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Optica Publishing Group
  • Chinese Optics Letters
  • Vol. 7,
  • Issue 12,
  • pp. 1113-1116
  • (2009)

Spatial phase-shifting interferometry with compensation of geometric errors based on genetic algorithm

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Abstract

We propose a novel spatial phase-shifting interferometry that exploits a genetic algorithm to compensate for geometric errors. Spatial phase-shifting interferometry is more suitable for measuring objects with properties that change rapidly in time than the temporal phase-shifting interferometry. However, it is more susceptible to the geometric errors since the positions at which interferograms are collected are different. In this letter, we propose a spatial phase-shifting interferometry with separate paths for object and reference waves. Also, the object wave estimate is parameterized in terms of geometric errors, and the error is compensated by using a genetic algorithm.

© 2009 Chinese Optics Letters

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