Abstract

We propose a novel spatial phase-shifting interferometry that exploits a genetic algorithm to compensate for geometric errors. Spatial phase-shifting interferometry is more suitable for measuring objects with properties that change rapidly in time than the temporal phase-shifting interferometry. However, it is more susceptible to the geometric errors since the positions at which interferograms are collected are different. In this letter, we propose a spatial phase-shifting interferometry with separate paths for object and reference waves. Also, the object wave estimate is parameterized in terms of geometric errors, and the error is compensated by using a genetic algorithm.

© 2009 Chinese Optics Letters

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  1. I. Yamaguchi, "Phase-shifting digital holography" in T.-C. Poon, (ed.) Digital Holography and Three-Dimensional Display (Springer, Berlin, 2006)pp.145¡171.
  2. J. Hahn, H. Kim, S.-W. Cho, and B. Lee, Appl. Opt. 47, 4068 (2008).
  3. J. Hahn, H. Kim, E.-H. Kim, J. Park, and B. Lee, Proc. SPIE 7056, 70561N (2008).
  4. M. Kujawinska, "Spatial phase measurement methods" in D. W. Robinson and G. T. Reid, (eds.) Interferogram Analysis, Digital Fringe Pattern Measurement Techniques (Taylor & Francis, London, 1993) pp.141-193.
  5. J. C. Wyant, Opt. Photon. News 14, (4) 36 (2003).
  6. R. Smythe and R. Moore, Opt. Eng. 23, 361 (1984).
  7. H. Kihm and S.-W. Kim, Opt. Lett. 30, 2059 (2005).
  8. O. Y. Kwon, Opt. Lett. 9, 59 (1984).
  9. M. Takeda, Ind. Metrol. 1, 79 (1990).
  10. J. P. Guo and D. J. Brady, Opt. Eng. 36, 2268 (1997).
  11. J. Millerd, N. Brock, J. Hayes, M. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5531, 304 (2004).
  12. Y. Awatsuji, M. Sasada, and T. Kubota, Appl. Phys. Lett. 85, 1069 (2004).

2008 (2)

J. Hahn, H. Kim, S.-W. Cho, and B. Lee, Appl. Opt. 47, 4068 (2008).

J. Hahn, H. Kim, E.-H. Kim, J. Park, and B. Lee, Proc. SPIE 7056, 70561N (2008).

2005 (1)

2004 (2)

J. Millerd, N. Brock, J. Hayes, M. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5531, 304 (2004).

Y. Awatsuji, M. Sasada, and T. Kubota, Appl. Phys. Lett. 85, 1069 (2004).

2003 (1)

J. C. Wyant, Opt. Photon. News 14, (4) 36 (2003).

1997 (1)

J. P. Guo and D. J. Brady, Opt. Eng. 36, 2268 (1997).

1990 (1)

M. Takeda, Ind. Metrol. 1, 79 (1990).

1984 (2)

O. Y. Kwon, Opt. Lett. 9, 59 (1984).

R. Smythe and R. Moore, Opt. Eng. 23, 361 (1984).

Awatsuji, Y.

Y. Awatsuji, M. Sasada, and T. Kubota, Appl. Phys. Lett. 85, 1069 (2004).

Brady, D. J.

J. P. Guo and D. J. Brady, Opt. Eng. 36, 2268 (1997).

Brock, N.

J. Millerd, N. Brock, J. Hayes, M. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5531, 304 (2004).

Cho, S.-W.

Guo, J. P.

J. P. Guo and D. J. Brady, Opt. Eng. 36, 2268 (1997).

Hahn, J.

J. Hahn, H. Kim, S.-W. Cho, and B. Lee, Appl. Opt. 47, 4068 (2008).

J. Hahn, H. Kim, E.-H. Kim, J. Park, and B. Lee, Proc. SPIE 7056, 70561N (2008).

Hayes, J.

J. Millerd, N. Brock, J. Hayes, M. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5531, 304 (2004).

Kihm, H.

Kim, E.-H.

J. Hahn, H. Kim, E.-H. Kim, J. Park, and B. Lee, Proc. SPIE 7056, 70561N (2008).

Kim, H.

J. Hahn, H. Kim, E.-H. Kim, J. Park, and B. Lee, Proc. SPIE 7056, 70561N (2008).

J. Hahn, H. Kim, S.-W. Cho, and B. Lee, Appl. Opt. 47, 4068 (2008).

Kim, S.-W.

Kubota, T.

Y. Awatsuji, M. Sasada, and T. Kubota, Appl. Phys. Lett. 85, 1069 (2004).

Kwon, O. Y.

Lee, B.

J. Hahn, H. Kim, E.-H. Kim, J. Park, and B. Lee, Proc. SPIE 7056, 70561N (2008).

J. Hahn, H. Kim, S.-W. Cho, and B. Lee, Appl. Opt. 47, 4068 (2008).

Millerd, J.

J. Millerd, N. Brock, J. Hayes, M. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5531, 304 (2004).

Moore, R.

R. Smythe and R. Moore, Opt. Eng. 23, 361 (1984).

North-Morris, M.

J. Millerd, N. Brock, J. Hayes, M. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5531, 304 (2004).

Novak, M.

J. Millerd, N. Brock, J. Hayes, M. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5531, 304 (2004).

Park, J.

J. Hahn, H. Kim, E.-H. Kim, J. Park, and B. Lee, Proc. SPIE 7056, 70561N (2008).

Sasada, M.

Y. Awatsuji, M. Sasada, and T. Kubota, Appl. Phys. Lett. 85, 1069 (2004).

Smythe, R.

R. Smythe and R. Moore, Opt. Eng. 23, 361 (1984).

Takeda, M.

M. Takeda, Ind. Metrol. 1, 79 (1990).

Wyant, J. C.

J. Millerd, N. Brock, J. Hayes, M. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5531, 304 (2004).

J. C. Wyant, Opt. Photon. News 14, (4) 36 (2003).

Appl. Opt. (1)

Appl. Phys. Lett. (1)

Y. Awatsuji, M. Sasada, and T. Kubota, Appl. Phys. Lett. 85, 1069 (2004).

Ind. Metrol. (1)

M. Takeda, Ind. Metrol. 1, 79 (1990).

Opt. Eng. (2)

J. P. Guo and D. J. Brady, Opt. Eng. 36, 2268 (1997).

R. Smythe and R. Moore, Opt. Eng. 23, 361 (1984).

Opt. Lett. (2)

Opt. Photon. News (1)

J. C. Wyant, Opt. Photon. News 14, (4) 36 (2003).

Proc. SPIE (2)

J. Hahn, H. Kim, E.-H. Kim, J. Park, and B. Lee, Proc. SPIE 7056, 70561N (2008).

J. Millerd, N. Brock, J. Hayes, M. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5531, 304 (2004).

Other (2)

M. Kujawinska, "Spatial phase measurement methods" in D. W. Robinson and G. T. Reid, (eds.) Interferogram Analysis, Digital Fringe Pattern Measurement Techniques (Taylor & Francis, London, 1993) pp.141-193.

I. Yamaguchi, "Phase-shifting digital holography" in T.-C. Poon, (ed.) Digital Holography and Three-Dimensional Display (Springer, Berlin, 2006)pp.145¡171.

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