Abstract

A novel three-component hybrid-integrated optical accelerometer based on LiNbO3 photoelastic waveguide is presented. The photoelasitcity of LiNbO3 due to three-dimensional stress states is obtained analytically. We analyze the level of sensitivity to cross-axis accelerations which is a very important parameter for three-component accelerometer. Theoretically, the designed three-component hybrid-integrated optical accelerometer has a transverse sensitivity ratio (TSR) of zero. The sensor has a high natural frequency of 3.5 kHz and a linear broad working frequency.

© 2009 Chinese Optics Letters

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  1. A. Llobera, J. A. Plaza, I. Salinas, J. Berganzo, J. Garcia, J. Esteve, and C. Domínguez, Sensors and Actuators A 110, 395 (2004).
  2. X. Kang, E. Dong, A. Qiu, and X. He, Acta Opt. Sin. (in Chinese) 26, 202 (2006).
  3. N. Zeng, C. Z. Shi, M. Zhang, L. W. Wang, Y. B. Liao, and S. R. Lai, Opt. Commun. 234, 153 (2004).
  4. S. Jia, W. Kong, and J. Yang, Acta Opt. Sin. (in Chinese) 27, 1494 (2007).
  5. H. Luo, S. Xiong, Y. Hu, and M. Ni, Chinese J. Lasers (in Chinese) 32, 1382 (2005).
  6. B. Wu, C. Chen, G. Ding, D. Zhang, and Y. Cui, Opt. Eng. 43, 313 (2004).
  7. M. Bozzetti, G. Calo, A. D'Orazio, M. De Sario, L. Mescia, V. Petruzzelli, and F. Prudenzano, in Proceedings of ICTON Mediterranean Winter Conference (ICTON-MW) 2007 1 (2007).
  8. H. Pang, P. LiKamWa, and H. J. Cho, in Proceedings of 5th IEEE Conference on Sensors 1489 (2006).
  9. P. V. Lambeck and H. Hoekstra, in Proceedings of LEOS 2003 2, 967 (2003).
  10. D. En, C. Chen, Y. Cui, and G. Ding, Chinese J. Lasers (in Chinese) 32, 399 (2005).
  11. C. Chen, D. Zhang, G. Ding, and Y. Cui, Appl. Opt. 38, 628 (1999).
  12. C. Chen, B. Wu, G. Ding, and Y. Cui, Proc. SPIE 4919, 1 (2002).

2007 (1)

S. Jia, W. Kong, and J. Yang, Acta Opt. Sin. (in Chinese) 27, 1494 (2007).

2006 (1)

X. Kang, E. Dong, A. Qiu, and X. He, Acta Opt. Sin. (in Chinese) 26, 202 (2006).

2005 (2)

H. Luo, S. Xiong, Y. Hu, and M. Ni, Chinese J. Lasers (in Chinese) 32, 1382 (2005).

D. En, C. Chen, Y. Cui, and G. Ding, Chinese J. Lasers (in Chinese) 32, 399 (2005).

2004 (3)

A. Llobera, J. A. Plaza, I. Salinas, J. Berganzo, J. Garcia, J. Esteve, and C. Domínguez, Sensors and Actuators A 110, 395 (2004).

B. Wu, C. Chen, G. Ding, D. Zhang, and Y. Cui, Opt. Eng. 43, 313 (2004).

N. Zeng, C. Z. Shi, M. Zhang, L. W. Wang, Y. B. Liao, and S. R. Lai, Opt. Commun. 234, 153 (2004).

2002 (1)

C. Chen, B. Wu, G. Ding, and Y. Cui, Proc. SPIE 4919, 1 (2002).

1999 (1)

Berganzo, J.

A. Llobera, J. A. Plaza, I. Salinas, J. Berganzo, J. Garcia, J. Esteve, and C. Domínguez, Sensors and Actuators A 110, 395 (2004).

Chen, C.

D. En, C. Chen, Y. Cui, and G. Ding, Chinese J. Lasers (in Chinese) 32, 399 (2005).

B. Wu, C. Chen, G. Ding, D. Zhang, and Y. Cui, Opt. Eng. 43, 313 (2004).

C. Chen, B. Wu, G. Ding, and Y. Cui, Proc. SPIE 4919, 1 (2002).

C. Chen, D. Zhang, G. Ding, and Y. Cui, Appl. Opt. 38, 628 (1999).

Cui, Y.

D. En, C. Chen, Y. Cui, and G. Ding, Chinese J. Lasers (in Chinese) 32, 399 (2005).

B. Wu, C. Chen, G. Ding, D. Zhang, and Y. Cui, Opt. Eng. 43, 313 (2004).

C. Chen, B. Wu, G. Ding, and Y. Cui, Proc. SPIE 4919, 1 (2002).

C. Chen, D. Zhang, G. Ding, and Y. Cui, Appl. Opt. 38, 628 (1999).

Ding, G.

D. En, C. Chen, Y. Cui, and G. Ding, Chinese J. Lasers (in Chinese) 32, 399 (2005).

B. Wu, C. Chen, G. Ding, D. Zhang, and Y. Cui, Opt. Eng. 43, 313 (2004).

C. Chen, B. Wu, G. Ding, and Y. Cui, Proc. SPIE 4919, 1 (2002).

C. Chen, D. Zhang, G. Ding, and Y. Cui, Appl. Opt. 38, 628 (1999).

Domínguez, C.

A. Llobera, J. A. Plaza, I. Salinas, J. Berganzo, J. Garcia, J. Esteve, and C. Domínguez, Sensors and Actuators A 110, 395 (2004).

Dong, E.

X. Kang, E. Dong, A. Qiu, and X. He, Acta Opt. Sin. (in Chinese) 26, 202 (2006).

En, D.

D. En, C. Chen, Y. Cui, and G. Ding, Chinese J. Lasers (in Chinese) 32, 399 (2005).

Esteve, J.

A. Llobera, J. A. Plaza, I. Salinas, J. Berganzo, J. Garcia, J. Esteve, and C. Domínguez, Sensors and Actuators A 110, 395 (2004).

Garcia, J.

A. Llobera, J. A. Plaza, I. Salinas, J. Berganzo, J. Garcia, J. Esteve, and C. Domínguez, Sensors and Actuators A 110, 395 (2004).

He, X.

X. Kang, E. Dong, A. Qiu, and X. He, Acta Opt. Sin. (in Chinese) 26, 202 (2006).

Hu, Y.

H. Luo, S. Xiong, Y. Hu, and M. Ni, Chinese J. Lasers (in Chinese) 32, 1382 (2005).

Jia, S.

S. Jia, W. Kong, and J. Yang, Acta Opt. Sin. (in Chinese) 27, 1494 (2007).

Kang, X.

X. Kang, E. Dong, A. Qiu, and X. He, Acta Opt. Sin. (in Chinese) 26, 202 (2006).

Kong, W.

S. Jia, W. Kong, and J. Yang, Acta Opt. Sin. (in Chinese) 27, 1494 (2007).

Lai, S. R.

N. Zeng, C. Z. Shi, M. Zhang, L. W. Wang, Y. B. Liao, and S. R. Lai, Opt. Commun. 234, 153 (2004).

Liao, Y. B.

N. Zeng, C. Z. Shi, M. Zhang, L. W. Wang, Y. B. Liao, and S. R. Lai, Opt. Commun. 234, 153 (2004).

Llobera, A.

A. Llobera, J. A. Plaza, I. Salinas, J. Berganzo, J. Garcia, J. Esteve, and C. Domínguez, Sensors and Actuators A 110, 395 (2004).

Luo, H.

H. Luo, S. Xiong, Y. Hu, and M. Ni, Chinese J. Lasers (in Chinese) 32, 1382 (2005).

Ni, M.

H. Luo, S. Xiong, Y. Hu, and M. Ni, Chinese J. Lasers (in Chinese) 32, 1382 (2005).

Plaza, J. A.

A. Llobera, J. A. Plaza, I. Salinas, J. Berganzo, J. Garcia, J. Esteve, and C. Domínguez, Sensors and Actuators A 110, 395 (2004).

Qiu, A.

X. Kang, E. Dong, A. Qiu, and X. He, Acta Opt. Sin. (in Chinese) 26, 202 (2006).

Salinas, I.

A. Llobera, J. A. Plaza, I. Salinas, J. Berganzo, J. Garcia, J. Esteve, and C. Domínguez, Sensors and Actuators A 110, 395 (2004).

Shi, C. Z.

N. Zeng, C. Z. Shi, M. Zhang, L. W. Wang, Y. B. Liao, and S. R. Lai, Opt. Commun. 234, 153 (2004).

Wang, L. W.

N. Zeng, C. Z. Shi, M. Zhang, L. W. Wang, Y. B. Liao, and S. R. Lai, Opt. Commun. 234, 153 (2004).

Wu, B.

B. Wu, C. Chen, G. Ding, D. Zhang, and Y. Cui, Opt. Eng. 43, 313 (2004).

C. Chen, B. Wu, G. Ding, and Y. Cui, Proc. SPIE 4919, 1 (2002).

Xiong, S.

H. Luo, S. Xiong, Y. Hu, and M. Ni, Chinese J. Lasers (in Chinese) 32, 1382 (2005).

Yang, J.

S. Jia, W. Kong, and J. Yang, Acta Opt. Sin. (in Chinese) 27, 1494 (2007).

Zeng, N.

N. Zeng, C. Z. Shi, M. Zhang, L. W. Wang, Y. B. Liao, and S. R. Lai, Opt. Commun. 234, 153 (2004).

Zhang, D.

B. Wu, C. Chen, G. Ding, D. Zhang, and Y. Cui, Opt. Eng. 43, 313 (2004).

C. Chen, D. Zhang, G. Ding, and Y. Cui, Appl. Opt. 38, 628 (1999).

Zhang, M.

N. Zeng, C. Z. Shi, M. Zhang, L. W. Wang, Y. B. Liao, and S. R. Lai, Opt. Commun. 234, 153 (2004).

Acta Opt. Sin. (in Chinese) (2)

S. Jia, W. Kong, and J. Yang, Acta Opt. Sin. (in Chinese) 27, 1494 (2007).

X. Kang, E. Dong, A. Qiu, and X. He, Acta Opt. Sin. (in Chinese) 26, 202 (2006).

Appl. Opt. (1)

Chinese J. Lasers (in Chinese) (2)

D. En, C. Chen, Y. Cui, and G. Ding, Chinese J. Lasers (in Chinese) 32, 399 (2005).

H. Luo, S. Xiong, Y. Hu, and M. Ni, Chinese J. Lasers (in Chinese) 32, 1382 (2005).

Opt. Commun. (1)

N. Zeng, C. Z. Shi, M. Zhang, L. W. Wang, Y. B. Liao, and S. R. Lai, Opt. Commun. 234, 153 (2004).

Opt. Eng. (1)

B. Wu, C. Chen, G. Ding, D. Zhang, and Y. Cui, Opt. Eng. 43, 313 (2004).

Proc. SPIE (1)

C. Chen, B. Wu, G. Ding, and Y. Cui, Proc. SPIE 4919, 1 (2002).

Sensors and Actuators A (1)

A. Llobera, J. A. Plaza, I. Salinas, J. Berganzo, J. Garcia, J. Esteve, and C. Domínguez, Sensors and Actuators A 110, 395 (2004).

Other (3)

M. Bozzetti, G. Calo, A. D'Orazio, M. De Sario, L. Mescia, V. Petruzzelli, and F. Prudenzano, in Proceedings of ICTON Mediterranean Winter Conference (ICTON-MW) 2007 1 (2007).

H. Pang, P. LiKamWa, and H. J. Cho, in Proceedings of 5th IEEE Conference on Sensors 1489 (2006).

P. V. Lambeck and H. Hoekstra, in Proceedings of LEOS 2003 2, 967 (2003).

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