Abstract

A non-destructive technique for subsurface measurements is proposed by combining light scattering method with laser confocal scanning tomography. The depth and distribution of subsurface defect layers are represented in term of scattered light intensity pattern, and three types of fused silica specimens are fabricated by different grinding and polishing processes to verify the validity and effectiveness. By using the direct measurement method with such technique, micron-scale cracks and scratches can be easily distinguished, and the instructional subsurface defect depths of 55, 15, and 4 μ m are given in real time allowing for an in-process observation and detection.

© 2010 Chinese Optics Letters

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  1. P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, Proc. SPIE 5991, 599101 (2005).
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  4. C. L. Battersby, L. M. Sheehan, and M. R. Kozlwski, Proc. SPIE 3578, 446 (1998).
  5. Z. M. Liao, S. J. Cohen, and J. R. Taylor, Proc. SPIE 2428, 43 (1995).
  6. D. Black, R. Polvani, L. Braun, B Hockey, and G. White, Proc. SPIE 3060, 102 (1997).
  7. J. Wang, R. L. Maier, and J. H. Burning, Proc. SPIE 5188, 106 (2003).
  8. G. Dussler, B. Brocher, and T. Pfeifer, Proc. SPIE 3825, 144 (1999).
  9. T. Zamofing and H. Hugli, Proc. SPIE 5265, 134 (2004).
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  12. K. R. Fine, R. Garbe, T. Gip, and Q. Nguyen, Proc. SPIE 5799, 105 (2005).
  13. J. Neauport, P. Cormont, P. Legros, C. Ambard, and J. Destribats, Opt. Express 17, 3543 (2009).
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  15. P. Torok and T. Wilson, Opt. Commun. 137, 127 (1997).

2009 (1)

2006 (1)

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, J. Non-Cryst. Solids 352, 5601 (2006).

2005 (2)

P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, Proc. SPIE 5991, 599101 (2005).

K. R. Fine, R. Garbe, T. Gip, and Q. Nguyen, Proc. SPIE 5799, 105 (2005).

2004 (1)

T. Zamofing and H. Hugli, Proc. SPIE 5265, 134 (2004).

2003 (1)

J. Wang, R. L. Maier, and J. H. Burning, Proc. SPIE 5188, 106 (2003).

1999 (1)

G. Dussler, B. Brocher, and T. Pfeifer, Proc. SPIE 3825, 144 (1999).

1998 (1)

C. L. Battersby, L. M. Sheehan, and M. R. Kozlwski, Proc. SPIE 3578, 446 (1998).

1997 (2)

D. Black, R. Polvani, L. Braun, B Hockey, and G. White, Proc. SPIE 3060, 102 (1997).

P. Torok and T. Wilson, Opt. Commun. 137, 127 (1997).

1995 (1)

Z. M. Liao, S. J. Cohen, and J. R. Taylor, Proc. SPIE 2428, 43 (1995).

1990 (1)

D. Golini and S. D. Jacobs, Proc. SPIE 1333, 80 (1990).

1977 (1)

K.-N. Liou, Appl. Math. Comput. 3, 331 (1977).

Ambard, C.

Battersby, C. L.

C. L. Battersby, L. M. Sheehan, and M. R. Kozlwski, Proc. SPIE 3578, 446 (1998).

Black, D.

D. Black, R. Polvani, L. Braun, B Hockey, and G. White, Proc. SPIE 3060, 102 (1997).

Braun, L.

D. Black, R. Polvani, L. Braun, B Hockey, and G. White, Proc. SPIE 3060, 102 (1997).

Brocher, B.

G. Dussler, B. Brocher, and T. Pfeifer, Proc. SPIE 3825, 144 (1999).

Burning, J. H.

J. Wang, R. L. Maier, and J. H. Burning, Proc. SPIE 5188, 106 (2003).

Cohen, S. J.

Z. M. Liao, S. J. Cohen, and J. R. Taylor, Proc. SPIE 2428, 43 (1995).

Cormont, P.

Davis, P.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, J. Non-Cryst. Solids 352, 5601 (2006).

Davis, P. J.

P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, Proc. SPIE 5991, 599101 (2005).

Destribats, J.

Dussler, G.

G. Dussler, B. Brocher, and T. Pfeifer, Proc. SPIE 3825, 144 (1999).

Feit, M. D.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, J. Non-Cryst. Solids 352, 5601 (2006).

P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, Proc. SPIE 5991, 599101 (2005).

Fine, K. R.

K. R. Fine, R. Garbe, T. Gip, and Q. Nguyen, Proc. SPIE 5799, 105 (2005).

Garbe, R.

K. R. Fine, R. Garbe, T. Gip, and Q. Nguyen, Proc. SPIE 5799, 105 (2005).

Gip, T.

K. R. Fine, R. Garbe, T. Gip, and Q. Nguyen, Proc. SPIE 5799, 105 (2005).

Golini, D.

D. Golini and S. D. Jacobs, Proc. SPIE 1333, 80 (1990).

Hockey, B

D. Black, R. Polvani, L. Braun, B Hockey, and G. White, Proc. SPIE 3060, 102 (1997).

Hugli, H.

T. Zamofing and H. Hugli, Proc. SPIE 5265, 134 (2004).

Jacobs, S. D.

D. Golini and S. D. Jacobs, Proc. SPIE 1333, 80 (1990).

Kozlwski, M. R.

C. L. Battersby, L. M. Sheehan, and M. R. Kozlwski, Proc. SPIE 3578, 446 (1998).

Legros, P.

Liao, Z. M.

Z. M. Liao, S. J. Cohen, and J. R. Taylor, Proc. SPIE 2428, 43 (1995).

Liou, K.-N.

K.-N. Liou, Appl. Math. Comput. 3, 331 (1977).

Maier, R. L.

J. Wang, R. L. Maier, and J. H. Burning, Proc. SPIE 5188, 106 (2003).

Menapace, J.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, J. Non-Cryst. Solids 352, 5601 (2006).

Menapace, J. A.

P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, Proc. SPIE 5991, 599101 (2005).

Miller, P.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, J. Non-Cryst. Solids 352, 5601 (2006).

Miller, P. E.

P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, Proc. SPIE 5991, 599101 (2005).

Neauport, J.

Nguyen, Q.

K. R. Fine, R. Garbe, T. Gip, and Q. Nguyen, Proc. SPIE 5799, 105 (2005).

Pfeifer, T.

G. Dussler, B. Brocher, and T. Pfeifer, Proc. SPIE 3825, 144 (1999).

Polvani, R.

D. Black, R. Polvani, L. Braun, B Hockey, and G. White, Proc. SPIE 3060, 102 (1997).

Sheehan, L. M.

C. L. Battersby, L. M. Sheehan, and M. R. Kozlwski, Proc. SPIE 3578, 446 (1998).

Steele, R.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, J. Non-Cryst. Solids 352, 5601 (2006).

Steele, R. A.

P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, Proc. SPIE 5991, 599101 (2005).

Suratwala, T.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, J. Non-Cryst. Solids 352, 5601 (2006).

Suratwala, T. I.

P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, Proc. SPIE 5991, 599101 (2005).

Taylor, J. R.

Z. M. Liao, S. J. Cohen, and J. R. Taylor, Proc. SPIE 2428, 43 (1995).

Torok, P.

P. Torok and T. Wilson, Opt. Commun. 137, 127 (1997).

Walmer, D.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, J. Non-Cryst. Solids 352, 5601 (2006).

Wang, J.

J. Wang, R. L. Maier, and J. H. Burning, Proc. SPIE 5188, 106 (2003).

White, G.

D. Black, R. Polvani, L. Braun, B Hockey, and G. White, Proc. SPIE 3060, 102 (1997).

Wilson, T.

P. Torok and T. Wilson, Opt. Commun. 137, 127 (1997).

Wong, L.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, J. Non-Cryst. Solids 352, 5601 (2006).

Wong, L. L.

P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, Proc. SPIE 5991, 599101 (2005).

Zamofing, T.

T. Zamofing and H. Hugli, Proc. SPIE 5265, 134 (2004).

Appl. Math. Comput. (1)

K.-N. Liou, Appl. Math. Comput. 3, 331 (1977).

J. Non-Cryst. Solids (1)

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, J. Non-Cryst. Solids 352, 5601 (2006).

Opt. Commun. (1)

P. Torok and T. Wilson, Opt. Commun. 137, 127 (1997).

Opt. Express (1)

Proc. SPIE (9)

K. R. Fine, R. Garbe, T. Gip, and Q. Nguyen, Proc. SPIE 5799, 105 (2005).

P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, Proc. SPIE 5991, 599101 (2005).

D. Golini and S. D. Jacobs, Proc. SPIE 1333, 80 (1990).

C. L. Battersby, L. M. Sheehan, and M. R. Kozlwski, Proc. SPIE 3578, 446 (1998).

Z. M. Liao, S. J. Cohen, and J. R. Taylor, Proc. SPIE 2428, 43 (1995).

D. Black, R. Polvani, L. Braun, B Hockey, and G. White, Proc. SPIE 3060, 102 (1997).

J. Wang, R. L. Maier, and J. H. Burning, Proc. SPIE 5188, 106 (2003).

G. Dussler, B. Brocher, and T. Pfeifer, Proc. SPIE 3825, 144 (1999).

T. Zamofing and H. Hugli, Proc. SPIE 5265, 134 (2004).

Other (2)

M. I. Mishchenko, L. D. Travis, and A. A. Lacis, Scattering, Absorption, and Emission of Light by Small Particles (Cambridge University Press, Cambridge, 2004).

K. R. Spring, T. J. Fellers, and M. W. Davidson, "Resolution and contrast in confocal microscopy" http://www.olympusconfocal.com/throry/resolutionintro.html (Jan. 8, 2009).

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