Abstract

Using traditional five-interferogram algorithm to unwrap phase for length measurement, the phase steps must be equal to π/2 exactly, but it is almost impossible to achieve in nanometer positioning technique. Aiming to overcome this defect of traditional five-interferogram algorithm, an improved five-interferogram algorithm is presented. This improved algorithm not only keeps the high accuracy of traditional five-interferogram algorithm, but also does not need absolute equal step to unwrap phase. Instead, this algorithm only needs measuring phase-shifting. With the numerical simulation, the improved five-interferogram algorithm shows high accuracy, high reliability, and feasibility in practice. It is very valuable for accurate length measurement with Fizeau interferometer and Fabry-Perot interferometer.

© 2008 Chinese Optics Letters

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S. Fu, H. Lin, Q. Yu, and X. Yang, Acta Opt. Sin. (in Chinese) 27, 663 (2007).

F. Zuo, L. Chen, and C. Xu, Acta Opt. Sin. (in Chinese) 27, 864 (2007).

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Z. Luo, Z. Chen, Y. Gu, and Y. Chen, Acta Opt. Sin. (in Chinese) 26, 1687 (2006).

2005 (3)

Z. Luo, L. Yang, and Y. Chen, Acta Phys. Sin. (in Chinese) 54, 3051 (2005).

Z. Luo, L. Yang, and Y. Chen, Acta Opt. Sin. (in Chinese) 25, 1629 (2005).

Z. Luo, L. Yang, and Y. Chen, Acta Metrologica Sin. (in Chinese) 26, 289 (2005).

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L. Wang, X. Su, and L. Zhou, Acta Opt. Sin. (in Chinese) 24, 614 (2004).

2001 (1)

2000 (3)

C. S. Vikram, Optik 111, 563 (2000).

W. Li, L. Su, and X. Su, Acta Opt. Sin. (in Chinese) 20, 792 (2000).

H. Guo and M. Chen, Opt. Precision Eng. (in Chinese) 8, 185 (2000).

1996 (2)

1991 (2)

1989 (1)

G. Bonsch and H. Bohme, Optik 82, 161 (1989).

1987 (2)

Blanco-Garcia, J.

Bohme, H.

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F. Zuo, L. Chen, and C. Xu, Acta Opt. Sin. (in Chinese) 27, 864 (2007).

Chen, M.

H. Guo and M. Chen, Opt. Precision Eng. (in Chinese) 8, 185 (2000).

Chen, Y.

Z. Luo, Z. Chen, Y. Gu, and Y. Chen, Acta Opt. Sin. (in Chinese) 26, 1687 (2006).

Z. Luo, L. Yang, and Y. Chen, Acta Opt. Sin. (in Chinese) 25, 1629 (2005).

Z. Luo, L. Yang, and Y. Chen, Acta Metrologica Sin. (in Chinese) 26, 289 (2005).

Z. Luo, L. Yang, and Y. Chen, Acta Phys. Sin. (in Chinese) 54, 3051 (2005).

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Dorrio, B. V.

Eiju, T.

Fernádez, J. L.

Fu, S.

S. Fu, H. Lin, Q. Yu, and X. Yang, Acta Opt. Sin. (in Chinese) 27, 663 (2007).

Gemma, T.

Gu, Y.

Z. Luo, Z. Chen, Y. Gu, and Y. Chen, Acta Opt. Sin. (in Chinese) 26, 1687 (2006).

Guo, H.

H. Guo and M. Chen, Opt. Precision Eng. (in Chinese) 8, 185 (2000).

Hariharan, P.

Lai, G.

Li, W.

W. Li, L. Su, and X. Su, Acta Opt. Sin. (in Chinese) 20, 792 (2000).

Lin, H.

S. Fu, H. Lin, Q. Yu, and X. Yang, Acta Opt. Sin. (in Chinese) 27, 663 (2007).

Lopez, C.

Luo, Z.

Z. Luo, Z. Chen, Y. Gu, and Y. Chen, Acta Opt. Sin. (in Chinese) 26, 1687 (2006).

Z. Luo, L. Yang, and Y. Chen, Acta Opt. Sin. (in Chinese) 25, 1629 (2005).

Z. Luo, L. Yang, and Y. Chen, Acta Metrologica Sin. (in Chinese) 26, 289 (2005).

Z. Luo, L. Yang, and Y. Chen, Acta Phys. Sin. (in Chinese) 54, 3051 (2005).

Ncolaus, R. A.

R. A. Ncolaus, Optik 87, 23 (1991).

Ooval, A. F.

Oreb, B. F.

Perez-Amor, M.

Soto, R.

Su, L.

W. Li, L. Su, and X. Su, Acta Opt. Sin. (in Chinese) 20, 792 (2000).

Su, X.

L. Wang, X. Su, and L. Zhou, Acta Opt. Sin. (in Chinese) 24, 614 (2004).

W. Li, L. Su, and X. Su, Acta Opt. Sin. (in Chinese) 20, 792 (2000).

Surrel, Y.

Vikram, C. S.

C. S. Vikram, Optik 111, 563 (2000).

Wang, L.

L. Wang, X. Su, and L. Zhou, Acta Opt. Sin. (in Chinese) 24, 614 (2004).

Xu, C.

F. Zuo, L. Chen, and C. Xu, Acta Opt. Sin. (in Chinese) 27, 864 (2007).

Yang, L.

Z. Luo, L. Yang, and Y. Chen, Acta Metrologica Sin. (in Chinese) 26, 289 (2005).

Z. Luo, L. Yang, and Y. Chen, Acta Opt. Sin. (in Chinese) 25, 1629 (2005).

Z. Luo, L. Yang, and Y. Chen, Acta Phys. Sin. (in Chinese) 54, 3051 (2005).

Yang, X.

S. Fu, H. Lin, Q. Yu, and X. Yang, Acta Opt. Sin. (in Chinese) 27, 663 (2007).

Yatagai, T.

Yu, Q.

S. Fu, H. Lin, Q. Yu, and X. Yang, Acta Opt. Sin. (in Chinese) 27, 663 (2007).

Zhou, L.

L. Wang, X. Su, and L. Zhou, Acta Opt. Sin. (in Chinese) 24, 614 (2004).

Zhu, Y.

Zuo, F.

F. Zuo, L. Chen, and C. Xu, Acta Opt. Sin. (in Chinese) 27, 864 (2007).

Acta Metrologica Sin. (in Chinese) (1)

Z. Luo, L. Yang, and Y. Chen, Acta Metrologica Sin. (in Chinese) 26, 289 (2005).

Acta Opt. Sin. (in Chinese) (6)

Z. Luo, L. Yang, and Y. Chen, Acta Opt. Sin. (in Chinese) 25, 1629 (2005).

Z. Luo, Z. Chen, Y. Gu, and Y. Chen, Acta Opt. Sin. (in Chinese) 26, 1687 (2006).

L. Wang, X. Su, and L. Zhou, Acta Opt. Sin. (in Chinese) 24, 614 (2004).

W. Li, L. Su, and X. Su, Acta Opt. Sin. (in Chinese) 20, 792 (2000).

S. Fu, H. Lin, Q. Yu, and X. Yang, Acta Opt. Sin. (in Chinese) 27, 663 (2007).

F. Zuo, L. Chen, and C. Xu, Acta Opt. Sin. (in Chinese) 27, 864 (2007).

Acta Phys. Sin. (in Chinese) (1)

Z. Luo, L. Yang, and Y. Chen, Acta Phys. Sin. (in Chinese) 54, 3051 (2005).

Appl. Opt. (5)

J. Opt. Soc. Am. A (1)

Opt. Precision Eng. (in Chinese) (1)

H. Guo and M. Chen, Opt. Precision Eng. (in Chinese) 8, 185 (2000).

Optik (3)

C. S. Vikram, Optik 111, 563 (2000).

R. A. Ncolaus, Optik 87, 23 (1991).

G. Bonsch and H. Bohme, Optik 82, 161 (1989).

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