Abstract

A sensitive polymer diaphragm based fiber Fabry-Perot (F-P) sensor for aeroacoustic wave measurement is presented. A novel polymer material poly (phthalazinone ether sulfone ketone) (PPESK) diaphragm is used as the acoustic sensing element. The effective dimensions of the diaphragm are 4 mm in diameter and 6 μm in thickness. Owing to the good mechanical and optical features of the diaphragm and application of the interferometric/intensity demodulation, a system sensitivity of 31 mV/Pa is achieved in the frequency range of 0.1-12.7 kHz, and a signal-to-noise ratio (SNR) of 29 dB at 1 kHz is obtained. The linear response of the sensor is from 0.35 to 2.82 Pa, corresponding to 85-103 dB sound pressure level (SPL) (re: 20μ Pa). The sensor has the potential to be used as a universal and low-cost optical microphone.

© 2010 Chinese Optics Letters

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2008 (2)

Y. Wang, Z. Tan, W. Ren, Y. Liu, and S. Jian, Acta Opt. Sin. (in Chinese) 28, 1664 (2008).

J. Teng, Y. Song, X. Jian, and M. Zhao, Chin. Opt. Lett. 6, 74 (2008).

2006 (1)

2005 (7)

Z. Jing, Q. Yu, G. Zhang, and S. Song, Acta Opt. Sin. (in Chinese) 25, 1347 (2005).

E. Cibula and D. Donlagic, Appl. Opt. 44, 2736 (2005).

D. Donlagic and E. Cibula, Opt. Lett. 30, 2071 (2005).

Y. Zhu and A. Wang, IEEE Photon. Technol. Lett. 17, 447 (2005).

J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, IEEE Photon. Technol. Lett. 17, 870 (2005).

K. Totsu, Y. Haga, and M. Esashi, J. Micromech. Microeng. 15, 71 (2005).

X. Wang, B. Li, Z. Xiao, S. H. Lee, H. Roman, O. L. Russo, K. K. Chin, and K. R. Farmer, J. Micromech. Microeng. 15, 521 (2005).

2001 (1)

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Abeysinghe, D. C.

D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, IEEE Photon. Technol. Lett. 13, 993 (2001).

Boyd, J. T.

D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, IEEE Photon. Technol. Lett. 13, 993 (2001).

Chin, K. K.

X. Wang, B. Li, Z. Xiao, S. H. Lee, H. Roman, O. L. Russo, K. K. Chin, and K. R. Farmer, J. Micromech. Microeng. 15, 521 (2005).

Cibula, E.

Cooper, K.

J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, IEEE Photon. Technol. Lett. 17, 870 (2005).

Cooper, K. L.

Dasgupta, S.

D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, IEEE Photon. Technol. Lett. 13, 993 (2001).

Donlagic, D.

Esashi, M.

K. Totsu, Y. Haga, and M. Esashi, J. Micromech. Microeng. 15, 71 (2005).

Farmer, K. R.

X. Wang, B. Li, Z. Xiao, S. H. Lee, H. Roman, O. L. Russo, K. K. Chin, and K. R. Farmer, J. Micromech. Microeng. 15, 521 (2005).

Haga, Y.

K. Totsu, Y. Haga, and M. Esashi, J. Micromech. Microeng. 15, 71 (2005).

Jackson, H. E.

D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, IEEE Photon. Technol. Lett. 13, 993 (2001).

Jian, S.

Y. Wang, Z. Tan, W. Ren, Y. Liu, and S. Jian, Acta Opt. Sin. (in Chinese) 28, 1664 (2008).

Jian, X.

Jing, Z.

Z. Jing, Q. Yu, G. Zhang, and S. Song, Acta Opt. Sin. (in Chinese) 25, 1347 (2005).

Lee, S. H.

X. Wang, B. Li, Z. Xiao, S. H. Lee, H. Roman, O. L. Russo, K. K. Chin, and K. R. Farmer, J. Micromech. Microeng. 15, 521 (2005).

Li, B.

X. Wang, B. Li, Z. Xiao, S. H. Lee, H. Roman, O. L. Russo, K. K. Chin, and K. R. Farmer, J. Micromech. Microeng. 15, 521 (2005).

Liu, Y.

Y. Wang, Z. Tan, W. Ren, Y. Liu, and S. Jian, Acta Opt. Sin. (in Chinese) 28, 1664 (2008).

Peng, W.

J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, IEEE Photon. Technol. Lett. 17, 870 (2005).

Pickrell, G.

J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, IEEE Photon. Technol. Lett. 17, 870 (2005).

Ren, W.

Y. Wang, Z. Tan, W. Ren, Y. Liu, and S. Jian, Acta Opt. Sin. (in Chinese) 28, 1664 (2008).

Roman, H.

X. Wang, B. Li, Z. Xiao, S. H. Lee, H. Roman, O. L. Russo, K. K. Chin, and K. R. Farmer, J. Micromech. Microeng. 15, 521 (2005).

Russo, O. L.

X. Wang, B. Li, Z. Xiao, S. H. Lee, H. Roman, O. L. Russo, K. K. Chin, and K. R. Farmer, J. Micromech. Microeng. 15, 521 (2005).

Song, S.

Z. Jing, Q. Yu, G. Zhang, and S. Song, Acta Opt. Sin. (in Chinese) 25, 1347 (2005).

Song, Y.

Tan, Z.

Y. Wang, Z. Tan, W. Ren, Y. Liu, and S. Jian, Acta Opt. Sin. (in Chinese) 28, 1664 (2008).

Teng, J.

Totsu, K.

K. Totsu, Y. Haga, and M. Esashi, J. Micromech. Microeng. 15, 71 (2005).

Wang, A.

X. Wang, J. Xu, Y. Zhu, K. L. Cooper, and A. Wang, Opt. Lett. 31, 885 (2006).

Y. Zhu and A. Wang, IEEE Photon. Technol. Lett. 17, 447 (2005).

J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, IEEE Photon. Technol. Lett. 17, 870 (2005).

Wang, X.

X. Wang, J. Xu, Y. Zhu, K. L. Cooper, and A. Wang, Opt. Lett. 31, 885 (2006).

J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, IEEE Photon. Technol. Lett. 17, 870 (2005).

X. Wang, B. Li, Z. Xiao, S. H. Lee, H. Roman, O. L. Russo, K. K. Chin, and K. R. Farmer, J. Micromech. Microeng. 15, 521 (2005).

Wang, Y.

Y. Wang, Z. Tan, W. Ren, Y. Liu, and S. Jian, Acta Opt. Sin. (in Chinese) 28, 1664 (2008).

Xiao, Z.

X. Wang, B. Li, Z. Xiao, S. H. Lee, H. Roman, O. L. Russo, K. K. Chin, and K. R. Farmer, J. Micromech. Microeng. 15, 521 (2005).

Xu, J.

X. Wang, J. Xu, Y. Zhu, K. L. Cooper, and A. Wang, Opt. Lett. 31, 885 (2006).

J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, IEEE Photon. Technol. Lett. 17, 870 (2005).

Yu, Q.

Z. Jing, Q. Yu, G. Zhang, and S. Song, Acta Opt. Sin. (in Chinese) 25, 1347 (2005).

Zhang, G.

Z. Jing, Q. Yu, G. Zhang, and S. Song, Acta Opt. Sin. (in Chinese) 25, 1347 (2005).

Zhao, M.

Zhu, Y.

X. Wang, J. Xu, Y. Zhu, K. L. Cooper, and A. Wang, Opt. Lett. 31, 885 (2006).

Y. Zhu and A. Wang, IEEE Photon. Technol. Lett. 17, 447 (2005).

Acta Opt. Sin. (in Chinese) (2)

Z. Jing, Q. Yu, G. Zhang, and S. Song, Acta Opt. Sin. (in Chinese) 25, 1347 (2005).

Y. Wang, Z. Tan, W. Ren, Y. Liu, and S. Jian, Acta Opt. Sin. (in Chinese) 28, 1664 (2008).

Appl. Opt. (1)

Chin. Opt. Lett. (1)

IEEE Photon. Technol. Lett. (3)

Y. Zhu and A. Wang, IEEE Photon. Technol. Lett. 17, 447 (2005).

J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, IEEE Photon. Technol. Lett. 17, 870 (2005).

D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, IEEE Photon. Technol. Lett. 13, 993 (2001).

J. Micromech. Microeng. (2)

K. Totsu, Y. Haga, and M. Esashi, J. Micromech. Microeng. 15, 71 (2005).

X. Wang, B. Li, Z. Xiao, S. H. Lee, H. Roman, O. L. Russo, K. K. Chin, and K. R. Farmer, J. Micromech. Microeng. 15, 521 (2005).

Opt. Lett. (2)

Other (4)

E. Cibula, D. Donlagic, and C. Stropnik, in Proceedings of IEEE Sensor 2002 711 (2002).

Z. Jing, "Study on whiter light extrinsic Fabry-Perot interferometric optical fiber sensor and its applications" PhD. Thesis (Dalian University of Technology, Dalian,2006).

ME 102 Product Data Sheet, Germany Sennheiser Electronic GmbH&Co. KG.

M. D. Giovanni, Flat and Corrugated Diaphragm Design Handbook (CRC Press, New York, 1982).

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