Abstract

Finite element method and ultrafast thermoelasticity model are combined to simulate the microbump formation irradiated by a femtosecond laser. It has been shown that the effect of microbump formation is related to the characteristic of incident femtosecond laser and the thermoelasticity properties of the film. The numerical results exhibit good agreements with the experimental results in both the shape and height of the conical microbump structure, which verify the effectiveness of the ultrafast thermoelasticity model in experiments. It should be helpful for selecting appropriate materials for nanotexturing of thin films by ultrafast lasers.

© 2008 Chinese Optics Letters

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2007 (1)

2006 (1)

2005 (1)

2004 (1)

J. K. Chen, J. E. Beraun, and C. L. Tham, Int. J. Eng. Sci. 42, 793 (2004).

2002 (1)

B. S. Yilbas, J. Phys. D 35, 1210 (2002).

2001 (1)

J. K. Chen and J. E. Beraun, Numer. Heat Transfer Part A 40, 1 (2001).

1999 (1)

L. A. Falkovsky and E. G. Mishchenko, J. Exp. Theor. Phys. 88, 84 (1999).

1997 (1)

S. I. Anismov and B. Rethfeld, Proc. SPIE 3093, 192 (1997).

1994 (1)

X. Y. Wang, D. M. Riffle, Y. S. Lee, and M. C. Downer, Phys. Rev. B 50, 8016 (1994).

1993 (1)

T. Q. Qiu and C. L. Tien, J. Heat Transfer 115, 835 (1993).

1974 (1)

S. I. Anisimov, B. L. Kapeliovich, and T. L. Perelman, Sov. Phys. JETP 39, 375 (1974).

Anisimov, S. I.

S. I. Anisimov, B. L. Kapeliovich, and T. L. Perelman, Sov. Phys. JETP 39, 375 (1974).

Anismov, S. I.

S. I. Anismov and B. Rethfeld, Proc. SPIE 3093, 192 (1997).

Beraun, J. E.

J. K. Chen, J. E. Beraun, and C. L. Tham, Int. J. Eng. Sci. 42, 793 (2004).

J. K. Chen and J. E. Beraun, Numer. Heat Transfer Part A 40, 1 (2001).

Chen, J. K.

J. K. Chen, J. E. Beraun, and C. L. Tham, Int. J. Eng. Sci. 42, 793 (2004).

J. K. Chen and J. E. Beraun, Numer. Heat Transfer Part A 40, 1 (2001).

Downer, M. C.

X. Y. Wang, D. M. Riffle, Y. S. Lee, and M. C. Downer, Phys. Rev. B 50, 8016 (1994).

Eaton, S. M.

Ersoy, O. K.

Falkovsky, L. A.

L. A. Falkovsky and E. G. Mishchenko, J. Exp. Theor. Phys. 88, 84 (1999).

Gong, Q.

Herman, P. R.

Jiang, H.

Kapeliovich, B. L.

S. I. Anisimov, B. L. Kapeliovich, and T. L. Perelman, Sov. Phys. JETP 39, 375 (1974).

Lee, Y. S.

X. Y. Wang, D. M. Riffle, Y. S. Lee, and M. C. Downer, Phys. Rev. B 50, 8016 (1994).

Li, J.

Li, Y.

Mishchenko, E. G.

L. A. Falkovsky and E. G. Mishchenko, J. Exp. Theor. Phys. 88, 84 (1999).

Perelman, T. L.

S. I. Anisimov, B. L. Kapeliovich, and T. L. Perelman, Sov. Phys. JETP 39, 375 (1974).

Qiu, T. Q.

T. Q. Qiu and C. L. Tien, J. Heat Transfer 115, 835 (1993).

Rethfeld, B.

S. I. Anismov and B. Rethfeld, Proc. SPIE 3093, 192 (1997).

Riffle, D. M.

X. Y. Wang, D. M. Riffle, Y. S. Lee, and M. C. Downer, Phys. Rev. B 50, 8016 (1994).

Srisungsitthisunti, P.

Tham, C. L.

J. K. Chen, J. E. Beraun, and C. L. Tham, Int. J. Eng. Sci. 42, 793 (2004).

Tien, C. L.

T. Q. Qiu and C. L. Tien, J. Heat Transfer 115, 835 (1993).

Wang, X. Y.

X. Y. Wang, D. M. Riffle, Y. S. Lee, and M. C. Downer, Phys. Rev. B 50, 8016 (1994).

Xu, X.

Yang, H.

Yilbas, B. S.

B. S. Yilbas, J. Phys. D 35, 1210 (2002).

Zhang, H.

Chin. Opt. Lett. (1)

Int. J. Eng. Sci. (1)

J. K. Chen, J. E. Beraun, and C. L. Tham, Int. J. Eng. Sci. 42, 793 (2004).

J. Exp. Theor. Phys. (1)

L. A. Falkovsky and E. G. Mishchenko, J. Exp. Theor. Phys. 88, 84 (1999).

J. Heat Transfer (1)

T. Q. Qiu and C. L. Tien, J. Heat Transfer 115, 835 (1993).

J. Opt. Soc. Am. B (1)

J. Phys. D (1)

B. S. Yilbas, J. Phys. D 35, 1210 (2002).

Numer. Heat Transfer Part A (1)

J. K. Chen and J. E. Beraun, Numer. Heat Transfer Part A 40, 1 (2001).

Opt. Lett. (1)

Phys. Rev. B (1)

X. Y. Wang, D. M. Riffle, Y. S. Lee, and M. C. Downer, Phys. Rev. B 50, 8016 (1994).

Proc. SPIE (1)

S. I. Anismov and B. Rethfeld, Proc. SPIE 3093, 192 (1997).

Sov. Phys. JETP (1)

S. I. Anisimov, B. L. Kapeliovich, and T. L. Perelman, Sov. Phys. JETP 39, 375 (1974).

Other (3)

D. Y. Tzou, Macro- to Microscale Heat Transfer: The Lagging Behavior (Taylor and Francis, Washington D. C., 1997).

K.-J. Bathe, Finite Element Procedures (Prentice-Hall, New Jersey, 1996).

C. Kittle, Introduction to Solid State Physics (Wiley, New York, 1967).

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