Abstract

We report the fabrication of submicrometer pits array (SP-array) on 6H-SiC surface by the interference of two femtosecond laser beams. Formation mechanisms and optical absorption of SP-array are studied. The relative reflectivity and transmissivity of white light decrease to 10% of the values of SiC crystal, and the optical absorption is enhanced to 97%. The relative reflectivity and transmissivity of incident angles within the range of 20o~60o are kept below 25%. The enhancement mechanism of optical absorption of the SP-array is also discussed.

© 2010 Chinese Optics Letters

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