Abstract

BiOx films are prepared by reactive direct current (DC) magnetron sputtering from a metallic bismuth target in Ar + O2 with different O2/Ar ratios. It is found that the optical property of BiOx films is sensitive to O2/Ar ratios and the films deposited at O2/Ar ratio of 0.5 have the best reflectivity contrast under the same conditions. The structure and optical characteristics of the films are studied by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and spectrophotometer. As revealed by investigations, the phase transition is mainly responsible for the change of optical properties. The static test results indicate that the BiOx films have good writing sensitivity for blue laser beams. A high reflectivity contrast of about 52% at a writing power of 11 mW and writing pulse width of 800 ns is obtained. In addition, the films demonstrate good stability after being read for 10000 times.

© 2008 Chinese Optics Letters

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