Abstract

Interferometric optical testing using computer-generated hologram (CGH) can give highly accurate measurement of aspheric surfaces has been proved. After the system is designed, a phase function is obtained according to the CGH's surface plane. For the requirement of accuracy, an optimization algorithm that transfers the phase function into a certain mask pattern file is presented in this letter, based on the relationship between the pattern error of CGH and the output wavefront accuracy. Then the writing machine is able to fabricate such a mask with this kind of file. With that mask, an improved procedure on fabrication of phase type CGH is also presented. Interferometric test results of an aspheric surface show that the whole test system obtains the demanded accuracy.

© 2009 Chinese Optics Letters

PDF Article

References

  • View by:
  • |
  • |
  • |

  1. H. J. Tiziani, S. Reichelt, C. Pruss, M. Rocktashel, and U. Hofbauer, Proc. SPIE 4440, 109 (2001).
  2. W. H. Wong and E. Y. B. Pun, J. Vac. Sci. Technol. B 19, 732 (2001).
  3. I. Steingoerrer, A. Grosse, and H. Fouckhardt, Proc. SPIE 4984, 234 (2003).
  4. Z. Gao, M. Kong, R. Zhu, and L. Chen. Chin. Opt. Lett. 5, 241 (2007).
  5. E. Bernhard Kley, W. Rockstroh, H. Schmidt, A. Drauschke, F. Wyrowski, and L. Witting, Proc. SPIE 4440, 135 (2001).
  6. A. Fercher, Opt. Acta 23, 347 (1976).
  7. I. Kallioniemi, J. Saarinen, K. Blomstedt, and J. Turunen, Appl. Opt. 36, 7217 (1997).
  8. Z. Chen, Y. Vladimirsky, M. Brown, Q. Leonard, O. Vladimirsky, F. Moore, B. Lai, W. Yun, and E. Gluskin, J. Vac. Sci. Technol. B 15, 2522 (1997).
  9. S. M. Arnold, Proc. SPIE 2536, 117 (1995).
  10. H. P. Herzig, (ed.) Micro-Optics: Elements, Systems and Applications (Taylor & Francis Ltd., London, 1997, Reprinted 1998) p.30.
  11. Y. Chang and J. H. Burge, Proc. SPIE 3782, 358 (1999).

2007 (1)

Z. Gao, M. Kong, R. Zhu, and L. Chen. Chin. Opt. Lett. 5, 241 (2007).

2003 (1)

I. Steingoerrer, A. Grosse, and H. Fouckhardt, Proc. SPIE 4984, 234 (2003).

2001 (3)

E. Bernhard Kley, W. Rockstroh, H. Schmidt, A. Drauschke, F. Wyrowski, and L. Witting, Proc. SPIE 4440, 135 (2001).

H. J. Tiziani, S. Reichelt, C. Pruss, M. Rocktashel, and U. Hofbauer, Proc. SPIE 4440, 109 (2001).

W. H. Wong and E. Y. B. Pun, J. Vac. Sci. Technol. B 19, 732 (2001).

1999 (1)

Y. Chang and J. H. Burge, Proc. SPIE 3782, 358 (1999).

1997 (2)

I. Kallioniemi, J. Saarinen, K. Blomstedt, and J. Turunen, Appl. Opt. 36, 7217 (1997).

Z. Chen, Y. Vladimirsky, M. Brown, Q. Leonard, O. Vladimirsky, F. Moore, B. Lai, W. Yun, and E. Gluskin, J. Vac. Sci. Technol. B 15, 2522 (1997).

1995 (1)

S. M. Arnold, Proc. SPIE 2536, 117 (1995).

1976 (1)

A. Fercher, Opt. Acta 23, 347 (1976).

Arnold, S. M.

S. M. Arnold, Proc. SPIE 2536, 117 (1995).

Blomstedt, K.

Brown, M.

Z. Chen, Y. Vladimirsky, M. Brown, Q. Leonard, O. Vladimirsky, F. Moore, B. Lai, W. Yun, and E. Gluskin, J. Vac. Sci. Technol. B 15, 2522 (1997).

Burge, J. H.

Y. Chang and J. H. Burge, Proc. SPIE 3782, 358 (1999).

Chang, Y.

Y. Chang and J. H. Burge, Proc. SPIE 3782, 358 (1999).

Chen, Z.

Z. Chen, Y. Vladimirsky, M. Brown, Q. Leonard, O. Vladimirsky, F. Moore, B. Lai, W. Yun, and E. Gluskin, J. Vac. Sci. Technol. B 15, 2522 (1997).

Drauschke, A.

E. Bernhard Kley, W. Rockstroh, H. Schmidt, A. Drauschke, F. Wyrowski, and L. Witting, Proc. SPIE 4440, 135 (2001).

Fercher, A.

A. Fercher, Opt. Acta 23, 347 (1976).

Fouckhardt, H.

I. Steingoerrer, A. Grosse, and H. Fouckhardt, Proc. SPIE 4984, 234 (2003).

Gao, Z.

Z. Gao, M. Kong, R. Zhu, and L. Chen. Chin. Opt. Lett. 5, 241 (2007).

Gluskin, E.

Z. Chen, Y. Vladimirsky, M. Brown, Q. Leonard, O. Vladimirsky, F. Moore, B. Lai, W. Yun, and E. Gluskin, J. Vac. Sci. Technol. B 15, 2522 (1997).

Grosse, A.

I. Steingoerrer, A. Grosse, and H. Fouckhardt, Proc. SPIE 4984, 234 (2003).

Hofbauer, U.

H. J. Tiziani, S. Reichelt, C. Pruss, M. Rocktashel, and U. Hofbauer, Proc. SPIE 4440, 109 (2001).

Kallioniemi, I.

Kley, E. Bernhard

E. Bernhard Kley, W. Rockstroh, H. Schmidt, A. Drauschke, F. Wyrowski, and L. Witting, Proc. SPIE 4440, 135 (2001).

Kong, M.

Z. Gao, M. Kong, R. Zhu, and L. Chen. Chin. Opt. Lett. 5, 241 (2007).

Lai, B.

Z. Chen, Y. Vladimirsky, M. Brown, Q. Leonard, O. Vladimirsky, F. Moore, B. Lai, W. Yun, and E. Gluskin, J. Vac. Sci. Technol. B 15, 2522 (1997).

Leonard, Q.

Z. Chen, Y. Vladimirsky, M. Brown, Q. Leonard, O. Vladimirsky, F. Moore, B. Lai, W. Yun, and E. Gluskin, J. Vac. Sci. Technol. B 15, 2522 (1997).

Moore, F.

Z. Chen, Y. Vladimirsky, M. Brown, Q. Leonard, O. Vladimirsky, F. Moore, B. Lai, W. Yun, and E. Gluskin, J. Vac. Sci. Technol. B 15, 2522 (1997).

Pruss, C.

H. J. Tiziani, S. Reichelt, C. Pruss, M. Rocktashel, and U. Hofbauer, Proc. SPIE 4440, 109 (2001).

Pun, E. Y. B.

W. H. Wong and E. Y. B. Pun, J. Vac. Sci. Technol. B 19, 732 (2001).

Reichelt, S.

H. J. Tiziani, S. Reichelt, C. Pruss, M. Rocktashel, and U. Hofbauer, Proc. SPIE 4440, 109 (2001).

Rockstroh, W.

E. Bernhard Kley, W. Rockstroh, H. Schmidt, A. Drauschke, F. Wyrowski, and L. Witting, Proc. SPIE 4440, 135 (2001).

Rocktashel, M.

H. J. Tiziani, S. Reichelt, C. Pruss, M. Rocktashel, and U. Hofbauer, Proc. SPIE 4440, 109 (2001).

Saarinen, J.

Schmidt, H.

E. Bernhard Kley, W. Rockstroh, H. Schmidt, A. Drauschke, F. Wyrowski, and L. Witting, Proc. SPIE 4440, 135 (2001).

Steingoerrer, I.

I. Steingoerrer, A. Grosse, and H. Fouckhardt, Proc. SPIE 4984, 234 (2003).

Tiziani, H. J.

H. J. Tiziani, S. Reichelt, C. Pruss, M. Rocktashel, and U. Hofbauer, Proc. SPIE 4440, 109 (2001).

Turunen, J.

Vladimirsky, O.

Z. Chen, Y. Vladimirsky, M. Brown, Q. Leonard, O. Vladimirsky, F. Moore, B. Lai, W. Yun, and E. Gluskin, J. Vac. Sci. Technol. B 15, 2522 (1997).

Vladimirsky, Y.

Z. Chen, Y. Vladimirsky, M. Brown, Q. Leonard, O. Vladimirsky, F. Moore, B. Lai, W. Yun, and E. Gluskin, J. Vac. Sci. Technol. B 15, 2522 (1997).

Witting, L.

E. Bernhard Kley, W. Rockstroh, H. Schmidt, A. Drauschke, F. Wyrowski, and L. Witting, Proc. SPIE 4440, 135 (2001).

Wong, W. H.

W. H. Wong and E. Y. B. Pun, J. Vac. Sci. Technol. B 19, 732 (2001).

Wyrowski, F.

E. Bernhard Kley, W. Rockstroh, H. Schmidt, A. Drauschke, F. Wyrowski, and L. Witting, Proc. SPIE 4440, 135 (2001).

Yun, W.

Z. Chen, Y. Vladimirsky, M. Brown, Q. Leonard, O. Vladimirsky, F. Moore, B. Lai, W. Yun, and E. Gluskin, J. Vac. Sci. Technol. B 15, 2522 (1997).

Zhu, R.

Z. Gao, M. Kong, R. Zhu, and L. Chen. Chin. Opt. Lett. 5, 241 (2007).

and L. Chen. Chin. Opt. Lett. (1)

Z. Gao, M. Kong, R. Zhu, and L. Chen. Chin. Opt. Lett. 5, 241 (2007).

Appl. Opt. (1)

J. Vac. Sci. Technol. B (2)

Z. Chen, Y. Vladimirsky, M. Brown, Q. Leonard, O. Vladimirsky, F. Moore, B. Lai, W. Yun, and E. Gluskin, J. Vac. Sci. Technol. B 15, 2522 (1997).

W. H. Wong and E. Y. B. Pun, J. Vac. Sci. Technol. B 19, 732 (2001).

Opt. Acta (1)

A. Fercher, Opt. Acta 23, 347 (1976).

Proc. SPIE (5)

H. J. Tiziani, S. Reichelt, C. Pruss, M. Rocktashel, and U. Hofbauer, Proc. SPIE 4440, 109 (2001).

Y. Chang and J. H. Burge, Proc. SPIE 3782, 358 (1999).

I. Steingoerrer, A. Grosse, and H. Fouckhardt, Proc. SPIE 4984, 234 (2003).

E. Bernhard Kley, W. Rockstroh, H. Schmidt, A. Drauschke, F. Wyrowski, and L. Witting, Proc. SPIE 4440, 135 (2001).

S. M. Arnold, Proc. SPIE 2536, 117 (1995).

Other (1)

H. P. Herzig, (ed.) Micro-Optics: Elements, Systems and Applications (Taylor & Francis Ltd., London, 1997, Reprinted 1998) p.30.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.