Abstract

High-power vertical-cavity surface-emitting lasers (VCSELs) are processed using a wet thermal-selective oxidation technique. The VCSEL chips are packaged by employing three different bonding methods of silver solder, In-Sn solder, and metalized diamond heat spreader. After packaging, optical output power, wavelength shift, and thermal resistance of the devices are measured and compared in an experiment. The device packaged with a metalized diamond heat spreader shows the best operation characteristics among the three methods. The 200 \mu m-diameter device bonded with a metalized diamond heat spreader produces a continuous wave optical output power of 0.51 W and a corresponding power density of 1.6 kW/cm<sup>2</sup> at room temperature. The thermal resistance is as low as 10 K/W. The accelerated aging test is also carried out at high temperature under constant current mode. The device operates for more than 1000 h at 70 ?, and the total degradation is only about 10%.

© 2010 Chinese Optics Letters

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2009

T. Wang, X. Guo, B. Guan, and G. Shen, Chinese J. Lasers (in Chinese) 36, 1057 (2009).

W. Wang, S. Zhang, X. Qian, and Y. Wang, Chin. Opt. Lett. 7, 945 (2009).

Z. Wang, Y. Ning, Y. Zhang, J. Shi, T. Li, J. Cui, G. Liu, X. Zhang, L. Qin, Y. Sun, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1963 (2009).

2004

E. S. Bjorlin, T. Kimura, Q. Chen, C. Wang, and J. E. Bowers, Electron. Lett. 40, 121 (2004).

C. Yan, Y. Ning, L. Qin, Y. Liu, L. Zhao, Q. Wang, Z. Jin, Y. Sun, G. Tao, G. Chu, C. Wang, L. Wang, and H. Jiang, Electron. Lett. 40, 872 (2004).

2001

J. Wu, G. Iordache, H. D. Summers, and J. S. Roberts, Opt. Commun. 196, 251 (2001).

1999

R. D. Briggs, M. G. Armendariz, K. M. Geib, K. D. Choquette, and D. K. Serkland, Proc. SPIE 3627, 40 (1999).

D. Wiedenmann, R. King, C. Jung, R. Jager, and R. Michalzik, IEEE J. Sel. Top. Quantum Electron. 5, 503 (1999).

1998

M. H. MacDougal, J. Geske, C.-K. Lin, A. E. Bond, and P. D. Dapkus, IEEE Photon. Technol. Lett. 10, 15 (1998).

1997

J. Diaz, H. J. Yi, M. Razeghi, and G. T. Burnham, Appl. Phys. Lett. 71, 3042 (1997).

1991

R. S. Geels, S. W. Corzine, and L. A. Coldren, IEEE J. Quantum Electron. 27, 1359 (1991).

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R. D. Briggs, M. G. Armendariz, K. M. Geib, K. D. Choquette, and D. K. Serkland, Proc. SPIE 3627, 40 (1999).

Bjorlin, E. S.

E. S. Bjorlin, T. Kimura, Q. Chen, C. Wang, and J. E. Bowers, Electron. Lett. 40, 121 (2004).

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M. H. MacDougal, J. Geske, C.-K. Lin, A. E. Bond, and P. D. Dapkus, IEEE Photon. Technol. Lett. 10, 15 (1998).

Bowers, J. E.

E. S. Bjorlin, T. Kimura, Q. Chen, C. Wang, and J. E. Bowers, Electron. Lett. 40, 121 (2004).

Briggs, R. D.

R. D. Briggs, M. G. Armendariz, K. M. Geib, K. D. Choquette, and D. K. Serkland, Proc. SPIE 3627, 40 (1999).

Burnham, G. T.

J. Diaz, H. J. Yi, M. Razeghi, and G. T. Burnham, Appl. Phys. Lett. 71, 3042 (1997).

Chen, Q.

E. S. Bjorlin, T. Kimura, Q. Chen, C. Wang, and J. E. Bowers, Electron. Lett. 40, 121 (2004).

Choquette, K. D.

R. D. Briggs, M. G. Armendariz, K. M. Geib, K. D. Choquette, and D. K. Serkland, Proc. SPIE 3627, 40 (1999).

Chu, G.

C. Yan, Y. Ning, L. Qin, Y. Liu, L. Zhao, Q. Wang, Z. Jin, Y. Sun, G. Tao, G. Chu, C. Wang, L. Wang, and H. Jiang, Electron. Lett. 40, 872 (2004).

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R. S. Geels, S. W. Corzine, and L. A. Coldren, IEEE J. Quantum Electron. 27, 1359 (1991).

Corzine, S. W.

R. S. Geels, S. W. Corzine, and L. A. Coldren, IEEE J. Quantum Electron. 27, 1359 (1991).

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Z. Wang, Y. Ning, Y. Zhang, J. Shi, T. Li, J. Cui, G. Liu, X. Zhang, L. Qin, Y. Sun, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1963 (2009).

Dapkus, P. D.

M. H. MacDougal, J. Geske, C.-K. Lin, A. E. Bond, and P. D. Dapkus, IEEE Photon. Technol. Lett. 10, 15 (1998).

Diaz, J.

J. Diaz, H. J. Yi, M. Razeghi, and G. T. Burnham, Appl. Phys. Lett. 71, 3042 (1997).

Geels, R. S.

R. S. Geels, S. W. Corzine, and L. A. Coldren, IEEE J. Quantum Electron. 27, 1359 (1991).

Geib, K. M.

R. D. Briggs, M. G. Armendariz, K. M. Geib, K. D. Choquette, and D. K. Serkland, Proc. SPIE 3627, 40 (1999).

Geske, J.

M. H. MacDougal, J. Geske, C.-K. Lin, A. E. Bond, and P. D. Dapkus, IEEE Photon. Technol. Lett. 10, 15 (1998).

Guan, B.

T. Wang, X. Guo, B. Guan, and G. Shen, Chinese J. Lasers (in Chinese) 36, 1057 (2009).

Guo, X.

T. Wang, X. Guo, B. Guan, and G. Shen, Chinese J. Lasers (in Chinese) 36, 1057 (2009).

Iordache, G.

J. Wu, G. Iordache, H. D. Summers, and J. S. Roberts, Opt. Commun. 196, 251 (2001).

Jager, R.

D. Wiedenmann, R. King, C. Jung, R. Jager, and R. Michalzik, IEEE J. Sel. Top. Quantum Electron. 5, 503 (1999).

Jiang, H.

C. Yan, Y. Ning, L. Qin, Y. Liu, L. Zhao, Q. Wang, Z. Jin, Y. Sun, G. Tao, G. Chu, C. Wang, L. Wang, and H. Jiang, Electron. Lett. 40, 872 (2004).

Jin, Z.

C. Yan, Y. Ning, L. Qin, Y. Liu, L. Zhao, Q. Wang, Z. Jin, Y. Sun, G. Tao, G. Chu, C. Wang, L. Wang, and H. Jiang, Electron. Lett. 40, 872 (2004).

Jung, C.

D. Wiedenmann, R. King, C. Jung, R. Jager, and R. Michalzik, IEEE J. Sel. Top. Quantum Electron. 5, 503 (1999).

Kimura, T.

E. S. Bjorlin, T. Kimura, Q. Chen, C. Wang, and J. E. Bowers, Electron. Lett. 40, 121 (2004).

King, R.

D. Wiedenmann, R. King, C. Jung, R. Jager, and R. Michalzik, IEEE J. Sel. Top. Quantum Electron. 5, 503 (1999).

Li, T.

Z. Wang, Y. Ning, Y. Zhang, J. Shi, T. Li, J. Cui, G. Liu, X. Zhang, L. Qin, Y. Sun, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1963 (2009).

Lin, C.-K.

M. H. MacDougal, J. Geske, C.-K. Lin, A. E. Bond, and P. D. Dapkus, IEEE Photon. Technol. Lett. 10, 15 (1998).

Liu, G.

Z. Wang, Y. Ning, Y. Zhang, J. Shi, T. Li, J. Cui, G. Liu, X. Zhang, L. Qin, Y. Sun, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1963 (2009).

Liu, Y.

Z. Wang, Y. Ning, Y. Zhang, J. Shi, T. Li, J. Cui, G. Liu, X. Zhang, L. Qin, Y. Sun, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1963 (2009).

C. Yan, Y. Ning, L. Qin, Y. Liu, L. Zhao, Q. Wang, Z. Jin, Y. Sun, G. Tao, G. Chu, C. Wang, L. Wang, and H. Jiang, Electron. Lett. 40, 872 (2004).

MacDougal, M. H.

M. H. MacDougal, J. Geske, C.-K. Lin, A. E. Bond, and P. D. Dapkus, IEEE Photon. Technol. Lett. 10, 15 (1998).

Michalzik, R.

D. Wiedenmann, R. King, C. Jung, R. Jager, and R. Michalzik, IEEE J. Sel. Top. Quantum Electron. 5, 503 (1999).

Ning, Y.

Z. Wang, Y. Ning, Y. Zhang, J. Shi, T. Li, J. Cui, G. Liu, X. Zhang, L. Qin, Y. Sun, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1963 (2009).

C. Yan, Y. Ning, L. Qin, Y. Liu, L. Zhao, Q. Wang, Z. Jin, Y. Sun, G. Tao, G. Chu, C. Wang, L. Wang, and H. Jiang, Electron. Lett. 40, 872 (2004).

Qian, X.

Qin, L.

Z. Wang, Y. Ning, Y. Zhang, J. Shi, T. Li, J. Cui, G. Liu, X. Zhang, L. Qin, Y. Sun, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1963 (2009).

C. Yan, Y. Ning, L. Qin, Y. Liu, L. Zhao, Q. Wang, Z. Jin, Y. Sun, G. Tao, G. Chu, C. Wang, L. Wang, and H. Jiang, Electron. Lett. 40, 872 (2004).

Razeghi, M.

J. Diaz, H. J. Yi, M. Razeghi, and G. T. Burnham, Appl. Phys. Lett. 71, 3042 (1997).

Roberts, J. S.

J. Wu, G. Iordache, H. D. Summers, and J. S. Roberts, Opt. Commun. 196, 251 (2001).

Serkland, D. K.

R. D. Briggs, M. G. Armendariz, K. M. Geib, K. D. Choquette, and D. K. Serkland, Proc. SPIE 3627, 40 (1999).

Shen, G.

T. Wang, X. Guo, B. Guan, and G. Shen, Chinese J. Lasers (in Chinese) 36, 1057 (2009).

Shi, J.

Z. Wang, Y. Ning, Y. Zhang, J. Shi, T. Li, J. Cui, G. Liu, X. Zhang, L. Qin, Y. Sun, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1963 (2009).

Summers, H. D.

J. Wu, G. Iordache, H. D. Summers, and J. S. Roberts, Opt. Commun. 196, 251 (2001).

Sun, Y.

Z. Wang, Y. Ning, Y. Zhang, J. Shi, T. Li, J. Cui, G. Liu, X. Zhang, L. Qin, Y. Sun, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1963 (2009).

C. Yan, Y. Ning, L. Qin, Y. Liu, L. Zhao, Q. Wang, Z. Jin, Y. Sun, G. Tao, G. Chu, C. Wang, L. Wang, and H. Jiang, Electron. Lett. 40, 872 (2004).

Tao, G.

C. Yan, Y. Ning, L. Qin, Y. Liu, L. Zhao, Q. Wang, Z. Jin, Y. Sun, G. Tao, G. Chu, C. Wang, L. Wang, and H. Jiang, Electron. Lett. 40, 872 (2004).

Wang, C.

C. Yan, Y. Ning, L. Qin, Y. Liu, L. Zhao, Q. Wang, Z. Jin, Y. Sun, G. Tao, G. Chu, C. Wang, L. Wang, and H. Jiang, Electron. Lett. 40, 872 (2004).

E. S. Bjorlin, T. Kimura, Q. Chen, C. Wang, and J. E. Bowers, Electron. Lett. 40, 121 (2004).

Wang, L.

Z. Wang, Y. Ning, Y. Zhang, J. Shi, T. Li, J. Cui, G. Liu, X. Zhang, L. Qin, Y. Sun, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1963 (2009).

C. Yan, Y. Ning, L. Qin, Y. Liu, L. Zhao, Q. Wang, Z. Jin, Y. Sun, G. Tao, G. Chu, C. Wang, L. Wang, and H. Jiang, Electron. Lett. 40, 872 (2004).

Wang, Q.

C. Yan, Y. Ning, L. Qin, Y. Liu, L. Zhao, Q. Wang, Z. Jin, Y. Sun, G. Tao, G. Chu, C. Wang, L. Wang, and H. Jiang, Electron. Lett. 40, 872 (2004).

Wang, T.

T. Wang, X. Guo, B. Guan, and G. Shen, Chinese J. Lasers (in Chinese) 36, 1057 (2009).

Wang, W.

Wang, Y.

Wang, Z.

Z. Wang, Y. Ning, Y. Zhang, J. Shi, T. Li, J. Cui, G. Liu, X. Zhang, L. Qin, Y. Sun, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1963 (2009).

Wiedenmann, D.

D. Wiedenmann, R. King, C. Jung, R. Jager, and R. Michalzik, IEEE J. Sel. Top. Quantum Electron. 5, 503 (1999).

Wu, J.

J. Wu, G. Iordache, H. D. Summers, and J. S. Roberts, Opt. Commun. 196, 251 (2001).

Yan, C.

C. Yan, Y. Ning, L. Qin, Y. Liu, L. Zhao, Q. Wang, Z. Jin, Y. Sun, G. Tao, G. Chu, C. Wang, L. Wang, and H. Jiang, Electron. Lett. 40, 872 (2004).

Yi, H. J.

J. Diaz, H. J. Yi, M. Razeghi, and G. T. Burnham, Appl. Phys. Lett. 71, 3042 (1997).

Zhang, S.

Zhang, X.

Z. Wang, Y. Ning, Y. Zhang, J. Shi, T. Li, J. Cui, G. Liu, X. Zhang, L. Qin, Y. Sun, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1963 (2009).

Zhang, Y.

Z. Wang, Y. Ning, Y. Zhang, J. Shi, T. Li, J. Cui, G. Liu, X. Zhang, L. Qin, Y. Sun, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1963 (2009).

Zhao, L.

C. Yan, Y. Ning, L. Qin, Y. Liu, L. Zhao, Q. Wang, Z. Jin, Y. Sun, G. Tao, G. Chu, C. Wang, L. Wang, and H. Jiang, Electron. Lett. 40, 872 (2004).

Appl. Phys. Lett.

J. Diaz, H. J. Yi, M. Razeghi, and G. T. Burnham, Appl. Phys. Lett. 71, 3042 (1997).

Chin. Opt. Lett.

Chinese J. Lasers (in Chinese)

Z. Wang, Y. Ning, Y. Zhang, J. Shi, T. Li, J. Cui, G. Liu, X. Zhang, L. Qin, Y. Sun, Y. Liu, and L. Wang, Chinese J. Lasers (in Chinese) 36, 1963 (2009).

T. Wang, X. Guo, B. Guan, and G. Shen, Chinese J. Lasers (in Chinese) 36, 1057 (2009).

Electron. Lett.

E. S. Bjorlin, T. Kimura, Q. Chen, C. Wang, and J. E. Bowers, Electron. Lett. 40, 121 (2004).

C. Yan, Y. Ning, L. Qin, Y. Liu, L. Zhao, Q. Wang, Z. Jin, Y. Sun, G. Tao, G. Chu, C. Wang, L. Wang, and H. Jiang, Electron. Lett. 40, 872 (2004).

IEEE J. Quantum Electron.

R. S. Geels, S. W. Corzine, and L. A. Coldren, IEEE J. Quantum Electron. 27, 1359 (1991).

IEEE J. Sel. Top. Quantum Electron.

D. Wiedenmann, R. King, C. Jung, R. Jager, and R. Michalzik, IEEE J. Sel. Top. Quantum Electron. 5, 503 (1999).

IEEE Photon. Technol. Lett.

M. H. MacDougal, J. Geske, C.-K. Lin, A. E. Bond, and P. D. Dapkus, IEEE Photon. Technol. Lett. 10, 15 (1998).

Opt. Commun.

J. Wu, G. Iordache, H. D. Summers, and J. S. Roberts, Opt. Commun. 196, 251 (2001).

Proc. SPIE

R. D. Briggs, M. G. Armendariz, K. M. Geib, K. D. Choquette, and D. K. Serkland, Proc. SPIE 3627, 40 (1999).

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