Abstract

In-line digital holography helps to relax the spatial resolution requirement on charge-coupled device sensors for digital recording of holograms and to utilize the full sensing area for image reconstruction which provides larger field of view and better imaging resolution. In this letter, a lensless in-line digital holographic microscopy is presented for dynamic metrology of micro-electro-mechanical systems devices. The methodologies of interferometry and time-averaged in-line digital holography are presented for dynamic measurements, which are also useful for simultaneous suppression of in-line waves from real image wave. The experimental results are presented for dynamic thermal characterization of microheater and vibration analysis of cantilevers.

© 2009 Chinese Optics Letters

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2009 (1)

B. Jayaraman, N. Bhat, and R. Pratap, J. Micromech. Microeng. 19, 085006 (2009).

2008 (1)

A. Andrei, K. Krupa, M. Jozwik, P. Delobelle, L. Hirsinger, C. Gorecki, L. Nieradko, and C. Meunier, Sens. Actuat. A 141, 565 (2008).

2007 (1)

V. R. Singh, J. Miao, Z. Wang, G. Hegde, and A. Asundi, Opt. Commun. 280, 285 (2007).

2006 (3)

A. Asundi and V. R. Singh, Meas. Sci. Technol. 17, 75 (2006).

A. Asundi and V. R. Singh, J. Holography Speckle 3, 103 (2006).

A. Asundi and V. R. Singh, Opt. Lett. 31, 2420 (2006).

2005 (2)

2004 (2)

L. Ma, H. Wang, Y. Li, and H. Jin, J. Opt. A: Pure Appl. Opt. 6, 396 (2004).

G. Coppola, P. Ferraro, M. Iodice, S. De Nicola, A. Finizio, and S. Grilli, Meas. Sci. Technol. 15, 529 (2004).

2002 (1)

U. Schnars and W. P. O. Jüptner, Meas. Sci. Technol. 13, R85 (2002).

2001 (1)

2000 (1)

L. Xu, J. Miao, and A. Asundi, Opt. Eng. 39, 3214 (2000).

1994 (1)

1965 (1)

Andrei, A.

A. Andrei, K. Krupa, M. Jozwik, P. Delobelle, L. Hirsinger, C. Gorecki, L. Nieradko, and C. Meunier, Sens. Actuat. A 141, 565 (2008).

Asundi, A.

V. R. Singh, J. Miao, Z. Wang, G. Hegde, and A. Asundi, Opt. Commun. 280, 285 (2007).

A. Asundi and V. R. Singh, J. Holography Speckle 3, 103 (2006).

A. Asundi and V. R. Singh, Meas. Sci. Technol. 17, 75 (2006).

A. Asundi and V. R. Singh, Opt. Lett. 31, 2420 (2006).

L. Xu, P. Z. Guo, M. Jianmin, and A. Asundi, Opt. Express 13, 2444 (2005).

L. Xu, X. Peng, J. Miao, and A. Asundi, Appl. Opt. 40, 5046 (2001).

L. Xu, J. Miao, and A. Asundi, Opt. Eng. 39, 3214 (2000).

Bhat, N.

B. Jayaraman, N. Bhat, and R. Pratap, J. Micromech. Microeng. 19, 085006 (2009).

Coppola, G.

G. Coppola, P. Ferraro, M. Iodice, S. De Nicola, A. Finizio, and S. Grilli, Meas. Sci. Technol. 15, 529 (2004).

Delobelle, P.

A. Andrei, K. Krupa, M. Jozwik, P. Delobelle, L. Hirsinger, C. Gorecki, L. Nieradko, and C. Meunier, Sens. Actuat. A 141, 565 (2008).

Ferraro, P.

G. Coppola, P. Ferraro, M. Iodice, S. De Nicola, A. Finizio, and S. Grilli, Meas. Sci. Technol. 15, 529 (2004).

Finizio, A.

G. Coppola, P. Ferraro, M. Iodice, S. De Nicola, A. Finizio, and S. Grilli, Meas. Sci. Technol. 15, 529 (2004).

Gorecki, C.

A. Andrei, K. Krupa, M. Jozwik, P. Delobelle, L. Hirsinger, C. Gorecki, L. Nieradko, and C. Meunier, Sens. Actuat. A 141, 565 (2008).

Gougeon, S.

Grilli, S.

G. Coppola, P. Ferraro, M. Iodice, S. De Nicola, A. Finizio, and S. Grilli, Meas. Sci. Technol. 15, 529 (2004).

Guo, P. Z.

Hegde, G.

V. R. Singh, J. Miao, Z. Wang, G. Hegde, and A. Asundi, Opt. Commun. 280, 285 (2007).

Hirsinger, L.

A. Andrei, K. Krupa, M. Jozwik, P. Delobelle, L. Hirsinger, C. Gorecki, L. Nieradko, and C. Meunier, Sens. Actuat. A 141, 565 (2008).

Iodice, M.

G. Coppola, P. Ferraro, M. Iodice, S. De Nicola, A. Finizio, and S. Grilli, Meas. Sci. Technol. 15, 529 (2004).

Jayaraman, B.

B. Jayaraman, N. Bhat, and R. Pratap, J. Micromech. Microeng. 19, 085006 (2009).

Jianmin, M.

Jin, H.

L. Ma, H. Wang, Y. Li, and H. Jin, J. Opt. A: Pure Appl. Opt. 6, 396 (2004).

Jozwik, M.

A. Andrei, K. Krupa, M. Jozwik, P. Delobelle, L. Hirsinger, C. Gorecki, L. Nieradko, and C. Meunier, Sens. Actuat. A 141, 565 (2008).

Jüptner, W.

Jüptner, W. P. O.

U. Schnars and W. P. O. Jüptner, Meas. Sci. Technol. 13, R85 (2002).

Krupa, K.

A. Andrei, K. Krupa, M. Jozwik, P. Delobelle, L. Hirsinger, C. Gorecki, L. Nieradko, and C. Meunier, Sens. Actuat. A 141, 565 (2008).

Leval, J.

Li, Y.

L. Ma, H. Wang, Y. Li, and H. Jin, J. Opt. A: Pure Appl. Opt. 6, 396 (2004).

Ma, L.

L. Ma, H. Wang, Y. Li, and H. Jin, J. Opt. A: Pure Appl. Opt. 6, 396 (2004).

Meunier, C.

A. Andrei, K. Krupa, M. Jozwik, P. Delobelle, L. Hirsinger, C. Gorecki, L. Nieradko, and C. Meunier, Sens. Actuat. A 141, 565 (2008).

Miao, J.

V. R. Singh, J. Miao, Z. Wang, G. Hegde, and A. Asundi, Opt. Commun. 280, 285 (2007).

L. Xu, X. Peng, J. Miao, and A. Asundi, Appl. Opt. 40, 5046 (2001).

L. Xu, J. Miao, and A. Asundi, Opt. Eng. 39, 3214 (2000).

Mounier, D.

Nicola, S. De

G. Coppola, P. Ferraro, M. Iodice, S. De Nicola, A. Finizio, and S. Grilli, Meas. Sci. Technol. 15, 529 (2004).

Nieradko, L.

A. Andrei, K. Krupa, M. Jozwik, P. Delobelle, L. Hirsinger, C. Gorecki, L. Nieradko, and C. Meunier, Sens. Actuat. A 141, 565 (2008).

Peng, X.

Picart, P.

Powell, R. L.

Pratap, R.

B. Jayaraman, N. Bhat, and R. Pratap, J. Micromech. Microeng. 19, 085006 (2009).

Schnars, U.

U. Schnars and W. P. O. Jüptner, Meas. Sci. Technol. 13, R85 (2002).

U. Schnars and W. Jüptner, Appl. Opt. 33, 179 (1994).

Singh, V. R.

V. R. Singh, J. Miao, Z. Wang, G. Hegde, and A. Asundi, Opt. Commun. 280, 285 (2007).

A. Asundi and V. R. Singh, J. Holography Speckle 3, 103 (2006).

A. Asundi and V. R. Singh, Meas. Sci. Technol. 17, 75 (2006).

A. Asundi and V. R. Singh, Opt. Lett. 31, 2420 (2006).

Stetson, K. A.

Wang, H.

L. Ma, H. Wang, Y. Li, and H. Jin, J. Opt. A: Pure Appl. Opt. 6, 396 (2004).

Wang, Z.

V. R. Singh, J. Miao, Z. Wang, G. Hegde, and A. Asundi, Opt. Commun. 280, 285 (2007).

Xu, L.

Appl. Opt. (3)

J. Holography Speckle (1)

A. Asundi and V. R. Singh, J. Holography Speckle 3, 103 (2006).

J. Micromech. Microeng. (1)

B. Jayaraman, N. Bhat, and R. Pratap, J. Micromech. Microeng. 19, 085006 (2009).

J. Opt. A: Pure Appl. Opt. (1)

L. Ma, H. Wang, Y. Li, and H. Jin, J. Opt. A: Pure Appl. Opt. 6, 396 (2004).

J. Opt. Soc. Am. (1)

Meas. Sci. Technol. (3)

A. Asundi and V. R. Singh, Meas. Sci. Technol. 17, 75 (2006).

G. Coppola, P. Ferraro, M. Iodice, S. De Nicola, A. Finizio, and S. Grilli, Meas. Sci. Technol. 15, 529 (2004).

U. Schnars and W. P. O. Jüptner, Meas. Sci. Technol. 13, R85 (2002).

Opt. Commun. (1)

V. R. Singh, J. Miao, Z. Wang, G. Hegde, and A. Asundi, Opt. Commun. 280, 285 (2007).

Opt. Eng. (1)

L. Xu, J. Miao, and A. Asundi, Opt. Eng. 39, 3214 (2000).

Opt. Express (1)

Opt. Lett. (1)

Sens. Actuat. A (1)

A. Andrei, K. Krupa, M. Jozwik, P. Delobelle, L. Hirsinger, C. Gorecki, L. Nieradko, and C. Meunier, Sens. Actuat. A 141, 565 (2008).

Other (4)

C. M. Vest, Holographic Interferometry (Wiely, New York, 1992).

J. W. Goodman, Introduction to Fourier Optics (McGraw-Hill, New York, 1996).

N. Maluf, An Introduction to Microelectromechanical Systems (Artech House, Boston, 2000).

M. J. Madou, Fundamentals of Microfabrication (CRCPress, Boca Raton, 1998).

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