Abstract

An improved method of angle measurement is proposed based on a parallel plate interferometer. A position detection system is incorporated into a parallel plate interferometer in order to realize large deflection angle measurement. A reflecting mirror is introduced for increasing the measurement resolution. In experiments, a deflection angle of a measured target was measured within about 3 deg. with high accuracy. And as a phase modulating interferometer, it was used to measure a small angular displacement with a repeatability of 5.5*10^(-8) rad.

© 2007 Chinese Optics Letters

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2006 (1)

2004 (1)

C. Zhang and X. Wang, Opt. Eng. 43, 3008 (2004).

2000 (1)

X. Wang, X. Wang, F. Qian, G. Chen, H. Lu, G. Chen, and Z. Fang, Chin. J. Lasers (in Chinese) 27, 367 (2000).

1999 (2)

M. Ikram and G. Hussain, Appl. Opt. 38, 113 (1999).

J.-H. Zhang and C.-H. Menq, Meas. Sci. Technol. 10, 1247 (1999).

1998 (1)

R. Torroba and A. A. Tagliaferri, Opt. Commun. 149, 213 (1998).

1997 (1)

Yu. V. Filatov, D. P. Loukianov, and R. Probst, Metrologia 34, 343 (1997).

1995 (2)

1992 (1)

1986 (1)

Brentano, P. von

Budelsky, D.

Chen, G.

X. Wang, X. Wang, F. Qian, G. Chen, H. Lu, G. Chen, and Z. Fang, Chin. J. Lasers (in Chinese) 27, 367 (2000).

X. Wang, X. Wang, F. Qian, G. Chen, H. Lu, G. Chen, and Z. Fang, Chin. J. Lasers (in Chinese) 27, 367 (2000).

Fang, Z.

X. Wang, X. Wang, F. Qian, G. Chen, H. Lu, G. Chen, and Z. Fang, Chin. J. Lasers (in Chinese) 27, 367 (2000).

Filatov, Yu. V.

Yu. V. Filatov, D. P. Loukianov, and R. Probst, Metrologia 34, 343 (1997).

Huang, P. S.

Hussain, G.

Ikram, M.

Ilev, I. K.

I. K. Ilev, Opt. Commun. 119, 513 (1995).

Kamada, O.

Kiyono, S.

Kremer, L.

Liu, Y.

Loukianov, D. P.

Yu. V. Filatov, D. P. Loukianov, and R. Probst, Metrologia 34, 343 (1997).

Lu, H.

X. Wang, X. Wang, F. Qian, G. Chen, H. Lu, G. Chen, and Z. Fang, Chin. J. Lasers (in Chinese) 27, 367 (2000).

Menq, C.-H.

J.-H. Zhang and C.-H. Menq, Meas. Sci. Technol. 10, 1247 (1999).

Okazaki, H.

Platte, D.

Probst, R.

Yu. V. Filatov, D. P. Loukianov, and R. Probst, Metrologia 34, 343 (1997).

Qian, F.

X. Wang, X. Wang, F. Qian, G. Chen, H. Lu, G. Chen, and Z. Fang, Chin. J. Lasers (in Chinese) 27, 367 (2000).

Sasaki, O.

Tagliaferri, A. A.

R. Torroba and A. A. Tagliaferri, Opt. Commun. 149, 213 (1998).

Torroba, R.

R. Torroba and A. A. Tagliaferri, Opt. Commun. 149, 213 (1998).

Wang, X.

Y. Liu, X. Wang, and X. Wang, Chin. Opt. Lett. 4, 309 (2006).

Y. Liu, X. Wang, and X. Wang, Chin. Opt. Lett. 4, 309 (2006).

C. Zhang and X. Wang, Opt. Eng. 43, 3008 (2004).

X. Wang, X. Wang, F. Qian, G. Chen, H. Lu, G. Chen, and Z. Fang, Chin. J. Lasers (in Chinese) 27, 367 (2000).

X. Wang, X. Wang, F. Qian, G. Chen, H. Lu, G. Chen, and Z. Fang, Chin. J. Lasers (in Chinese) 27, 367 (2000).

Zhang, C.

C. Zhang and X. Wang, Opt. Eng. 43, 3008 (2004).

Zhang, J.-H.

J.-H. Zhang and C.-H. Menq, Meas. Sci. Technol. 10, 1247 (1999).

Appl. Opt. (4)

Chin. J. Lasers (in Chinese) (1)

X. Wang, X. Wang, F. Qian, G. Chen, H. Lu, G. Chen, and Z. Fang, Chin. J. Lasers (in Chinese) 27, 367 (2000).

Chin. Opt. Lett. (1)

Meas. Sci. Technol. (1)

J.-H. Zhang and C.-H. Menq, Meas. Sci. Technol. 10, 1247 (1999).

Metrologia (1)

Yu. V. Filatov, D. P. Loukianov, and R. Probst, Metrologia 34, 343 (1997).

Opt. Commun. (2)

R. Torroba and A. A. Tagliaferri, Opt. Commun. 149, 213 (1998).

I. K. Ilev, Opt. Commun. 119, 513 (1995).

Opt. Eng. (1)

C. Zhang and X. Wang, Opt. Eng. 43, 3008 (2004).

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