Abstract

Numerical calculations based on the transfer matrix method are carried out, and the results of band gap with resonance peaks are obtained. The electron beam lithography technology (EBL) and induction coupling plasma (ICP) etching are used to make the photonic crystal (PC) structures, and from several scanning electron microscope images, the PC structures are observed with features closing to the design. In order to create the tiny PC structures in the right places of the waveguide by the EBL technology at different time, some alignment markers are deposited on the chip, which are made of gold that deposited on titanium for its good adhesion to the underlying Si. An optical testing bed is designed for measurement of the optical characterization of PC structures. Through the analysis of the measured data, \Delta \lambda value of 0.8 nm is obtained and for the centre frequency of 1547 nm, a very high quality factor value of 1933 can be obtained. The 3-nm difference represents only a 0.2% error from the theoretical centre.

© 2010 Chinese Optics Letters

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  1. Y. Benachour and N. Paraire, Chin. Opt. Lett. 5, 501 (2007).
  2. O. N. Kozina and L. A. Melnikov, J. Non-Cryst. Solids 353, 968 (2007).
  3. E. Galindo-Linares, P. Halevi, and A. S. Sanchez, Solid State Commun. 142, 67 (2007).
  4. W. L. Vos, R. Sprik, A. van Blaaderen, A. Imhof, A. Lagendijk, and G. H. Wegdam, Phys. Rev. B 53, 16231 (1996).
  5. I. I. Tarhan and G. H. Watson, Phys. Rev. Lett. 76, 315 (1996).
  6. T. M. Miller, H. Fang, R. H. Magruder III, and R. A. Weller, Sensors and Actuators A 104, 162 (2003).
  7. S. Gupta, G. Tuttle, M. Sigalas, and K.-M. Ho, Appl. Phys. Lett. 71, 2412 (1997).
  8. A. Ferrando and J. J. Miret, Appl. Phy. Lett. 78, 3184 (2001).
  9. T. Prasad, D. M. Mittleman, and V. L. Colvin, Opt. Mater. 29, 56 (2006).
  10. L. Tang, L. Gao, and J. Fang, Chin. Opt. Lett. 6, 201 (2008).
  11. Z. Li, T. Shen, X. Song, J. Ma, Y. Sheng, and G. Wang, Chin. Opt. Lett. 5, 696 (2007).

2008 (1)

2007 (4)

Z. Li, T. Shen, X. Song, J. Ma, Y. Sheng, and G. Wang, Chin. Opt. Lett. 5, 696 (2007).

Y. Benachour and N. Paraire, Chin. Opt. Lett. 5, 501 (2007).

O. N. Kozina and L. A. Melnikov, J. Non-Cryst. Solids 353, 968 (2007).

E. Galindo-Linares, P. Halevi, and A. S. Sanchez, Solid State Commun. 142, 67 (2007).

2006 (1)

T. Prasad, D. M. Mittleman, and V. L. Colvin, Opt. Mater. 29, 56 (2006).

2003 (1)

T. M. Miller, H. Fang, R. H. Magruder III, and R. A. Weller, Sensors and Actuators A 104, 162 (2003).

2001 (1)

A. Ferrando and J. J. Miret, Appl. Phy. Lett. 78, 3184 (2001).

1997 (1)

S. Gupta, G. Tuttle, M. Sigalas, and K.-M. Ho, Appl. Phys. Lett. 71, 2412 (1997).

1996 (2)

W. L. Vos, R. Sprik, A. van Blaaderen, A. Imhof, A. Lagendijk, and G. H. Wegdam, Phys. Rev. B 53, 16231 (1996).

I. I. Tarhan and G. H. Watson, Phys. Rev. Lett. 76, 315 (1996).

Benachour, Y.

Colvin, V. L.

T. Prasad, D. M. Mittleman, and V. L. Colvin, Opt. Mater. 29, 56 (2006).

Fang, H.

T. M. Miller, H. Fang, R. H. Magruder III, and R. A. Weller, Sensors and Actuators A 104, 162 (2003).

Fang, J.

Ferrando, A.

A. Ferrando and J. J. Miret, Appl. Phy. Lett. 78, 3184 (2001).

Galindo-Linares, E.

E. Galindo-Linares, P. Halevi, and A. S. Sanchez, Solid State Commun. 142, 67 (2007).

Gao, L.

Gupta, S.

S. Gupta, G. Tuttle, M. Sigalas, and K.-M. Ho, Appl. Phys. Lett. 71, 2412 (1997).

Halevi, P.

E. Galindo-Linares, P. Halevi, and A. S. Sanchez, Solid State Commun. 142, 67 (2007).

Ho, K.-M.

S. Gupta, G. Tuttle, M. Sigalas, and K.-M. Ho, Appl. Phys. Lett. 71, 2412 (1997).

III, R. H. Magruder

T. M. Miller, H. Fang, R. H. Magruder III, and R. A. Weller, Sensors and Actuators A 104, 162 (2003).

Imhof, A.

W. L. Vos, R. Sprik, A. van Blaaderen, A. Imhof, A. Lagendijk, and G. H. Wegdam, Phys. Rev. B 53, 16231 (1996).

Kozina, O. N.

O. N. Kozina and L. A. Melnikov, J. Non-Cryst. Solids 353, 968 (2007).

Lagendijk, A.

W. L. Vos, R. Sprik, A. van Blaaderen, A. Imhof, A. Lagendijk, and G. H. Wegdam, Phys. Rev. B 53, 16231 (1996).

Li, Z.

Ma, J.

Melnikov, L. A.

O. N. Kozina and L. A. Melnikov, J. Non-Cryst. Solids 353, 968 (2007).

Miller, T. M.

T. M. Miller, H. Fang, R. H. Magruder III, and R. A. Weller, Sensors and Actuators A 104, 162 (2003).

Miret, J. J.

A. Ferrando and J. J. Miret, Appl. Phy. Lett. 78, 3184 (2001).

Mittleman, D. M.

T. Prasad, D. M. Mittleman, and V. L. Colvin, Opt. Mater. 29, 56 (2006).

Paraire, N.

Prasad, T.

T. Prasad, D. M. Mittleman, and V. L. Colvin, Opt. Mater. 29, 56 (2006).

Sanchez, A. S.

E. Galindo-Linares, P. Halevi, and A. S. Sanchez, Solid State Commun. 142, 67 (2007).

Shen, T.

Sheng, Y.

Sigalas, M.

S. Gupta, G. Tuttle, M. Sigalas, and K.-M. Ho, Appl. Phys. Lett. 71, 2412 (1997).

Song, X.

Sprik, R.

W. L. Vos, R. Sprik, A. van Blaaderen, A. Imhof, A. Lagendijk, and G. H. Wegdam, Phys. Rev. B 53, 16231 (1996).

Tang, L.

Tarhan, I. I.

I. I. Tarhan and G. H. Watson, Phys. Rev. Lett. 76, 315 (1996).

Tuttle, G.

S. Gupta, G. Tuttle, M. Sigalas, and K.-M. Ho, Appl. Phys. Lett. 71, 2412 (1997).

van Blaaderen, A.

W. L. Vos, R. Sprik, A. van Blaaderen, A. Imhof, A. Lagendijk, and G. H. Wegdam, Phys. Rev. B 53, 16231 (1996).

Vos, W. L.

W. L. Vos, R. Sprik, A. van Blaaderen, A. Imhof, A. Lagendijk, and G. H. Wegdam, Phys. Rev. B 53, 16231 (1996).

Wang, G.

Watson, G. H.

I. I. Tarhan and G. H. Watson, Phys. Rev. Lett. 76, 315 (1996).

Wegdam, G. H.

W. L. Vos, R. Sprik, A. van Blaaderen, A. Imhof, A. Lagendijk, and G. H. Wegdam, Phys. Rev. B 53, 16231 (1996).

Weller, R. A.

T. M. Miller, H. Fang, R. H. Magruder III, and R. A. Weller, Sensors and Actuators A 104, 162 (2003).

Appl. Phy. Lett. (1)

A. Ferrando and J. J. Miret, Appl. Phy. Lett. 78, 3184 (2001).

Appl. Phys. Lett. (1)

S. Gupta, G. Tuttle, M. Sigalas, and K.-M. Ho, Appl. Phys. Lett. 71, 2412 (1997).

Chin. Opt. Lett. (3)

J. Non-Cryst. Solids (1)

O. N. Kozina and L. A. Melnikov, J. Non-Cryst. Solids 353, 968 (2007).

Opt. Mater. (1)

T. Prasad, D. M. Mittleman, and V. L. Colvin, Opt. Mater. 29, 56 (2006).

Phys. Rev. B (1)

W. L. Vos, R. Sprik, A. van Blaaderen, A. Imhof, A. Lagendijk, and G. H. Wegdam, Phys. Rev. B 53, 16231 (1996).

Phys. Rev. Lett. (1)

I. I. Tarhan and G. H. Watson, Phys. Rev. Lett. 76, 315 (1996).

Sensors and Actuators A (1)

T. M. Miller, H. Fang, R. H. Magruder III, and R. A. Weller, Sensors and Actuators A 104, 162 (2003).

Solid State Commun. (1)

E. Galindo-Linares, P. Halevi, and A. S. Sanchez, Solid State Commun. 142, 67 (2007).

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