Abstract

The self-mixing interferometer is used to investigate the characteristics of resonant frequency of the microresonator, which is excited by a sinusoidally driven loud-speaker. The detected self-mixing signal is processed by the phase reconstruction method. The 1st-order resonant frequency of the microresonator is measured to be 4.437 kHz with full-width at half-maximum (FWHM) of 0.13 kHz. The measurement results are verified by the sinusoidal phase modulating (SPM) interferometer.

© 2010 Chinese Optics Letters

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  1. U. Gysin, S. Rast, P. Ruff, E. Meyer, D. W. Lee, P. Vettiger, and C. Gerber, Phys. Rev. B 69, 045403 (2004).
  2. C. J. Welham, J. W. Gardner, and J. Greenwood, Sens. Actuat. A 52, 86 (1996).
  3. N. V. Lavrik and P. G. Datskos, Appl. Phys. Lett. 82, 2697 (2003).
  4. Goran Stemme, J. Micromech. Microeng. 1, 113 (1996).
  5. D. Ramos, J. Tamayo, J. Mertens, and M. Calleja, J. Appl. Phys. 99, 124904 (2006).
  6. R. Puers, D. De Bruyker, and A. Cozma, Sens. Actuat. A 60, 68 (1997).
  7. Y. Liu, X. Wang, and X. Wang, Chin. Opt. Lett. 4, 1 (2006).
  8. Y. Liu and X. Wang, Chinese J. Lasers (in Chinese) 33, 1661 (2006).
  9. W. M. Wang, K. T. V. Grattan, A. W. Palmer, and W. J. O. Boyle, J. Lightwave Technol. 12, 1577 (1994).
  10. T. Bosch and N. Servagent, Opt. Eng. 40, 20 (2001).
  11. C. Zakian and M. Dickinson, J. Opt. Pure Appl. Opt. 8, 555 (2006).
  12. G. Plantier, C. Bes, and T. Bosch, IEEE J. Quantum Electron. 41, 1157 (2005).
  13. N. Servagent, T. Bosch, and M. Lescure, IEEE Trans. Instrum. Meas. 46, 847 (1997).
  14. V. Annovazzi-Lodi, S. Merlo, and M. Norgia, J. Microelectromech. Syst. 10, 327 (2001).
  15. T. Yoshino, M. Nara, S. Mnatzakanian, B. S. Lee, and T. C. Strand, Appl. Opt. 26, 892 (1987).
  16. N. Takahashi, S. Kakuma, and R. Ohba, Opt. Eng. 35, 802 (1996).
  17. T. Suzuki, S. Hirabayashi, O. Sasaki, and T. Maruyama, Appl. Opt. 38, 543 (1999).
  18. G. Plantier, C. Bes, T. Bosch, and F. Bony, in Proceedings of IMTC 1013 (2005).

2006 (4)

Y. Liu and X. Wang, Chinese J. Lasers (in Chinese) 33, 1661 (2006).

C. Zakian and M. Dickinson, J. Opt. Pure Appl. Opt. 8, 555 (2006).

D. Ramos, J. Tamayo, J. Mertens, and M. Calleja, J. Appl. Phys. 99, 124904 (2006).

Y. Liu, X. Wang, and X. Wang, Chin. Opt. Lett. 4, 1 (2006).

2005 (1)

G. Plantier, C. Bes, and T. Bosch, IEEE J. Quantum Electron. 41, 1157 (2005).

2004 (1)

U. Gysin, S. Rast, P. Ruff, E. Meyer, D. W. Lee, P. Vettiger, and C. Gerber, Phys. Rev. B 69, 045403 (2004).

2003 (1)

N. V. Lavrik and P. G. Datskos, Appl. Phys. Lett. 82, 2697 (2003).

2001 (2)

T. Bosch and N. Servagent, Opt. Eng. 40, 20 (2001).

V. Annovazzi-Lodi, S. Merlo, and M. Norgia, J. Microelectromech. Syst. 10, 327 (2001).

1999 (1)

T. Suzuki, S. Hirabayashi, O. Sasaki, and T. Maruyama, Appl. Opt. 38, 543 (1999).

1997 (2)

R. Puers, D. De Bruyker, and A. Cozma, Sens. Actuat. A 60, 68 (1997).

N. Servagent, T. Bosch, and M. Lescure, IEEE Trans. Instrum. Meas. 46, 847 (1997).

1996 (3)

C. J. Welham, J. W. Gardner, and J. Greenwood, Sens. Actuat. A 52, 86 (1996).

N. Takahashi, S. Kakuma, and R. Ohba, Opt. Eng. 35, 802 (1996).

Goran Stemme, J. Micromech. Microeng. 1, 113 (1996).

1994 (1)

W. M. Wang, K. T. V. Grattan, A. W. Palmer, and W. J. O. Boyle, J. Lightwave Technol. 12, 1577 (1994).

1987 (1)

Annovazzi-Lodi, V.

V. Annovazzi-Lodi, S. Merlo, and M. Norgia, J. Microelectromech. Syst. 10, 327 (2001).

Bes, C.

G. Plantier, C. Bes, and T. Bosch, IEEE J. Quantum Electron. 41, 1157 (2005).

Bosch, T.

G. Plantier, C. Bes, and T. Bosch, IEEE J. Quantum Electron. 41, 1157 (2005).

T. Bosch and N. Servagent, Opt. Eng. 40, 20 (2001).

N. Servagent, T. Bosch, and M. Lescure, IEEE Trans. Instrum. Meas. 46, 847 (1997).

Boyle, W. J. O.

W. M. Wang, K. T. V. Grattan, A. W. Palmer, and W. J. O. Boyle, J. Lightwave Technol. 12, 1577 (1994).

Bruyker, D. De

R. Puers, D. De Bruyker, and A. Cozma, Sens. Actuat. A 60, 68 (1997).

Calleja, M.

D. Ramos, J. Tamayo, J. Mertens, and M. Calleja, J. Appl. Phys. 99, 124904 (2006).

Cozma, A.

R. Puers, D. De Bruyker, and A. Cozma, Sens. Actuat. A 60, 68 (1997).

Datskos, P. G.

N. V. Lavrik and P. G. Datskos, Appl. Phys. Lett. 82, 2697 (2003).

Dickinson, M.

C. Zakian and M. Dickinson, J. Opt. Pure Appl. Opt. 8, 555 (2006).

Gardner, J. W.

C. J. Welham, J. W. Gardner, and J. Greenwood, Sens. Actuat. A 52, 86 (1996).

Gerber, C.

U. Gysin, S. Rast, P. Ruff, E. Meyer, D. W. Lee, P. Vettiger, and C. Gerber, Phys. Rev. B 69, 045403 (2004).

Grattan, K. T. V.

W. M. Wang, K. T. V. Grattan, A. W. Palmer, and W. J. O. Boyle, J. Lightwave Technol. 12, 1577 (1994).

Greenwood, J.

C. J. Welham, J. W. Gardner, and J. Greenwood, Sens. Actuat. A 52, 86 (1996).

Gysin, U.

U. Gysin, S. Rast, P. Ruff, E. Meyer, D. W. Lee, P. Vettiger, and C. Gerber, Phys. Rev. B 69, 045403 (2004).

Hirabayashi, S.

T. Suzuki, S. Hirabayashi, O. Sasaki, and T. Maruyama, Appl. Opt. 38, 543 (1999).

Kakuma, S.

N. Takahashi, S. Kakuma, and R. Ohba, Opt. Eng. 35, 802 (1996).

Lavrik, N. V.

N. V. Lavrik and P. G. Datskos, Appl. Phys. Lett. 82, 2697 (2003).

Lee, B. S.

Lee, D. W.

U. Gysin, S. Rast, P. Ruff, E. Meyer, D. W. Lee, P. Vettiger, and C. Gerber, Phys. Rev. B 69, 045403 (2004).

Lescure, M.

N. Servagent, T. Bosch, and M. Lescure, IEEE Trans. Instrum. Meas. 46, 847 (1997).

Liu, Y.

Y. Liu and X. Wang, Chinese J. Lasers (in Chinese) 33, 1661 (2006).

Y. Liu, X. Wang, and X. Wang, Chin. Opt. Lett. 4, 1 (2006).

Maruyama, T.

T. Suzuki, S. Hirabayashi, O. Sasaki, and T. Maruyama, Appl. Opt. 38, 543 (1999).

Merlo, S.

V. Annovazzi-Lodi, S. Merlo, and M. Norgia, J. Microelectromech. Syst. 10, 327 (2001).

Mertens, J.

D. Ramos, J. Tamayo, J. Mertens, and M. Calleja, J. Appl. Phys. 99, 124904 (2006).

Meyer, E.

U. Gysin, S. Rast, P. Ruff, E. Meyer, D. W. Lee, P. Vettiger, and C. Gerber, Phys. Rev. B 69, 045403 (2004).

Mnatzakanian, S.

Nara, M.

Norgia, M.

V. Annovazzi-Lodi, S. Merlo, and M. Norgia, J. Microelectromech. Syst. 10, 327 (2001).

Ohba, R.

N. Takahashi, S. Kakuma, and R. Ohba, Opt. Eng. 35, 802 (1996).

Palmer, A. W.

W. M. Wang, K. T. V. Grattan, A. W. Palmer, and W. J. O. Boyle, J. Lightwave Technol. 12, 1577 (1994).

Plantier, G.

G. Plantier, C. Bes, and T. Bosch, IEEE J. Quantum Electron. 41, 1157 (2005).

Puers, R.

R. Puers, D. De Bruyker, and A. Cozma, Sens. Actuat. A 60, 68 (1997).

Ramos, D.

D. Ramos, J. Tamayo, J. Mertens, and M. Calleja, J. Appl. Phys. 99, 124904 (2006).

Rast, S.

U. Gysin, S. Rast, P. Ruff, E. Meyer, D. W. Lee, P. Vettiger, and C. Gerber, Phys. Rev. B 69, 045403 (2004).

Ruff, P.

U. Gysin, S. Rast, P. Ruff, E. Meyer, D. W. Lee, P. Vettiger, and C. Gerber, Phys. Rev. B 69, 045403 (2004).

Sasaki, O.

T. Suzuki, S. Hirabayashi, O. Sasaki, and T. Maruyama, Appl. Opt. 38, 543 (1999).

Servagent, N.

T. Bosch and N. Servagent, Opt. Eng. 40, 20 (2001).

N. Servagent, T. Bosch, and M. Lescure, IEEE Trans. Instrum. Meas. 46, 847 (1997).

Stemme, Goran

Goran Stemme, J. Micromech. Microeng. 1, 113 (1996).

Strand, T. C.

Suzuki, T.

T. Suzuki, S. Hirabayashi, O. Sasaki, and T. Maruyama, Appl. Opt. 38, 543 (1999).

Takahashi, N.

N. Takahashi, S. Kakuma, and R. Ohba, Opt. Eng. 35, 802 (1996).

Tamayo, J.

D. Ramos, J. Tamayo, J. Mertens, and M. Calleja, J. Appl. Phys. 99, 124904 (2006).

Vettiger, P.

U. Gysin, S. Rast, P. Ruff, E. Meyer, D. W. Lee, P. Vettiger, and C. Gerber, Phys. Rev. B 69, 045403 (2004).

Wang, W. M.

W. M. Wang, K. T. V. Grattan, A. W. Palmer, and W. J. O. Boyle, J. Lightwave Technol. 12, 1577 (1994).

Wang, X.

Welham, C. J.

C. J. Welham, J. W. Gardner, and J. Greenwood, Sens. Actuat. A 52, 86 (1996).

Yoshino, T.

Zakian, C.

C. Zakian and M. Dickinson, J. Opt. Pure Appl. Opt. 8, 555 (2006).

Appl. Opt. (2)

T. Yoshino, M. Nara, S. Mnatzakanian, B. S. Lee, and T. C. Strand, Appl. Opt. 26, 892 (1987).

T. Suzuki, S. Hirabayashi, O. Sasaki, and T. Maruyama, Appl. Opt. 38, 543 (1999).

Appl. Phys. Lett. (1)

N. V. Lavrik and P. G. Datskos, Appl. Phys. Lett. 82, 2697 (2003).

Chin. Opt. Lett. (1)

Chinese J. Lasers (in Chinese) (1)

Y. Liu and X. Wang, Chinese J. Lasers (in Chinese) 33, 1661 (2006).

IEEE J. Quantum Electron. (1)

G. Plantier, C. Bes, and T. Bosch, IEEE J. Quantum Electron. 41, 1157 (2005).

IEEE Trans. Instrum. Meas. (1)

N. Servagent, T. Bosch, and M. Lescure, IEEE Trans. Instrum. Meas. 46, 847 (1997).

J. Appl. Phys. (1)

D. Ramos, J. Tamayo, J. Mertens, and M. Calleja, J. Appl. Phys. 99, 124904 (2006).

J. Lightwave Technol. (1)

W. M. Wang, K. T. V. Grattan, A. W. Palmer, and W. J. O. Boyle, J. Lightwave Technol. 12, 1577 (1994).

J. Microelectromech. Syst. (1)

V. Annovazzi-Lodi, S. Merlo, and M. Norgia, J. Microelectromech. Syst. 10, 327 (2001).

J. Micromech. Microeng. (1)

Goran Stemme, J. Micromech. Microeng. 1, 113 (1996).

J. Opt. Pure Appl. Opt. (1)

C. Zakian and M. Dickinson, J. Opt. Pure Appl. Opt. 8, 555 (2006).

Opt. Eng. (2)

T. Bosch and N. Servagent, Opt. Eng. 40, 20 (2001).

N. Takahashi, S. Kakuma, and R. Ohba, Opt. Eng. 35, 802 (1996).

Phys. Rev. B (1)

U. Gysin, S. Rast, P. Ruff, E. Meyer, D. W. Lee, P. Vettiger, and C. Gerber, Phys. Rev. B 69, 045403 (2004).

Sens. Actuat. A (2)

C. J. Welham, J. W. Gardner, and J. Greenwood, Sens. Actuat. A 52, 86 (1996).

R. Puers, D. De Bruyker, and A. Cozma, Sens. Actuat. A 60, 68 (1997).

Other (1)

G. Plantier, C. Bes, T. Bosch, and F. Bony, in Proceedings of IMTC 1013 (2005).

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