Abstract

The reliability of microsystem is an important issue and for their quality inspection, it is necessary to know the displacements or deformations due to the applied mechanical, thermal, or electrostatic loads. We show interferometrical techniques like digital holography and speckle interferometry can be used for the measurement of in plane deformations of microsystems with nanometric accuracy and we give a description of the measurement uncertainties.

© 2009 Chinese Optics Letters

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  1. J. Korvink and O. Paul, (eds.) MEMS - A Practical Guide to Design, Analysis and Applications (William Andrew Publishing, Norwich, 2006).
  2. W. Osten, (ed.) Optical Inspection of Microsystems (CRC Press, Boca Raton, 2006).
  3. W. Osten, (ed.) Optical Microsystems Metrology I. Special Issue of Opt. Lasers Eng. 36, (2) (2001).
  4. W. Osten, (ed.) Optical Microsystems Metrology II. Special Issue of Opt. Lasers Eng. 36, (5) (2001).
  5. J. Gaspar, M. Schmidt, J. Held, and O. Paul, in Proceedings of IEEE MEMS 2008 439 (2008).
  6. U. Schnars, J. Opt. Soc. Am. A 11, 2011 (1994).
  7. G. Pedrini, Y. L. Zou, and H. J. Tiziani, J. Mod. Opt. 42, 367 (1995).
  8. G. Pedrini and H. J. Tiziani, "Digital holographic interferometry" in P. K. Rastogi, (ed.) Digital Speckle Pattern Interferometry and Related Techniques (Wiley, Chichester, 2001) pp.337-362.
  9. S. Schedin, G. Pedrini, H. J. Tiziani, and F. Mendoza, Appl. Opt. 38, 7056 (1999).
  10. K. Creath, Appl. Opt. 24, 3053 (1985).
  11. R. Jones and C. Wykes, Holographic and Speckle Interferometry (2nd edn.) (Cambridge University Press, Cambridge, 1989).
  12. M. Lehmann, Appl. Opt. 36, 3657 (1997).
  13. G. Pedrini, J. Gaspar, T. Wu, W. Osten, and O. Paul, Opt. Lasers Eng. 47, 203 (2009).
  14. G. Pedrini, J. Gaspar, W. Osten, and O. Paul, "Development of reference standards for the calibration of optical systems used in the measurement of microcomponents" Strain (Published Online: Jan. 23, 2009).
  15. "Guide to the expression on uncertainty in measurement" DIN V ENV 13005 (1999).
  16. B. N. Taylor and C. E. Kuyatt, "NIST technical note 1297 1994 edition guidelines for evaluating and expressing the uncertainty of NIST measurement results" (1994).

2009

G. Pedrini, J. Gaspar, T. Wu, W. Osten, and O. Paul, Opt. Lasers Eng. 47, 203 (2009).

1999

1997

1995

G. Pedrini, Y. L. Zou, and H. J. Tiziani, J. Mod. Opt. 42, 367 (1995).

1994

1985

Creath, K.

Gaspar, J.

G. Pedrini, J. Gaspar, T. Wu, W. Osten, and O. Paul, Opt. Lasers Eng. 47, 203 (2009).

Lehmann, M.

Mendoza, F.

Osten, W.

G. Pedrini, J. Gaspar, T. Wu, W. Osten, and O. Paul, Opt. Lasers Eng. 47, 203 (2009).

Paul, O.

G. Pedrini, J. Gaspar, T. Wu, W. Osten, and O. Paul, Opt. Lasers Eng. 47, 203 (2009).

Pedrini, G.

G. Pedrini, J. Gaspar, T. Wu, W. Osten, and O. Paul, Opt. Lasers Eng. 47, 203 (2009).

S. Schedin, G. Pedrini, H. J. Tiziani, and F. Mendoza, Appl. Opt. 38, 7056 (1999).

G. Pedrini, Y. L. Zou, and H. J. Tiziani, J. Mod. Opt. 42, 367 (1995).

Schedin, S.

Schnars, U.

Tiziani, H. J.

S. Schedin, G. Pedrini, H. J. Tiziani, and F. Mendoza, Appl. Opt. 38, 7056 (1999).

G. Pedrini, Y. L. Zou, and H. J. Tiziani, J. Mod. Opt. 42, 367 (1995).

Wu, T.

G. Pedrini, J. Gaspar, T. Wu, W. Osten, and O. Paul, Opt. Lasers Eng. 47, 203 (2009).

Zou, Y. L.

G. Pedrini, Y. L. Zou, and H. J. Tiziani, J. Mod. Opt. 42, 367 (1995).

Appl. Opt.

J. Mod. Opt.

G. Pedrini, Y. L. Zou, and H. J. Tiziani, J. Mod. Opt. 42, 367 (1995).

J. Opt. Soc. Am. A

Opt. Lasers Eng.

G. Pedrini, J. Gaspar, T. Wu, W. Osten, and O. Paul, Opt. Lasers Eng. 47, 203 (2009).

Other

G. Pedrini, J. Gaspar, W. Osten, and O. Paul, "Development of reference standards for the calibration of optical systems used in the measurement of microcomponents" Strain (Published Online: Jan. 23, 2009).

"Guide to the expression on uncertainty in measurement" DIN V ENV 13005 (1999).

B. N. Taylor and C. E. Kuyatt, "NIST technical note 1297 1994 edition guidelines for evaluating and expressing the uncertainty of NIST measurement results" (1994).

G. Pedrini and H. J. Tiziani, "Digital holographic interferometry" in P. K. Rastogi, (ed.) Digital Speckle Pattern Interferometry and Related Techniques (Wiley, Chichester, 2001) pp.337-362.

R. Jones and C. Wykes, Holographic and Speckle Interferometry (2nd edn.) (Cambridge University Press, Cambridge, 1989).

J. Korvink and O. Paul, (eds.) MEMS - A Practical Guide to Design, Analysis and Applications (William Andrew Publishing, Norwich, 2006).

W. Osten, (ed.) Optical Inspection of Microsystems (CRC Press, Boca Raton, 2006).

W. Osten, (ed.) Optical Microsystems Metrology I. Special Issue of Opt. Lasers Eng. 36, (2) (2001).

W. Osten, (ed.) Optical Microsystems Metrology II. Special Issue of Opt. Lasers Eng. 36, (5) (2001).

J. Gaspar, M. Schmidt, J. Held, and O. Paul, in Proceedings of IEEE MEMS 2008 439 (2008).

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