu, X.

X. Liu, D. Li, X. Li, Y. Zhao, and J. Shao, Chinese J. Lasers (in Chinese) 36, 1545 (2009).

Lu, H.

J. Huang, H. Lu, L. Ye, S. Zhao, H. Wang, X. Jiang, X. Yuan, and W. Zheng, Chinese J. Lasers (in Chinese) 34, 723 (2007).

Maricle, S. M.

C. J. Stolz, L. M. Sheehan, S. M. Maricle, S. Schwartz, and J. Hue, Proc. SPIE 3578, 144 (1999).

Natoli, J.-Y.

J. Capoulade, L. Gallais, J.-Y. Natoli, and M. Commandre, Appl. Opt. 47, 5272 (2008).

H. Krol, L. Gallais, C. Grezes-Besset, J.-Y. Natoli, and M. Commandre, J. Opt. Commun. 256, 184 (2005).

Newnam, B. E.

L. G. Deshazer, B. E. Newnam, and K. M. Leung, Appl. Phys. Lett. 23, 607 (1973).

Rainer, F.

L. Sheehan, M. Kozlowski, F. Rainer, and M. Staggs, Proc. SPIE 2114, 559 (1994).

Schwartz, S.

C. J. Stolz, L. M. Sheehan, S. M. Maricle, S. Schwartz, and J. Hue, Proc. SPIE 3578, 144 (1999).

Shao, J.

X. Liu, D. Li, X. Li, Y. Zhao, and J. Shao, Chinese J. Lasers (in Chinese) 36, 1545 (2009).

D. Li, Y. Zhao, J. Shao, Z. Fan, and H. He, Chin. Opt. Lett. 6, 386 (2008).

Y. Cui, Y. Zhao, Y. Jin, Z. Fan, and J. Shao, Acta Opt. Sin. (in Chinese) 27, 1129 (2007).

Sheehan, L.

L. Sheehan, M. Kozlowski, F. Rainer, and M. Staggs, Proc. SPIE 2114, 559 (1994).

Sheehan, L. M.

C. J. Stolz, L. M. Sheehan, S. M. Maricle, S. Schwartz, and J. Hue, Proc. SPIE 3578, 144 (1999).

Staggs, M.

L. Sheehan, M. Kozlowski, F. Rainer, and M. Staggs, Proc. SPIE 2114, 559 (1994).

Staggs, M. C.

M. R. Kozlowski, C. R. Wolfe, M. C. Staggs, and J. H. Campbell, Proc. SPIE 1438, 376 (1989).

Stolz, C. J.

C. J. Stolz, L. M. Sheehan, S. M. Maricle, S. Schwartz, and J. Hue, Proc. SPIE 3578, 144 (1999).

Wang, H.

J. Huang, H. Lu, L. Ye, S. Zhao, H. Wang, X. Jiang, X. Yuan, and W. Zheng, Chinese J. Lasers (in Chinese) 34, 723 (2007).

Wolfe, C. R.

M. R. Kozlowski, C. R. Wolfe, M. C. Staggs, and J. H. Campbell, Proc. SPIE 1438, 376 (1989).

Ye, L.

J. Huang, H. Lu, L. Ye, S. Zhao, H. Wang, X. Jiang, X. Yuan, and W. Zheng, Chinese J. Lasers (in Chinese) 34, 723 (2007).

Yuan, X.

J. Huang, H. Lu, L. Ye, S. Zhao, H. Wang, X. Jiang, X. Yuan, and W. Zheng, Chinese J. Lasers (in Chinese) 34, 723 (2007).

Zhao, S.

J. Huang, H. Lu, L. Ye, S. Zhao, H. Wang, X. Jiang, X. Yuan, and W. Zheng, Chinese J. Lasers (in Chinese) 34, 723 (2007).

Zhao, Y.

X. Liu, D. Li, X. Li, Y. Zhao, and J. Shao, Chinese J. Lasers (in Chinese) 36, 1545 (2009).

D. Li, Y. Zhao, J. Shao, Z. Fan, and H. He, Chin. Opt. Lett. 6, 386 (2008).

Y. Cui, Y. Zhao, Y. Jin, Z. Fan, and J. Shao, Acta Opt. Sin. (in Chinese) 27, 1129 (2007).

Zheng, W.

J. Huang, H. Lu, L. Ye, S. Zhao, H. Wang, X. Jiang, X. Yuan, and W. Zheng, Chinese J. Lasers (in Chinese) 34, 723 (2007).

Acta Opt. Sin. (in Chinese) (1)

Y. Cui, Y. Zhao, Y. Jin, Z. Fan, and J. Shao, Acta Opt. Sin. (in Chinese) 27, 1129 (2007).

Appl. Opt. (1)

Appl. Phys. Lett. (1)

L. G. Deshazer, B. E. Newnam, and K. M. Leung, Appl. Phys. Lett. 23, 607 (1973).

Chin. Opt. Lett. (1)

Chinese J. Lasers (in Chinese) (2)

J. Huang, H. Lu, L. Ye, S. Zhao, H. Wang, X. Jiang, X. Yuan, and W. Zheng, Chinese J. Lasers (in Chinese) 34, 723 (2007).

X. Liu, D. Li, X. Li, Y. Zhao, and J. Shao, Chinese J. Lasers (in Chinese) 36, 1545 (2009).

J. Opt. Commun. (1)

H. Krol, L. Gallais, C. Grezes-Besset, J.-Y. Natoli, and M. Commandre, J. Opt. Commun. 256, 184 (2005).

Proc. SPIE (4)

C. J. Stolz, L. M. Sheehan, S. M. Maricle, S. Schwartz, and J. Hue, Proc. SPIE 3578, 144 (1999).

M. R. Kozlowski, C. R. Wolfe, M. C. Staggs, and J. H. Campbell, Proc. SPIE 1438, 376 (1989).

L. Sheehan, M. Kozlowski, F. Rainer, and M. Staggs, Proc. SPIE 2114, 559 (1994).

H. Bercegol, Proc. SPIE 3578, 421 (1999).

Other (1)

ISO 11254-1, Lasers and laser-related equipment Determination of laser-induced damage threshold of optical surfaces--Part 1: 1-on-1 test (2002).

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