Abstract

A novel direct writing technique using submicron-diameter fibers is presented. This technique adopts contact mode in the process of writing, and submicron lines with different widths have been obtained. Experimental results demonstrate that the resolution of this technique can be smaller than the exposure wavelength of 442 nm, and 380-nm-wide line is achieved. In addition, the distribution of light fields in the photoresist layer is analyzed by finite-difference time-domain method.

© 2010 Chinese Optics Letters

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2005

W. Liang, Y. Huang, Y. Xu, R. K. Lee, and A. Yariv, Appl. Phys. Lett. 86, 151122 (2005).

M. Sumetsky, Y. Dulashko, J. M. Fini, and A. Hale, Appl. Phys. Lett. 86, 161108 (2005).

S. A. Slattery, D. N. Nikogosyan, and G. Brambilla, J. Opt. Soc. Am. B 22, 354 (2005).

2004

2003

L. Tong, R. R. Gattass, J. B. Ashcom, S. He, J. Lou, M. Shen, I. Maxwell, and E. Mazur, Nature 426, 816 (2003).

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Y. Li, D. Chen, J. Zhu, C. Yang, and Y. Kanamori, Acta Opt. Sin. (in Chinese) 22, 1008 (2002).

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H. C. Tapalian, J. Langseth, Y. Chen, J. W. Anderegg, and J. Shinar, Appl. Phys. Lett. 93, 243304 (2008).

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L. Tong, R. R. Gattass, J. B. Ashcom, S. He, J. Lou, M. Shen, I. Maxwell, and E. Mazur, Nature 426, 816 (2003).

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Chai, L.

Chen, D.

Y. Li, D. Chen, J. Zhu, C. Yang, and Y. Kanamori, Acta Opt. Sin. (in Chinese) 22, 1008 (2002).

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H. C. Tapalian, J. Langseth, Y. Chen, J. W. Anderegg, and J. Shinar, Appl. Phys. Lett. 93, 243304 (2008).

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I. I. Smolyaninov, D. L. Mazzoni, and C. C. Davis, Appl. Phys. Lett. 67, 3859 (1995).

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M. Sumetsky, Y. Dulashko, J. M. Fini, and A. Hale, Appl. Phys. Lett. 86, 161108 (2005).

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M. Sumetsky, Y. Dulashko, J. M. Fini, and A. Hale, Appl. Phys. Lett. 86, 161108 (2005).

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Gattass, R. R.

L. Tong, R. R. Gattass, J. B. Ashcom, S. He, J. Lou, M. Shen, I. Maxwell, and E. Mazur, Nature 426, 816 (2003).

Hale, A.

M. Sumetsky, Y. Dulashko, J. M. Fini, and A. Hale, Appl. Phys. Lett. 86, 161108 (2005).

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L. Tong, R. R. Gattass, J. B. Ashcom, S. He, J. Lou, M. Shen, I. Maxwell, and E. Mazur, Nature 426, 816 (2003).

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X. Jiang, Q. Yang, G. Vienne, Y. Li, L. Tong, J. Zhang, and L. Hu, Appl. Phys. Lett. 89, 143513 (2006).

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Huang, K.-J.

Huang, W.

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W. Liang, Y. Huang, Y. Xu, R. K. Lee, and A. Yariv, Appl. Phys. Lett. 86, 151122 (2005).

Jia, W.

Jiang, X.

X. Jiang, Y. Chen, G. Vienne, and L. Tong, Opt. Lett. 32, 1710 (2007).

X. Jiang, Q. Yang, G. Vienne, Y. Li, L. Tong, J. Zhang, and L. Hu, Appl. Phys. Lett. 89, 143513 (2006).

Jin, Z.

Z. Jin, J. Tan, S. Zhang, and L. Wang, Acta Opt. Sin. (in Chinese) 28, 1730 (2008).

Kanamori, Y.

Y. Li, D. Chen, J. Zhu, C. Yang, and Y. Kanamori, Acta Opt. Sin. (in Chinese) 22, 1008 (2002).

Langseth, J.

H. C. Tapalian, J. Langseth, Y. Chen, J. W. Anderegg, and J. Shinar, Appl. Phys. Lett. 93, 243304 (2008).

Lee, R. K.

W. Liang, Y. Huang, Y. Xu, R. K. Lee, and A. Yariv, Appl. Phys. Lett. 86, 151122 (2005).

Li, C.

L. Zhang, C. Li, W. Liu, L. Zhou, G. Wu, and D. Wang, Acta Opt. Sin. (in Chinese) 26, 1048 (2006).

Li, Y.

Y. Li and L. Tong, Opt. Lett. 33, 303 (2008).

X. Jiang, Q. Yang, G. Vienne, Y. Li, L. Tong, J. Zhang, and L. Hu, Appl. Phys. Lett. 89, 143513 (2006).

Y. Li, D. Chen, J. Zhu, C. Yang, and Y. Kanamori, Acta Opt. Sin. (in Chinese) 22, 1008 (2002).

Liang, W.

W. Liang, Y. Huang, Y. Xu, R. K. Lee, and A. Yariv, Appl. Phys. Lett. 86, 151122 (2005).

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L. Zhang, C. Li, W. Liu, L. Zhou, G. Wu, and D. Wang, Acta Opt. Sin. (in Chinese) 26, 1048 (2006).

Lou, J.

L. Tong, J. Lou, and E. Mazur, Opt. Express 12, 1025 (2004).

L. Tong, R. R. Gattass, J. B. Ashcom, S. He, J. Lou, M. Shen, I. Maxwell, and E. Mazur, Nature 426, 816 (2003).

Ma, Z.

Maxwell, I.

L. Tong, R. R. Gattass, J. B. Ashcom, S. He, J. Lou, M. Shen, I. Maxwell, and E. Mazur, Nature 426, 816 (2003).

Mazur, E.

L. Tong, J. Lou, and E. Mazur, Opt. Express 12, 1025 (2004).

L. Tong, R. R. Gattass, J. B. Ashcom, S. He, J. Lou, M. Shen, I. Maxwell, and E. Mazur, Nature 426, 816 (2003).

Mazzoni, D. L.

I. I. Smolyaninov, D. L. Mazzoni, and C. C. Davis, Appl. Phys. Lett. 67, 3859 (1995).

Ni, X.

Nikogosyan, D. N.

Qiu, M.

Shen, M.

L. Tong, R. R. Gattass, J. B. Ashcom, S. He, J. Lou, M. Shen, I. Maxwell, and E. Mazur, Nature 426, 816 (2003).

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H. C. Tapalian, J. Langseth, Y. Chen, J. W. Anderegg, and J. Shinar, Appl. Phys. Lett. 93, 243304 (2008).

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Smolyaninov, I. I.

I. I. Smolyaninov, D. L. Mazzoni, and C. C. Davis, Appl. Phys. Lett. 67, 3859 (1995).

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M. Sumetsky, Y. Dulashko, J. M. Fini, and A. Hale, Appl. Phys. Lett. 86, 161108 (2005).

Tan, J.

Z. Jin, J. Tan, S. Zhang, and L. Wang, Acta Opt. Sin. (in Chinese) 28, 1730 (2008).

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H. C. Tapalian, J. Langseth, Y. Chen, J. W. Anderegg, and J. Shinar, Appl. Phys. Lett. 93, 243304 (2008).

Tong, L.

Y. Li and L. Tong, Opt. Lett. 33, 303 (2008).

X. Jiang, Y. Chen, G. Vienne, and L. Tong, Opt. Lett. 32, 1710 (2007).

X. Jiang, Q. Yang, G. Vienne, Y. Li, L. Tong, J. Zhang, and L. Hu, Appl. Phys. Lett. 89, 143513 (2006).

L. Tong, J. Lou, and E. Mazur, Opt. Express 12, 1025 (2004).

L. Tong, R. R. Gattass, J. B. Ashcom, S. He, J. Lou, M. Shen, I. Maxwell, and E. Mazur, Nature 426, 816 (2003).

Tong, L.-M.

Vienne, G.

X. Jiang, Y. Chen, G. Vienne, and L. Tong, Opt. Lett. 32, 1710 (2007).

X. Jiang, Q. Yang, G. Vienne, Y. Li, L. Tong, J. Zhang, and L. Hu, Appl. Phys. Lett. 89, 143513 (2006).

Wang, C.

Wang, D.

L. Zhang, C. Li, W. Liu, L. Zhou, G. Wu, and D. Wang, Acta Opt. Sin. (in Chinese) 26, 1048 (2006).

Wang, L.

Z. Jin, J. Tan, S. Zhang, and L. Wang, Acta Opt. Sin. (in Chinese) 28, 1730 (2008).

M. Wu, W. Huang, and L. Wang, Chin. Opt. Lett. 6, 732 (2008).

Wang, S.-S.

Wu, G.

L. Zhang, C. Li, W. Liu, L. Zhou, G. Wu, and D. Wang, Acta Opt. Sin. (in Chinese) 26, 1048 (2006).

Wu, M.

Wu, Y.

Xu, Y.

W. Liang, Y. Huang, Y. Xu, R. K. Lee, and A. Yariv, Appl. Phys. Lett. 86, 151122 (2005).

Yang, C.

Y. Li, D. Chen, J. Zhu, C. Yang, and Y. Kanamori, Acta Opt. Sin. (in Chinese) 22, 1008 (2002).

Yang, H.

Yang, Q.

X. Jiang, Q. Yang, G. Vienne, Y. Li, L. Tong, J. Zhang, and L. Hu, Appl. Phys. Lett. 89, 143513 (2006).

Yariv, A.

W. Liang, Y. Huang, Y. Xu, R. K. Lee, and A. Yariv, Appl. Phys. Lett. 86, 151122 (2005).

Zhang, J.

X. Jiang, Q. Yang, G. Vienne, Y. Li, L. Tong, J. Zhang, and L. Hu, Appl. Phys. Lett. 89, 143513 (2006).

Zhang, L.

L. Zhang, C. Li, W. Liu, L. Zhou, G. Wu, and D. Wang, Acta Opt. Sin. (in Chinese) 26, 1048 (2006).

Zhang, S.

Z. Jin, J. Tan, S. Zhang, and L. Wang, Acta Opt. Sin. (in Chinese) 28, 1730 (2008).

Zhao, E.

Zhou, L.

L. Zhang, C. Li, W. Liu, L. Zhou, G. Wu, and D. Wang, Acta Opt. Sin. (in Chinese) 26, 1048 (2006).

Zhou, M.

Zhu, J.

Y. Li, D. Chen, J. Zhu, C. Yang, and Y. Kanamori, Acta Opt. Sin. (in Chinese) 22, 1008 (2002).

Acta Opt. Sin. (in Chinese)

L. Zhang, C. Li, W. Liu, L. Zhou, G. Wu, and D. Wang, Acta Opt. Sin. (in Chinese) 26, 1048 (2006).

Z. Jin, J. Tan, S. Zhang, and L. Wang, Acta Opt. Sin. (in Chinese) 28, 1730 (2008).

Y. Li, D. Chen, J. Zhu, C. Yang, and Y. Kanamori, Acta Opt. Sin. (in Chinese) 22, 1008 (2002).

Appl. Phys. Lett.

H. C. Tapalian, J. Langseth, Y. Chen, J. W. Anderegg, and J. Shinar, Appl. Phys. Lett. 93, 243304 (2008).

W. Liang, Y. Huang, Y. Xu, R. K. Lee, and A. Yariv, Appl. Phys. Lett. 86, 151122 (2005).

M. Sumetsky, Y. Dulashko, J. M. Fini, and A. Hale, Appl. Phys. Lett. 86, 161108 (2005).

X. Jiang, Q. Yang, G. Vienne, Y. Li, L. Tong, J. Zhang, and L. Hu, Appl. Phys. Lett. 89, 143513 (2006).

I. I. Smolyaninov, D. L. Mazzoni, and C. C. Davis, Appl. Phys. Lett. 67, 3859 (1995).

Chin. Opt. Lett.

J. Opt. Soc. Am. B

Nature

L. Tong, R. R. Gattass, J. B. Ashcom, S. He, J. Lou, M. Shen, I. Maxwell, and E. Mazur, Nature 426, 816 (2003).

Opt. Express

Opt. Lett.

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