Abstract

Ultraviolet photo-lithography is employed to introduce two-dimensional (2D) photonic crystal (PC) structure on the top surface of GaN-based light emitting diode (LED). PC patterns are transferred to 460-nm-thick transparent indium tin oxide (ITO) electrode by inductively coupled plasma (ICP) etching. Light intensity of PC-LED can be enhanced by 38% comparing with the one without PC structure. Rigorous coupled wave analysis method is performed to calculate the light transmission spectrum of PC slab. Simulation results indicate that total internal reflect angle which modulated by PC structure has been increased by 7, which means that the light extraction efficiency is enhanced outstandingly.

© 2009 Chinese Optics Letters

PDF Article

References

  • View by:
  • |
  • |
  • |

  1. H. Benisty, H. De Neve, and C. Weisbuch, IEEE J. Quantum Electron. 34, 1612 (1998).
  2. F. S. Diana, A. David, I. Meinel, R. Sharma, C. Weisbuch, S. Nakamura, and P. M. Petroff, Nano Lett. 6, 1116 (2006).
  3. X. Jin, B. Zhang, T. Dai, W. Wei, X. Kang, G. Zhang, S. Trieu, and F. Wang, Chin. Opt. Lett. 6, 788 (2008).
  4. P. Niu, Y. Li, H. Liu, H. Hu, H. Jia, and H. Chen, Laser Optoelectron. Prog. (in Chinese) 44, (9) 43 (2007).
  5. H. Kuang, J. Liu, H. Cheng, and F. Jiang, Acta Opt. Sin. (in Chinese) 28, 143 (2008).
  6. C. Shen, H. Feng, Z. Xu, and S. Jin, Chin. Opt. Lett. 6, 152 (2008).
  7. S. Fan, P. R. Villeneuve, and J. D. Joannopoulos, Phys. Rev. Lett. 78, 3294 (1997).
  8. M.-K. Kwon, J.-Y. Kim, I.-K. Park, K. S. Kim, G.-Y. Jung, S.-J. Park, J. W. Kim, and Y. C. Kim, Appl. Phys. Lett. 92, 251110 (2008).
  9. B. Rong, H. W. M. Salemink, E. M. Roeling, R. van der Heijden, F. Karouta, and E. van der Drift, J. Vac. Sci. Technol. B 25, 2632 (2007).
  10. C. Liu, V. Kamaev, and Z. V. Vardeny, Appl. Phys. Lett. 86, 143501 (2005).

2008 (4)

X. Jin, B. Zhang, T. Dai, W. Wei, X. Kang, G. Zhang, S. Trieu, and F. Wang, Chin. Opt. Lett. 6, 788 (2008).

H. Kuang, J. Liu, H. Cheng, and F. Jiang, Acta Opt. Sin. (in Chinese) 28, 143 (2008).

C. Shen, H. Feng, Z. Xu, and S. Jin, Chin. Opt. Lett. 6, 152 (2008).

M.-K. Kwon, J.-Y. Kim, I.-K. Park, K. S. Kim, G.-Y. Jung, S.-J. Park, J. W. Kim, and Y. C. Kim, Appl. Phys. Lett. 92, 251110 (2008).

2007 (2)

B. Rong, H. W. M. Salemink, E. M. Roeling, R. van der Heijden, F. Karouta, and E. van der Drift, J. Vac. Sci. Technol. B 25, 2632 (2007).

P. Niu, Y. Li, H. Liu, H. Hu, H. Jia, and H. Chen, Laser Optoelectron. Prog. (in Chinese) 44, (9) 43 (2007).

2006 (1)

F. S. Diana, A. David, I. Meinel, R. Sharma, C. Weisbuch, S. Nakamura, and P. M. Petroff, Nano Lett. 6, 1116 (2006).

2005 (1)

C. Liu, V. Kamaev, and Z. V. Vardeny, Appl. Phys. Lett. 86, 143501 (2005).

1998 (1)

H. Benisty, H. De Neve, and C. Weisbuch, IEEE J. Quantum Electron. 34, 1612 (1998).

1997 (1)

S. Fan, P. R. Villeneuve, and J. D. Joannopoulos, Phys. Rev. Lett. 78, 3294 (1997).

Benisty, H.

H. Benisty, H. De Neve, and C. Weisbuch, IEEE J. Quantum Electron. 34, 1612 (1998).

Chen, H.

P. Niu, Y. Li, H. Liu, H. Hu, H. Jia, and H. Chen, Laser Optoelectron. Prog. (in Chinese) 44, (9) 43 (2007).

Cheng, H.

H. Kuang, J. Liu, H. Cheng, and F. Jiang, Acta Opt. Sin. (in Chinese) 28, 143 (2008).

Dai, T.

David, A.

F. S. Diana, A. David, I. Meinel, R. Sharma, C. Weisbuch, S. Nakamura, and P. M. Petroff, Nano Lett. 6, 1116 (2006).

Diana, F. S.

F. S. Diana, A. David, I. Meinel, R. Sharma, C. Weisbuch, S. Nakamura, and P. M. Petroff, Nano Lett. 6, 1116 (2006).

Drift, E. van der

B. Rong, H. W. M. Salemink, E. M. Roeling, R. van der Heijden, F. Karouta, and E. van der Drift, J. Vac. Sci. Technol. B 25, 2632 (2007).

Fan, S.

S. Fan, P. R. Villeneuve, and J. D. Joannopoulos, Phys. Rev. Lett. 78, 3294 (1997).

Feng, H.

Heijden, R. van der

B. Rong, H. W. M. Salemink, E. M. Roeling, R. van der Heijden, F. Karouta, and E. van der Drift, J. Vac. Sci. Technol. B 25, 2632 (2007).

Hu, H.

P. Niu, Y. Li, H. Liu, H. Hu, H. Jia, and H. Chen, Laser Optoelectron. Prog. (in Chinese) 44, (9) 43 (2007).

Jia, H.

P. Niu, Y. Li, H. Liu, H. Hu, H. Jia, and H. Chen, Laser Optoelectron. Prog. (in Chinese) 44, (9) 43 (2007).

Jiang, F.

H. Kuang, J. Liu, H. Cheng, and F. Jiang, Acta Opt. Sin. (in Chinese) 28, 143 (2008).

Jin, S.

Jin, X.

Joannopoulos, J. D.

S. Fan, P. R. Villeneuve, and J. D. Joannopoulos, Phys. Rev. Lett. 78, 3294 (1997).

Jung, G.-Y.

M.-K. Kwon, J.-Y. Kim, I.-K. Park, K. S. Kim, G.-Y. Jung, S.-J. Park, J. W. Kim, and Y. C. Kim, Appl. Phys. Lett. 92, 251110 (2008).

Kamaev, V.

C. Liu, V. Kamaev, and Z. V. Vardeny, Appl. Phys. Lett. 86, 143501 (2005).

Kang, X.

Karouta, F.

B. Rong, H. W. M. Salemink, E. M. Roeling, R. van der Heijden, F. Karouta, and E. van der Drift, J. Vac. Sci. Technol. B 25, 2632 (2007).

Kim, J. W.

M.-K. Kwon, J.-Y. Kim, I.-K. Park, K. S. Kim, G.-Y. Jung, S.-J. Park, J. W. Kim, and Y. C. Kim, Appl. Phys. Lett. 92, 251110 (2008).

Kim, J.-Y.

M.-K. Kwon, J.-Y. Kim, I.-K. Park, K. S. Kim, G.-Y. Jung, S.-J. Park, J. W. Kim, and Y. C. Kim, Appl. Phys. Lett. 92, 251110 (2008).

Kim, K. S.

M.-K. Kwon, J.-Y. Kim, I.-K. Park, K. S. Kim, G.-Y. Jung, S.-J. Park, J. W. Kim, and Y. C. Kim, Appl. Phys. Lett. 92, 251110 (2008).

Kim, Y. C.

M.-K. Kwon, J.-Y. Kim, I.-K. Park, K. S. Kim, G.-Y. Jung, S.-J. Park, J. W. Kim, and Y. C. Kim, Appl. Phys. Lett. 92, 251110 (2008).

Kuang, H.

H. Kuang, J. Liu, H. Cheng, and F. Jiang, Acta Opt. Sin. (in Chinese) 28, 143 (2008).

Kwon, M.-K.

M.-K. Kwon, J.-Y. Kim, I.-K. Park, K. S. Kim, G.-Y. Jung, S.-J. Park, J. W. Kim, and Y. C. Kim, Appl. Phys. Lett. 92, 251110 (2008).

Li, Y.

P. Niu, Y. Li, H. Liu, H. Hu, H. Jia, and H. Chen, Laser Optoelectron. Prog. (in Chinese) 44, (9) 43 (2007).

Liu, C.

C. Liu, V. Kamaev, and Z. V. Vardeny, Appl. Phys. Lett. 86, 143501 (2005).

Liu, H.

P. Niu, Y. Li, H. Liu, H. Hu, H. Jia, and H. Chen, Laser Optoelectron. Prog. (in Chinese) 44, (9) 43 (2007).

Liu, J.

H. Kuang, J. Liu, H. Cheng, and F. Jiang, Acta Opt. Sin. (in Chinese) 28, 143 (2008).

Meinel, I.

F. S. Diana, A. David, I. Meinel, R. Sharma, C. Weisbuch, S. Nakamura, and P. M. Petroff, Nano Lett. 6, 1116 (2006).

Nakamura, S.

F. S. Diana, A. David, I. Meinel, R. Sharma, C. Weisbuch, S. Nakamura, and P. M. Petroff, Nano Lett. 6, 1116 (2006).

Neve, H. De

H. Benisty, H. De Neve, and C. Weisbuch, IEEE J. Quantum Electron. 34, 1612 (1998).

Niu, P.

P. Niu, Y. Li, H. Liu, H. Hu, H. Jia, and H. Chen, Laser Optoelectron. Prog. (in Chinese) 44, (9) 43 (2007).

Park, I.-K.

M.-K. Kwon, J.-Y. Kim, I.-K. Park, K. S. Kim, G.-Y. Jung, S.-J. Park, J. W. Kim, and Y. C. Kim, Appl. Phys. Lett. 92, 251110 (2008).

Park, S.-J.

M.-K. Kwon, J.-Y. Kim, I.-K. Park, K. S. Kim, G.-Y. Jung, S.-J. Park, J. W. Kim, and Y. C. Kim, Appl. Phys. Lett. 92, 251110 (2008).

Petroff, P. M.

F. S. Diana, A. David, I. Meinel, R. Sharma, C. Weisbuch, S. Nakamura, and P. M. Petroff, Nano Lett. 6, 1116 (2006).

Roeling, E. M.

B. Rong, H. W. M. Salemink, E. M. Roeling, R. van der Heijden, F. Karouta, and E. van der Drift, J. Vac. Sci. Technol. B 25, 2632 (2007).

Rong, B.

B. Rong, H. W. M. Salemink, E. M. Roeling, R. van der Heijden, F. Karouta, and E. van der Drift, J. Vac. Sci. Technol. B 25, 2632 (2007).

Salemink, H. W. M.

B. Rong, H. W. M. Salemink, E. M. Roeling, R. van der Heijden, F. Karouta, and E. van der Drift, J. Vac. Sci. Technol. B 25, 2632 (2007).

Sharma, R.

F. S. Diana, A. David, I. Meinel, R. Sharma, C. Weisbuch, S. Nakamura, and P. M. Petroff, Nano Lett. 6, 1116 (2006).

Shen, C.

Trieu, S.

Vardeny, Z. V.

C. Liu, V. Kamaev, and Z. V. Vardeny, Appl. Phys. Lett. 86, 143501 (2005).

Villeneuve, P. R.

S. Fan, P. R. Villeneuve, and J. D. Joannopoulos, Phys. Rev. Lett. 78, 3294 (1997).

Wang, F.

Wei, W.

Weisbuch, C.

F. S. Diana, A. David, I. Meinel, R. Sharma, C. Weisbuch, S. Nakamura, and P. M. Petroff, Nano Lett. 6, 1116 (2006).

H. Benisty, H. De Neve, and C. Weisbuch, IEEE J. Quantum Electron. 34, 1612 (1998).

Xu, Z.

Zhang, B.

Zhang, G.

Acta Opt. Sin. (in Chinese) (1)

H. Kuang, J. Liu, H. Cheng, and F. Jiang, Acta Opt. Sin. (in Chinese) 28, 143 (2008).

Appl. Phys. Lett. (2)

M.-K. Kwon, J.-Y. Kim, I.-K. Park, K. S. Kim, G.-Y. Jung, S.-J. Park, J. W. Kim, and Y. C. Kim, Appl. Phys. Lett. 92, 251110 (2008).

C. Liu, V. Kamaev, and Z. V. Vardeny, Appl. Phys. Lett. 86, 143501 (2005).

Chin. Opt. Lett. (2)

IEEE J. Quantum Electron. (1)

H. Benisty, H. De Neve, and C. Weisbuch, IEEE J. Quantum Electron. 34, 1612 (1998).

J. Vac. Sci. Technol. B (1)

B. Rong, H. W. M. Salemink, E. M. Roeling, R. van der Heijden, F. Karouta, and E. van der Drift, J. Vac. Sci. Technol. B 25, 2632 (2007).

Laser Optoelectron. Prog. (in Chinese) (1)

P. Niu, Y. Li, H. Liu, H. Hu, H. Jia, and H. Chen, Laser Optoelectron. Prog. (in Chinese) 44, (9) 43 (2007).

Nano Lett. (1)

F. S. Diana, A. David, I. Meinel, R. Sharma, C. Weisbuch, S. Nakamura, and P. M. Petroff, Nano Lett. 6, 1116 (2006).

Phys. Rev. Lett. (1)

S. Fan, P. R. Villeneuve, and J. D. Joannopoulos, Phys. Rev. Lett. 78, 3294 (1997).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.